本文選題：Fabry-Perot　切入點(diǎn)：光纖　出處：《哈爾濱工業(yè)大學(xué)》2017年博士論文　論文類型：學(xué)位論文

【摘要】：光纖聲壓傳感系統(tǒng)的發(fā)展對聲壓傳感器提出了小型化的要求。受探測原理制約,傳統(tǒng)的長臂長型光纖聲壓器在小型化方向遇到困難;而將MEMS技術(shù)同非本征型Fabry-Perot傳感技術(shù)結(jié)合組成新型光纖干涉?zhèn)鞲衅饔型黄圃撈款i。目前該技術(shù)正處于起步階段,面臨諸多問題,如長期忽視聲壓傳感探頭結(jié)構(gòu)設(shè)計(jì)的理論分析;缺乏低成本、高性能聲壓敏感元件的加工方法;在水聲探測中無法同時兼顧抗靜水壓和高靈敏度等。本論文針對微型EFPI光纖聲壓傳感器中的若干關(guān)鍵技術(shù)開展相關(guān)研究,主要完成了如下工作:1.完善了EFPI光纖聲壓傳感器的理論分析模型。分別從光學(xué)、機(jī)械和聲學(xué)三個方面對傳感器進(jìn)行理論分析。在光學(xué)分析中,對光纖出射光束的傳輸特性和耦合特性進(jìn)行了理論分析,利用實(shí)驗(yàn)驗(yàn)證了高斯模式耦合模型的合理性,并詳細(xì)分析了傾斜和錯位損耗對干涉條紋的影響;在機(jī)械性能分析中,從膜片的振動方程詳細(xì)推導(dǎo)了膜片的振幅分布,得到了平板模型和薄膜模型的解析表達(dá)式,并針對引入波紋結(jié)構(gòu)之后的膜片結(jié)構(gòu)機(jī)械性能進(jìn)行了分析;在聲學(xué)分析中,對聲壓傳感器建立了等效電路模型,分析了各組成部分的聲阻抗表達(dá)式,并詳細(xì)討論了膜片性質(zhì)、工作環(huán)境、傳感器結(jié)構(gòu)參數(shù)等對傳感器聲學(xué)性能的影響,為聲壓傳感器的結(jié)構(gòu)設(shè)計(jì)提供理論指導(dǎo)。2.提出了基于犧牲層的高質(zhì)量金屬膜片干法轉(zhuǎn)移加工工藝。采用易溶于丙酮溶液的低成本正性光刻膠做犧牲層,利用磁控濺射在犧牲層表面加工金屬薄膜,最后進(jìn)行干法貼合轉(zhuǎn)移,利用膜片中殘留的內(nèi)應(yīng)力有效減少膜片的皺褶。實(shí)驗(yàn)結(jié)果表明,加工得到的金屬銀薄膜在直徑達(dá)到2.5 mm時其表面起伏小于14?m。通過在薄膜中引入波紋結(jié)構(gòu),解決了薄膜加工中內(nèi)應(yīng)力較高且難以控制的問題,并第一次制作了基于金屬銀紋膜結(jié)構(gòu)的EFPI光纖聲壓傳感器。測試結(jié)果表明,基于銀紋膜的聲壓傳感器靈敏度比相同條件下平膜傳感器的靈敏度提高了約1倍。3.設(shè)計(jì)加工了多種EFPI光纖聲壓傳感器結(jié)構(gòu)。利用金屬銀膜分別加工得到短腔長同軸型平膜/紋膜光纖麥克風(fēng)、短腔長垂直軸型平膜光纖麥克風(fēng)、長腔長同軸型平膜光纖麥克風(fēng)等。利用金屬銀膜和PET膜片分別加工得到微型光纖水聽器;其中利用空氣作為F-P腔填充物實(shí)現(xiàn)水聽器的高靈敏度檢測,利用大體積的微流路結(jié)構(gòu)實(shí)現(xiàn)水聽器的抗靜水壓性能。對加工得到的光纖聲壓傳感器的待測參數(shù)進(jìn)行了討論,利用ASE光源、DFB光源分別搭建了強(qiáng)度解調(diào)裝置,利用EDFL光源搭建了基于PGC-DCM算法的相位解調(diào)裝置,并對加工得到的四種光纖麥克風(fēng)和兩種光纖水聽器的性能進(jìn)行了詳細(xì)的測試與分析。
[Abstract]:The development of optical fiber sound pressure sensing system requires the sound pressure sensor to be miniaturized. The combination of MEMS technology and non-intrinsic Fabry-Perot sensor is expected to break through the bottleneck. At present, the technology is in its infancy, and it faces many problems, such as ignoring the theoretical analysis of sound pressure sensor structure design for a long time. There is a lack of low cost and high performance sound pressure sensor processing methods, and it is not possible to combine hydrostatic pressure and high sensitivity in underwater acoustic detection. In this paper, some key technologies in miniature EFPI fiber optic acoustic pressure sensor are studied. The main work is as follows: 1. The theoretical analysis model of EFPI optical fiber acoustic pressure sensor is perfected. The sensor is analyzed theoretically from three aspects: optics, mechanism and acoustics. The propagation and coupling characteristics of optical fiber outgoing beams are theoretically analyzed. The rationality of Gao Si mode coupling model is verified by experiments, and the effects of tilt and dislocation loss on interference fringes are analyzed in detail. From the vibration equation of the diaphragm, the amplitude distribution of the diaphragm is derived in detail, and the analytical expressions of the plate model and the film model are obtained, and the mechanical properties of the diaphragm structure after the introduction of corrugated structure are analyzed. The equivalent circuit model of sound pressure sensor is established, the expressions of acoustic impedance of each component are analyzed, and the effects of diaphragm properties, working environment and sensor structure parameters on the acoustic performance of the sensor are discussed in detail. To provide theoretical guidance for the structural design of sound pressure sensor. 2. A high quality metal film dry transfer process based on sacrificial layer is proposed. Low cost positive photoresist, which is easily soluble in acetone solution, is used as sacrificial layer. Metal film was fabricated by magnetron sputtering on the surface of sacrificial layer. Finally, dry bonding transfer was carried out, and the residual internal stress in the membrane was used to effectively reduce the wrinkle of the film. The experimental results show that, When the diameter is 2.5 mm, the surface fluctuation of the fabricated silver film is less than 14? By introducing corrugated structure into the film, the problem of high internal stress and difficult to control in thin film processing is solved, and the EFPI optical fiber acoustic pressure sensor based on metal silver film structure is fabricated for the first time. The test results show that, The sensitivity of the acoustic pressure sensor based on silver film is increased by 1 times than that of the flat film sensor under the same condition. Several EFPI fiber optic acoustic pressure sensor structures are designed and fabricated. The short cavity length and the same length are obtained by using metal silver film separately. Axial flat film / striated film optical fiber microphone, The short cavity long vertical axis flat film optical fiber microphone and the long cavity long coaxial flat film optical fiber microphone were fabricated by metal silver film and PET film respectively. Air is used as the filler of F-P cavity to realize the high sensitivity detection of hydrophone, and the hydrostatic resistance of hydrophone is realized by using large volume microfluidic structure. The parameters of the fiber optic acoustic pressure sensor are discussed. The intensity demodulation device is built with ASE light source and the phase demodulation device based on PGC-DCM algorithm with EDFL light source. The performances of four kinds of fiber optic microphones and two kinds of fiber optic hydrophones are tested and analyzed in detail.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2017
【分類號】：TP212

