本文關(guān)鍵詞： 納米測(cè)量 時(shí)柵 結(jié)構(gòu)優(yōu)化 誤差分析　出處：《重慶理工大學(xué)》2017年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：納米位移測(cè)量技術(shù)隨著高端裝備制造行業(yè)的發(fā)展越來(lái)越受到關(guān)注,在集成電路制作、機(jī)械加工零部件制造以及國(guó)防軍工等多個(gè)領(lǐng)域都有著重大需求。然而,大量程與高精度之間的矛盾始終制約著納米位移測(cè)量技術(shù)的進(jìn)一步發(fā)展。就發(fā)展最為成熟的納米光柵技術(shù)來(lái)講,其測(cè)量原理決定了它的柵線(xiàn)結(jié)構(gòu)需要均勻性和一致性的制造,對(duì)大量程的加工來(lái)講,難以保證。同時(shí),光柵的測(cè)量和制造都面臨著光學(xué)衍射極限瓶頸的制約,因而精度難以進(jìn)一步提高。因此,作者所在實(shí)驗(yàn)室團(tuán)通過(guò)長(zhǎng)期對(duì)納米測(cè)量技術(shù)的研究,提出通過(guò)“以時(shí)間測(cè)量空間”的研究思想,利用時(shí)間量構(gòu)成空間測(cè)量基準(zhǔn),從而提高位移測(cè)量的精度。并在此研究思想的指導(dǎo)下,利用正交變換的電場(chǎng)構(gòu)建運(yùn)動(dòng)參考系,研制出了一種新型的納米時(shí)柵位移傳感器。雖然,通過(guò)“柵面”的結(jié)構(gòu)形式能夠使得傳感器達(dá)到納米級(jí)的測(cè)量精度。但傳感器結(jié)構(gòu)參數(shù)與測(cè)量精度的關(guān)系并沒(méi)有研究十分透徹,阻礙了傳感器精度的進(jìn)一步提高。本文主要圍繞納米時(shí)柵傳感器的結(jié)構(gòu)參數(shù),進(jìn)行了相關(guān)的分析和優(yōu)化設(shè)計(jì),主要包括:1.介紹了納米時(shí)柵測(cè)量原理和結(jié)構(gòu)形式,并完善了測(cè)量模型,將結(jié)構(gòu)參數(shù)與輸出信號(hào)整理為單一表達(dá)式。2.從結(jié)構(gòu)設(shè)計(jì)的角度,以由“點(diǎn)”到“面”方式對(duì)測(cè)量結(jié)果中出現(xiàn)的誤差進(jìn)行了詳細(xì)的理論推導(dǎo),重點(diǎn)分析了動(dòng)尺極片形狀、定尺兩邊引線(xiàn)及整體的雙列式結(jié)構(gòu)對(duì)測(cè)量精度的影響。3.搭建實(shí)驗(yàn)平臺(tái),進(jìn)行了大量的實(shí)驗(yàn)研究。驗(yàn)證了定尺兩邊引線(xiàn)會(huì)給測(cè)量結(jié)果帶來(lái)一次諧波誤差,雙列式結(jié)構(gòu)由于安裝問(wèn)題會(huì)在測(cè)量結(jié)果中引入二次諧波誤差;在此基礎(chǔ)上進(jìn)行了結(jié)構(gòu)的優(yōu)化設(shè)計(jì),提出了單列式納米時(shí)柵結(jié)構(gòu),并通過(guò)實(shí)驗(yàn)證明的優(yōu)化設(shè)計(jì)的有效性,能夠進(jìn)一步提高傳感器的測(cè)量精度。最后,經(jīng)過(guò)實(shí)驗(yàn)結(jié)果表明在200mm測(cè)量范圍內(nèi),傳感器精度可達(dá)±200nm。通過(guò)對(duì)納米時(shí)柵傳感器結(jié)構(gòu)參數(shù)的研究,提高了納米時(shí)柵傳感器的測(cè)量精度,并進(jìn)一步完善了納米時(shí)柵測(cè)量理論體系,對(duì)今后的理論分析和實(shí)驗(yàn)研究都具有一定的指導(dǎo)意義。
[Abstract]:With the development of high-end equipment manufacturing industry, nano-displacement measurement technology has attracted more and more attention. It has great demand in many fields, such as integrated circuit manufacture, machined parts manufacturing and national defense military industry, etc. However, The contradiction between a large number of range and high precision has always restricted the further development of nano-displacement measurement technology. In terms of the most mature nano-grating technology, its measuring principle determines that its grating structure needs uniform and consistent manufacture. At the same time, the measurement and manufacture of grating are restricted by the bottleneck of optical diffraction limit, so the precision is difficult to improve further. Through a long-term study of nanometries, the authors put forward the idea of "measuring space by time", which is based on the use of time to construct spatial measurement datum. So as to improve the accuracy of displacement measurement. Under the guidance of this research idea, a new type of displacement sensor with nanoscale grating is developed by using the orthogonal electric field to construct the motion reference system. The measurement accuracy of the sensor can be achieved by the structure of the "grating surface", but the relationship between the structural parameters of the sensor and the measurement accuracy has not been thoroughly studied. This paper mainly focuses on the structural parameters of the nanoscale grating sensor, and carries out the related analysis and optimization design, including: 1. The principle and structure of the nanoscale grating measurement are introduced. The measurement model is perfected, and the structural parameters and output signal are arranged into a single expression. 2. From the point of view of structural design, the errors in the measurement results are deduced in detail by the way of "point" to "surface". The influence of the shape of the moving ruler pole, the two leads of the fixed scale and the whole double-row structure on the measurement accuracy is analyzed. 3. The experimental platform is built. A large number of experimental studies have been carried out. It is verified that the two leads on both sides of the fixed scale will bring the first harmonic error to the measurement results, and the second harmonic error will be introduced into the measurement results because of the installation problem of the double-column structure. On this basis, the optimization design of the structure is carried out, and the single-column nanogrid structure is proposed. The experimental results show that the effectiveness of the optimal design can further improve the measurement accuracy of the sensor. The experimental results show that the precision of the sensor can reach 鹵200 nm in the range of 200mm. Through the study of the structural parameters of the nanogrid sensor, the measurement accuracy of the nanoscale time grating sensor is improved, and the theoretical system of the nanoscale time grating measurement is further improved. It has certain guiding significance for the theoretical analysis and experimental research in the future.
【學(xué)位授予單位】：重慶理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TP212

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本文編號(hào)：1514225