本文關(guān)鍵詞：邁克爾遜光纖傳感器及懸臂梁光纖傳感器的高溫傳感特性研究　出處：《深圳大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 光纖傳感 邁克爾遜光纖干涉儀 光纖懸臂梁 飛秒激光

【摘要】：自從20世紀(jì)60年代,高琨等人提出了將纖維波導(dǎo)作為光傳導(dǎo)介質(zhì),70年代美國(guó)Corning公司制造出第一根低損耗單模光纖至今,光通信技術(shù)發(fā)展迅速,成為當(dāng)今信息時(shí)代的支柱產(chǎn)業(yè)之一。光纖傳感技術(shù)作為光通信技術(shù)里面的一個(gè)分支,也受到越來(lái)越多的關(guān)注。本論文主要研究了光纖邁克爾遜干涉型傳感器,并在此基礎(chǔ)上進(jìn)一步優(yōu)化提出并驗(yàn)證了基于兩套光干涉疊加的光纖懸臂梁傳感器,通過(guò)實(shí)驗(yàn)研究了其高溫傳感特性。本論文的主要內(nèi)容為:1.對(duì)光纖傳感器進(jìn)行了分類說(shuō)明,介紹了邁克爾遜光纖傳感器的研究現(xiàn)狀,并從制作工藝上進(jìn)行了簡(jiǎn)單分類。2.利用飛秒激光在單模光纖切割45°傾斜光纖端面,制作了邁克爾遜高溫傳感器,并研究了其高溫傳感特性。由于45°傾斜光纖端面滿足全內(nèi)反射,光經(jīng)過(guò)45°傾斜光纖端面將分成兩束光,一束光直接原路返回,另外一束光經(jīng)過(guò)3次反射返回到纖芯,形成邁克爾遜干涉儀。表明了45°傾斜光纖端面邁克爾遜傳感器具有非常好的重復(fù)性與穩(wěn)定性。傳感探頭在室溫到800?C溫度范圍內(nèi)響應(yīng)曲線呈現(xiàn)非線性。在600?C傳感探頭的溫度靈敏度為19.7 pm/?C,測(cè)量溫度的精度為4.1?C。3.利用飛秒激光在細(xì)芯光纖(纖芯尺寸4μm)切割45°傾斜光纖端面,制作了邁克爾遜高溫傳感器,研究其高溫傳感特性。從100?C到900?C,傳感器反射譜波谷隨溫度的升高紅移,溫度響應(yīng)曲線呈現(xiàn)非線性。100?C到300?C溫度靈敏度為9.2 pm/?C;300?C到600?C溫度靈敏度為20.5 pm/?C;600?C到900?C溫度靈敏度為47.5 pm/?C。4.利用飛秒激光在單模光纖制作了45°懸臂梁高溫傳感器,反射譜是由兩套光干涉疊加而成,形成干涉譜主要是由45°傾斜端面形成的邁克爾遜干涉及空氣腔形成的法布里-珀羅干涉。從室溫到1000?C溫度靈敏度為17 pm/?C左右,3次溫度循環(huán)實(shí)驗(yàn)表明45°懸臂梁傳感器具有良好的重復(fù)性、高溫穩(wěn)定性及波長(zhǎng)的穩(wěn)定性。45°懸臂梁高溫傳感器的有效傳感端面得到了保護(hù),可以耐受更高溫度。5.利用飛秒激光在單模光纖制作了90°懸臂梁高溫傳感器,反射譜是兩套法布里-珀羅干涉疊加的結(jié)果。室溫到200?C,溫度靈敏度為10 pm/?C左右;200?C到800?C,溫度靈敏度為17 pm/?C左右。
[Abstract]:Since 1960s, high Kun et al. Proposed the fiber waveguide as the transmission medium of light in 70s, American Corning company produced the first low loss single-mode fiber has the rapid development of optical communication technology, has become one of the pillar industries in the information age. As a branch of optical communication technology, optical fiber sensing technology has attracted more and more attention. The fiber optic Michelson interferometer sensor is mainly studied in this paper. On the basis of it, we further optimize, and propose and verify the two fiber optic interference superposition based fiber cantilever sensor. The main contents of this paper are as follows: 1., classification and explanation of fiber optic sensors are introduced. The research status of Michelson optical fiber sensor is introduced, and simple classification is made from manufacturing technology. 2. the Michelson high temperature sensor was fabricated by using femtosecond laser to cut the end of 45 DEG fiber in single mode fiber, and its high temperature sensing characteristics were studied. Because the 45 degree tilt fiber end meets the total internal reflection, the light will be divided into two beams through the 45 degree tilt fiber end. A beam of light will return directly to the original path. The other beam will return to the core after 3 times of reflection, and form the Michelson interferometer. It shows that the 45 degree tilt optical fiber end face Michelson sensor has very good repeatability and stability. The response curve of the sensing probe is nonlinear at room temperature to 800? C temperature range. The temperature sensitivity of the 600? C sensor is 19.7 pm/? C, and the precision of the measured temperature is 4.1? C. 3. the Michelson high temperature sensor was fabricated by using a femtosecond laser in a fine core fiber (core size 4 m) to cut the end of 45 deg. high temperature sensor, and the high temperature sensing characteristics were studied. From 100? C to 900? C, the spectral wave valley of the sensor redshifts with the increase of temperature, and the temperature response curve is nonlinear. 100? C to 300? C temperature sensitivity is 9.2 pm/? C; 300? C to 600? C temperature sensitivity is 20.5 pm/? C; 600? C to 900? C temperature sensitivity is 47.5 pm/? C. 4., the 45 degree cantilever high temperature sensor is fabricated on single-mode fiber by femtosecond laser. The reflection spectrum is formed by two sets of optical interference superposition. The interference spectrum is formed by the Michelson interference formed by the 45 degree inclined end surface and the Fabri Perot interference formed by the air cavity. From room temperature to 1000? C, the temperature sensitivity is about 17 pm/? C. The 3 temperature cycle test shows that the 45 degree cantilever sensor has good repeatability, high temperature stability and wavelength stability. The effective sensing end of the 45 degree cantilever beam high temperature sensor is protected and can withstand the higher temperature. 5. the high temperature sensor of a 90 degree cantilever beam was fabricated by a femtosecond laser in a single mode fiber. The reflection spectrum is the result of the superposition of two sets of Fabri Perot interference. Room temperature to 200? C, temperature sensitivity of 10 pm/? C; 200? C to 800? C, temperature sensitivity of 17 pm/? C.
【學(xué)位授予單位】：深圳大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TP212

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