發(fā)布時間：2018-01-21 23:24

  本文關(guān)鍵詞： 測量 激光位移傳感器 型面精度測量 橢圓擬合 傳感器偏角 位姿　出處：《光學(xué)學(xué)報》2017年10期 　論文類型：期刊論文

【摘要】：為了實現(xiàn)滑塊內(nèi)滾道型面精度的快速準(zhǔn)確測量,提出一種基于激光三角位移傳感器傾斜測量的方法。對該方法的算法進行推理與驗證,同時借助高精度圓棒進行實驗驗證。根據(jù)測量系統(tǒng)的特征與滑塊內(nèi)滾道的形狀,建立相對應(yīng)的模型。設(shè)計相應(yīng)的算法,計算滑塊內(nèi)滾道的半徑,并對測量過程中的誤差來源進行標(biāo)定補償。在內(nèi)滾道輪廓算法的基礎(chǔ)上,計算滑塊內(nèi)滾道的軸線相對基準(zhǔn)面的位置與平行度。介紹該方案的驗證性實驗并分析結(jié)果。實驗結(jié)果表明:標(biāo)準(zhǔn)圓棒的測量精度為3.75μm,標(biāo)準(zhǔn)差在2μm以內(nèi)。實驗結(jié)果滿足5μm的測量精度要求,且該測量方式對標(biāo)定件與待測件沒有位姿要求,具備一定的推廣性。
[Abstract]:In order to measure the accuracy of the inner raceway profile quickly and accurately, a method of tilt measurement based on laser triangulation displacement sensor is proposed, and the algorithm of this method is inferred and verified. According to the characteristics of the measuring system and the shape of the inner raceway of the slider, the corresponding model is established. The corresponding algorithm is designed to calculate the radius of the inner raceway of the slider. The error sources in the measurement process are calibrated and compensated. The position and parallelism of the axis relative to the datum of the inner raceway of the slider are calculated. The verifiability experiments of the scheme are introduced and the results are analyzed. The experimental results show that the measuring accuracy of the standard rod is 3.75 渭 m. The standard deviation is less than 2 渭 m. The experimental results meet the requirement of measuring precision of 5 渭 m, and the measurement method has no position and pose requirements for the calibrator and the object to be tested, so it has certain extensibility.
【作者單位】： 南京理工大學(xué)機械工程學(xué)院;數(shù)控機床功能部件共性技術(shù)工業(yè)和信息化部重點實驗室;
【基金】：國家重大科技專項(2016ZX04004007)
【分類號】：TG659
【正文快照】： 滾動直線導(dǎo)軌副是數(shù)控機床的重要功能部件,其性能對數(shù)控機床的整體性能及精度有重要影響。隨著滾動直線導(dǎo)軌副的廣泛使用,工業(yè)上對其精度要求越來越高,將導(dǎo)軌副的精度分配到各個組成構(gòu)件上,已經(jīng)1012005-1成為一種必然趨勢�；瑝K是滾動直線導(dǎo)軌副的重要構(gòu)件,滑塊內(nèi)滾道的型面精，

本文編號：1452856