本文選題：微質(zhì)量傳感器　切入點：高階模態(tài)　出處：《光學(xué)精密工程》2017年03期 　論文類型：期刊論文

【摘要】：高靈敏度是微質(zhì)量傳感器準確探測細菌、病毒和氣體等物質(zhì)的關(guān)鍵指標(biāo)。雖然借助微型化的高階模態(tài)梁振動可以有效提升探測靈敏度,但微尺度效應(yīng)也降低了傳感器的抗環(huán)境干擾能力。因此,如何在特定尺度約束下提升高階模態(tài)傳感器的靈敏度已成為諧振式微傳感器設(shè)計的前沿問題。本文在研究彈性梁幾何構(gòu)型、壓電層尺寸與有效質(zhì)量分布對振動模態(tài)影響關(guān)系的基礎(chǔ)上,建立了壓電驅(qū)動多階梯梁式微質(zhì)量傳感器的靈敏度分析模型,以傳感器靈敏度提升最大為目標(biāo),建立了高階振動模態(tài)下懸臂梁幾何構(gòu)型優(yōu)化設(shè)計模型,得到了在不同振動模態(tài)下具有最高靈敏度的懸臂梁構(gòu)型,使同尺寸傳感器的靈敏度提升了10.0~15.0倍�？紤]驅(qū)動位置與制造成本約束,設(shè)計并研制了具有六階梯梁結(jié)構(gòu)的高階模態(tài)微質(zhì)量傳感器。實驗結(jié)果表明,總長度為17.6mm的六階梯梁微質(zhì)量傳感器的靈敏度為18.8×10~4 Hz/g,考慮制造誤差的影響,其二階模態(tài)靈敏度為同尺寸等截面梁傳感器的10.0倍,較一階模態(tài)同尺寸傳感器靈敏度提升了19.8倍,從而驗證了所提出的高階模態(tài)微質(zhì)量傳感器靈敏度提升方法的有效性和可行性。
[Abstract]:High sensitivity is a key indicator for the accurate detection of bacteria, viruses and gases by micro-mass sensors. However, the microscale effect also reduces the ability of the sensor to resist environmental interference. How to improve the sensitivity of high-order modal sensors under specific scale constraints has become a frontier problem in the design of resonant micro-sensors. This paper is studying the geometric configuration of elastic beams. Based on the effect of piezoelectric layer size and effective mass distribution on vibration mode, a sensitivity analysis model of piezoelectric multi-step beam micro-mass sensor is established. The optimal design model of cantilever beam geometry under higher vibration mode is established, and the cantilever beam configuration with the highest sensitivity under different vibration modes is obtained. The sensitivity of the sensor of the same size is increased by 10.0 ~ 15.0 times. Considering the constraints of driving position and manufacturing cost, a high-order modal micro-mass sensor with six-step beam structure is designed and developed. The experimental results show that, The sensitivity of the six-step beam micro-mass sensor with a total length of 17.6 mm is 18.8 脳 10 ~ (4) Hz / g. Considering the effect of manufacturing error, the second-order modal sensitivity is 10.0 times that of the same size and equal section beam sensor, which is 19.8 times higher than that of the first-order mode and the same size sensor. Thus, the effectiveness and feasibility of the proposed sensitivity enhancement method for high order modal micro mass sensors are verified.
【作者單位】： 大連理工大學(xué)工業(yè)裝備結(jié)構(gòu)分析國家重點實驗室汽車工程學(xué)院;
【基金】：國家自然科學(xué)基金資助項目(No.51575088,No.11372063,No.11332004,No.11572073) 大連理工大學(xué)星海優(yōu)青資助項目
【分類號】：TP212

【相似文獻】

相關(guān)會議論文 前1條

1 陳政清;;大跨度鋼箱梁懸索橋的高階模態(tài)渦激共振問題研究[A];第二十屆全國橋梁學(xué)術(shù)會議論文集（下冊）[C];2012年

，

本文編號：1557787