發(fā)布時間：2018-03-22 14:40

  本文選題：振動傳感器　切入點：高溫傳感器　出處：《光學技術》2017年04期 　論文類型：期刊論文

【摘要】：報道了一種基于飛秒激光加工的微納高溫振動傳感器。通過熔接形成單模光纖-空芯光纖-單模光纖的結構,利用單模光纖和空芯光纖在熔接面形成的菲涅爾反射,構成外腔式法布里-珀羅干涉儀(EFPI)。用飛秒激光燒蝕空芯光纖,形成懸臂梁結構。末端的單模光纖作為質(zhì)量塊,在受到振動時帶動懸臂梁振動,使懸臂梁產(chǎn)生微彎,進而使EFPI腔長發(fā)生變化。實驗結果表明,傳感器的工作區(qū)域為20~300Hz,在100Hz時,0~3.01g范圍內(nèi)測得加速度分辨率為5×10-4 g,加速度響應靈敏度為129.6nm/g。傳感器受溫度影響小,腔長的溫度交叉響應僅為0.225nm/℃,傳感器可耐950℃高溫沖擊。
[Abstract]:A micro / nano high temperature vibration sensor based on femtosecond laser processing is reported. The structure of single mode optical fiber, hollow fiber and single mode fiber is formed by welding. Fresnel reflection is formed by using single mode fiber and hollow fiber on the fusion surface. The structure of cantilever beam is formed by using femtosecond laser ablation of hollow fiber to form the cantilever beam structure. The single-mode optical fiber at the end of the beam acts as a mass block, driving the cantilever beam to vibrate when it is subjected to vibration, which makes the cantilever beam slightly bend. The experimental results show that the working area of the sensor is 20 脳 10 ~ (-3) Hz, the acceleration resolution is 5 脳 10 ~ (-4) g and the sensitivity of acceleration response is 129.6 nm / g. The sensor is less affected by temperature, and the acceleration resolution is 5 脳 10 ~ (-4) g. The temperature cross response of cavity length is only 0.225nm/ 鈩，

本文編號：1649100