本文關(guān)鍵詞： 光纖傳感器 光纖EFPI 鍍鈀金膜 橫向負(fù)載 溫度自補(bǔ)償　出處：《光學(xué)精密工程》2017年06期 　論文類型：期刊論文

【摘要】：為了提高光纖EFPI傳感器的靈敏度,提出了一種新型EFPI傳感結(jié)構(gòu),并對(duì)其溫度特性以及橫向負(fù)載特性進(jìn)行了研究。首先,介紹了采用端面鍍鈀金膜的光纖EFPI傳感器的結(jié)構(gòu)及其制作方法;接著,建立了鍍鈀金膜光纖EFPI的溫度傳感模型,并通過Solidworks、Hypermesh與有限元分析軟件ANSYS聯(lián)合仿真,對(duì)它在不同受壓力下進(jìn)行理論模擬,獲得了腔長變化與壓力之間的關(guān)系;最后,對(duì)傳統(tǒng)的光纖EFPI與鍍鈀金膜光纖EFPI的溫度和橫向負(fù)載特性進(jìn)行了對(duì)比試驗(yàn)。試驗(yàn)結(jié)果表明,鍍鈀金膜光纖EFPI的溫度靈敏度為6.083pm/℃,具有溫度自補(bǔ)償特性;它對(duì)橫向負(fù)載的檢測靈敏度可達(dá)40.83m/g,相對(duì)于傳統(tǒng)的光纖EFPI橫向負(fù)載的靈敏度提高了2.10倍。實(shí)驗(yàn)結(jié)果與理論分析相符合,為實(shí)際制作具有溫度自補(bǔ)償?shù)母哽`敏度光纖EFPI傳感器提供了理論與實(shí)驗(yàn)依據(jù)。
[Abstract]:In order to improve the sensitivity of optical fiber EFPI sensor, a novel EFPI sensor structure is proposed, and its temperature characteristics and transverse load characteristics are studied. The structure and fabrication method of the optical fiber EFPI sensor with palladium and gold film on the end surface are introduced, and the temperature sensing model of the optical fiber EFPI with palladium and gold film is established, and the simulation is carried out by means of Solidworks / HyperMesh and the finite element analysis software ANSYS. The relationship between cavity length and pressure is obtained by theoretical simulation under different pressures. Finally, the temperature and transverse load characteristics of traditional optical fiber EFPI and palladium plated gold film fiber EFPI are compared. The temperature sensitivity of palladium and gold coated fiber EFPI is 6.083pm / 鈩，

本文編號(hào)：1529669