【參考文獻(xiàn)】

相關(guān)期刊論文 前9條

1 陳露;朱佳利;李澤焱;王鳴;;波紋膜片式光纖法布里-珀羅壓力傳感器[J];光學(xué)學(xué)報;2016年03期

2 趙艷;王代華;;用于光纖法布里-珀羅傳感器腔長互相關(guān)解調(diào)的光楔的數(shù)學(xué)模型研究[J];光學(xué)學(xué)報;2011年01期

3 王代華;劉書信;袁剛;賈平崗;趙艷;;并聯(lián)復(fù)用光纖法-珀加速度傳感器及解調(diào)方法的研究[J];光學(xué)學(xué)報;2010年06期

4 王巧云;于清旭;;Polymer diaphragm based sensitive fiber optic Fabry-Perot acoustic sensor[J];Chinese Optics Letters;2010年03期

5 陳計(jì)信;朱濤;饒?jiān)平?段德穩(wěn);鄧明;;一種自校準(zhǔn)光纖琺珀動態(tài)應(yīng)變檢測系統(tǒng)的實(shí)驗(yàn)研究[J];光學(xué)與光電技術(shù);2010年01期

6 倪明,胡永明,孟洲,熊水東;數(shù)字化PGC解調(diào)光纖水聽器的動態(tài)范圍[J];激光與光電子學(xué)進(jìn)展;2005年02期

7 倪明,張仁和,倪明,胡永明,孟洲;關(guān)于光纖水聽器靈敏度的討論[J];應(yīng)用聲學(xué);2002年06期

8 陳兢,劉理天,李志堅(jiān);高靈敏度微機(jī)械薄膜的設(shè)計(jì)、模擬與優(yōu)化[J];固體電子學(xué)研究與進(jìn)展;2002年01期

9 劉人懷;波紋圓板的特征關(guān)系式[J];力學(xué)學(xué)報;1978年01期

相關(guān)博士學(xué)位論文 前2條

1 王付印;基于F-P干涉儀的微型化光纖水聲傳感關(guān)鍵技術(shù)研究[D];國防科學(xué)技術(shù)大學(xué);2015年

2 王曉娜;光纖EFPI傳感器系統(tǒng)及其在油氣井中應(yīng)用的研究[D];大連理工大學(xué);2008年

相關(guān)碩士學(xué)位論文 前6條

1 宮奎;基于微加工的膜片式光纖傳感器的制作及其應(yīng)用研究[D];安徽大學(xué);2015年

2 葉晨;光纖MEMS法布里—珀羅傳感器解調(diào)方法研究[D];哈爾濱工業(yè)大學(xué);2014年

3 時金輝;基于納米銀膜的微振動光纖傳感器及其應(yīng)用的研究[D];安徽大學(xué);2014年

4 石曉龍;基于銀薄膜的微型光纖壓力傳感器的研究[D];安徽大學(xué);2011年

5 陳尚;硅微MEMS仿生矢量水聲傳感器研究[D];中北大學(xué);2008年

6 柏林厚;基于光頻調(diào)制PGC解調(diào)系統(tǒng)的光源及其它若干問題研究[D];清華大學(xué);2005年

，

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