本文關(guān)鍵詞： 無(wú)機(jī)駐極體 轉(zhuǎn)速傳感器 隧穿充電 表面電勢(shì) 二氧化硅　出處：《北京交通大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：隨著高速鐵路和城市鐵路的飛速發(fā)展,列車的測(cè)速定位問(wèn)題日趨重要。轉(zhuǎn)速傳感器作為高速鐵路測(cè)速定位系統(tǒng)的核心部件必須能夠可靠、高效地工作。目前已有的光電式、磁電式轉(zhuǎn)速傳感器對(duì)環(huán)境要求很高,存在易受外界干擾、安裝工藝復(fù)雜、使用壽命短、頻率響應(yīng)差等問(wèn)題。駐極體具有長(zhǎng)期保持電荷的能力,使其在傳感器領(lǐng)域中有著廣泛的應(yīng)用。本文針對(duì)駐極體的特性和實(shí)際應(yīng)用的需要,對(duì)基于駐極體的轉(zhuǎn)速傳感器的制備工藝和器件進(jìn)行了分析和研究,研究成果具有潛在的應(yīng)用價(jià)值。論文主要工作如下:1.研究了基于微機(jī)電系統(tǒng)(Micro-Electro-Mechanical System,MEMS)的駐極體轉(zhuǎn)速傳感器的制作工藝和測(cè)量原理,從而提出了一種基于二氧化硅(SiO_2)/氮化硅(Si3N4)/二氧化硅(SiO_2)三明治結(jié)構(gòu)的無(wú)機(jī)駐極體轉(zhuǎn)速傳感器,有望解決現(xiàn)有轉(zhuǎn)速傳感器壽命短、工藝復(fù)雜等問(wèn)題。2.在工藝方面,研究了 SiO_2/Si3N4/SiO_2三明治結(jié)構(gòu)駐極體的工藝原理和工藝步驟,降低了轉(zhuǎn)速傳感器的結(jié)構(gòu)設(shè)計(jì)和工藝復(fù)雜度,改善了已有器件難以集成和批量生產(chǎn)的問(wèn)題,與未來(lái)傳感器微型化、集成化的發(fā)展趨勢(shì)一致。3.對(duì)駐極體的駐極工藝進(jìn)行了研究和測(cè)試,對(duì)比研究了幾種充電方式的原理及方法,并對(duì)駐極效果進(jìn)行測(cè)試,測(cè)試結(jié)果表明隧穿充電后駐極體在惡劣環(huán)境中有良好的電荷保持能力。在器件應(yīng)用方面,利用駐極體保持電荷以及提供穩(wěn)定電場(chǎng)的特點(diǎn),對(duì)駐極體轉(zhuǎn)速傳感器的工作原理進(jìn)行了分析、仿真和測(cè)試,測(cè)試及分析結(jié)果顯示所設(shè)計(jì)制作的轉(zhuǎn)速傳感器能夠?qū)崿F(xiàn)對(duì)轉(zhuǎn)速的檢測(cè)。本文設(shè)計(jì)的基于SiO_2/Si3N4/SiO_2三明治結(jié)構(gòu)的無(wú)機(jī)駐極體轉(zhuǎn)速傳感器具有制作工藝簡(jiǎn)單、成本低、尺寸小、分辨率高、能應(yīng)用于惡劣環(huán)境中等優(yōu)良特性,為MEMS轉(zhuǎn)速傳感器提供了新思路,具有廣泛的應(yīng)用前景。
[Abstract]:With the rapid development of high-speed railway and urban railway, the problem of train velocimetry and location is becoming more and more important. As the core component of high-speed railway speed measurement and positioning system, the speed sensor must be able to work reliably and efficiently. The magnetoelectric speed sensor has many problems, such as high environmental requirement, easy external interference, complex installation process, short service life, poor frequency response, etc. The electret has the ability to hold charge for a long time. It has been widely used in sensor field. In this paper, the fabrication technology and devices of electret based rotational speed sensor are analyzed and studied according to the characteristics of electret and the need of practical application. The main work of this paper is as follows: 1. The fabrication technology and measuring principle of electret speed sensor based on Micro-Electro-Mechanical system MEMS (Micro-Electro-Mechanical system MEMS) are studied. Thus, an inorganic electret speed sensor based on the structure of SiO2 / Si3N4 / Si3N4 / SiO2 / SiO2 / SiO2 / SiO2 / SiO2 / SiO2 / SiO2 sandwich structure is proposed, which is expected to solve the problems of short life and complex process of the existing rotating speed sensor. The process principle and process steps of SiO_2/Si3N4/SiO_2 sandwich electret are studied. The structure design and process complexity of speed sensor are reduced, and the problems of hard integration and mass production of existing devices are improved, and the sensor is miniaturized in the future. The development trend of integration is consistent .3.Study and test on the standing electrode technology of electret, compare and study the principle and method of several charging methods, and test the effect of standing electrode. The test results show that the electret after tunneling charging has good charge retention ability in the harsh environment. In the application of the device, the electret can keep the charge and provide the stable electric field. The principle of electret speed sensor is analyzed, simulated and tested. The results of test and analysis show that the speed sensor designed in this paper can detect the rotational speed. The inorganic electret speed sensor based on SiO_2/Si3N4/SiO_2 sandwich structure has the advantages of simple fabrication process, low cost, small size and high resolution. It provides a new idea for MEMS speed sensor and has a wide application prospect.
【學(xué)位授予單位】：北京交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212

【參考文獻(xiàn)】

相關(guān)期刊論文 前3條

1 茹佳勝;閔道敏;張，

本文編號(hào)：1499836