本文選題：QCM　切入點：質(zhì)量靈敏度　出處：《電子科技大學(xué)》2017年碩士論文

【摘要】：QCM(Quartz Crystal Microbalance)是20世紀(jì)60年代出現(xiàn)的一種基于壓電效應(yīng)進(jìn)行微質(zhì)量測量的傳感器裝置,由于其測量精度可達(dá)納克級,且結(jié)構(gòu)簡單、成本低、可實時監(jiān)測,所以在生物醫(yī)學(xué)、環(huán)境保護(hù)等領(lǐng)域應(yīng)用廣泛。然而實際應(yīng)用中需要先擬合出質(zhì)量與諧振頻率偏移量的線性關(guān)系,然后才能投入使用,這限制了QCM的應(yīng)用。另外,QCM表面電極對其受迫振動有影響,不同區(qū)域電極存在情況不同導(dǎo)致各區(qū)域在逆壓電效應(yīng)下引起的質(zhì)點位移不同,因此QCM不同位置的質(zhì)量靈敏度存在差異,所以QCM在應(yīng)用中存在重復(fù)性低、測量誤差大的問題,阻礙了QCM的推廣應(yīng)用。本文以石英晶體的壓電特性和振動特性為基礎(chǔ),推導(dǎo)了QCM的質(zhì)量靈敏度計算方式,并分析了影響QCM質(zhì)量靈敏度的因素。本文的主要內(nèi)容:1、從石英晶體的特性出發(fā),介紹了石英晶體的壓電效應(yīng)、頻率溫度特性以及石英晶體諧振器的等效電路。2、在石英晶體壓電方程和質(zhì)點位移方程的基礎(chǔ)上,分區(qū)域分析了石英晶體諧振器的受迫振動情況,得出QCM質(zhì)量靈敏度的計算方法。通過Matlab仿真分析QCM的質(zhì)量靈敏度分布,分析表明QCM電極中心的質(zhì)量靈敏度最大,隨著遠(yuǎn)離電極中心質(zhì)量靈敏度呈指數(shù)級衰減。然后通過Matlab仿真分析電極厚度、電極尺寸、石英晶片厚度以及電極密度對質(zhì)量靈敏度的影響,以便在設(shè)計時提供理論參考。由于能陷效應(yīng)存在,QCM非電極區(qū)的范圍要大于電極區(qū),非電極區(qū)在質(zhì)量測量中不容忽視,所以接著分析了非電極區(qū)在QCM質(zhì)量測量過程中的影響。3、在液相下QCM的諧振頻率偏移量與液體的粘彈性有關(guān),在已知液體粘度和密度的情況下,可以通過公式計算出理論的QCM諧振頻率偏移量。然后分別以水和有機(jī)試劑為被測物,測量QCM的頻移并與理論頻移值對比,實測值與理論值的最大誤差不大于8.2%。
[Abstract]:QCM(Quartz Crystal Microbalanceis a kind of sensor device based on piezoelectric effect for micro-mass measurement, which appeared in the 1960s. Because of its accuracy, simple structure, low cost and real-time monitoring, it can be used in biomedicine. Environmental protection and other fields are widely used. However, the linear relationship between mass and resonance frequency offset must be fitted first before it can be put into use, which limits the application of QCM. In addition, the surface electrode has an effect on the forced vibration. The existence of different electrodes in different regions leads to different displacement of particles in different regions under inverse piezoelectric effect, so there are differences in the mass sensitivity of QCM in different positions, so there are problems of low repeatability and large measurement error in the application of QCM. In this paper, based on the piezoelectric and vibration characteristics of quartz crystal, the mass sensitivity calculation method of QCM is derived. The main content of this paper is to introduce the piezoelectric effect of quartz crystal based on the characteristics of quartz crystal. The frequency and temperature characteristics and the equivalent circuit of quartz crystal resonator. Based on the piezoelectric equation of quartz crystal and the displacement equation of particle, the forced vibration of quartz crystal resonator is analyzed in different regions. The mass sensitivity distribution of QCM is analyzed by Matlab simulation. The results show that the mass sensitivity of QCM electrode center is the largest. The influence of electrode thickness, electrode size, quartz wafer thickness and electrode density on the mass sensitivity was analyzed by Matlab simulation. In order to provide a theoretical reference for the design, because the energy trapping effect exists in the non-electrode region of QCM is larger than that of the electrode region, the non-electrode region can not be ignored in the mass measurement. Therefore, the influence of non-electrode region on QCM mass measurement is analyzed. The resonance frequency offset of QCM in liquid phase is related to the viscoelasticity of liquid. When the viscosity and density of liquid are known, The theoretical QCM resonance frequency offset can be calculated by the formula, and then the frequency shift of QCM is measured using water and organic reagent as the measured object, and compared with the theoretical frequency shift, the maximum error between the measured value and the theoretical value is not greater than 8.2.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TP212

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