發(fā)布時間：2018-06-07 18:28

  本文選題：氧化鋅 + 納米結(jié)構(gòu)　； 參考：《電子科技大學》2017年碩士論文

【摘要】：納米結(jié)構(gòu)的敏感吸附膜是聲表面波傳感器的研究中的熱點。氧化鋅具有良好壓電特性、紫外吸收以及熒光特性,在氣敏檢測與UV測試中都具有良好的應(yīng)用;氧化鋅納米結(jié)構(gòu)在當前眾多氧化物納米結(jié)構(gòu)中,是極具研究價值的。本論文制備并研究純ZnO納米結(jié)構(gòu),主要依靠AFM、SEM、XRD以及光透過率對ZnO納米結(jié)構(gòu)進行表征;并制備ZnO納米結(jié)構(gòu)聲表面波傳感器用于檢測氣敏特性與UV特性。實驗的主要工作包括:1.制備ZnO納米薄膜,對ZnO納米薄膜進行AFM、XRD、SEM以及光透過率表征;制備了該材料的聲表面波傳感器,利用傳感器進行氣敏檢測和UV特性檢測,在實驗中該傳感器檢測到濃度為10 ppm的氨氣以及探測到輻照僅為6μw/cm~2的波長為365 nm的紫外線。研究在溶膠凝膠法制備ZnO納米薄膜時,溶膠的溶劑、乙酸鋅濃度以及燒結(jié)時間對納米薄膜的影響。發(fā)現(xiàn)了響應(yīng)變化為正值的ZnO納米薄膜聲表面波傳感器。2.利用聚酰亞胺膠帶通過遮蓋的方法,保護ST切石英聲表面波器件的叉指換能器、反射柵以及敏感區(qū)域的一部分,制備僅覆蓋敏感區(qū)域一部分的ZnO納米棒陣列,對該陣列進行SEM、XRD以及透過率表征;制備該結(jié)構(gòu)相應(yīng)的聲表面波傳感器,進行UV紫外特性檢測和氣敏檢測。制備無種子層的ZnO納米棒陣列,對該結(jié)構(gòu)進行SEM、XRD、透過率表征;制備該結(jié)構(gòu)的聲表面波傳感器,進行氣敏檢測。兩種傳感器在氣敏測試中都取得了十分理想的結(jié)果,對濃度為10 ppm的氨氣相應(yīng)都超過100 Hz,部分覆蓋生長的納米棒陣列傳感器在紫外檢測中探測到6μw/cm~2并取得了200 Hz的響應(yīng)。3.制備ZnS納米片結(jié)構(gòu),對該材料進行SEM、XRD表征;制備基于ZnS納米片的聲表面波傳感器并測試其氣敏特性,對氨氣表現(xiàn)出良好的選擇性,在氨氣檢測中檢測濃度為1 ppm的氨氣響應(yīng)為170 Hz。
[Abstract]:The sensitive adsorption film of nanostructure is a hot spot in the research of saw sensor. Zinc oxide has good piezoelectric properties, UV absorption and fluorescence characteristics, and has good applications in gas sensing and UV testing. Zinc oxide nanostructures are of great value in many oxide nanostructures. In this thesis, pure ZnO nanostructures were prepared and studied, which were characterized by AFM Sem XRD and optical transmittance, and the surface acoustic wave (saw) sensors were fabricated for gas sensing and UV detection. The main work of the experiment included: 1. ZnO nanocrystalline films were prepared and characterized by AFMXRDX SEM and optical transmittance. Surface acoustic wave sensors were used to detect gas sensitivity and UV characteristics of ZnO nanocrystalline films. In the experiment, the sensor detects ammonia gas with concentration of 10 ppm and UV radiation of only 6 渭 w/cm~2 at 365nm. The effects of sol-solvent, zinc acetate concentration and sintering time on ZnO nanocrystalline films prepared by sol-gel method were studied. The surface acoustic wave sensor of ZnO nanocrystalline film with positive response was found. By using polyimide tape to protect the cross finger transducer, reflecting gate and part of sensitive region of St cut quartz saw device, ZnO nanorods arrays covering only one part of sensitive area were prepared. The array was characterized by SEM XRD and transmittance, and the corresponding surface acoustic wave sensor was prepared for UV UV and gas sensitive detection. ZnO nanorod arrays without seed layer were prepared and the structure was characterized by SEMX RD.The surface acoustic wave sensor of the structure was prepared for gas sensing. The two kinds of sensors have obtained very ideal results in the gas sensitivity test. The ammonia concentration of 10 ppm is higher than 100Hz. the partially covered nanorod array sensor detects 6 渭 w/cm~2 in UV detection and obtains 200Hz response. 3. ZnS nanostructures were prepared and characterized by means of SEM XRD. Surface acoustic wave sensors based on ZnS nanoplates were prepared and their gas sensing properties were tested. In the detection of ammonia gas, the response of ammonia gas with a concentration of 1 ppm was 170Hz.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TB383.1;TP212

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本文編號：1992293