發(fā)布時間：2019-05-21 22:20

【摘要】：飛行時間二次離子質(zhì)譜儀(Time of fly-secondary ion mass spectrometry,簡稱TOF-SIMS)利用高能一次離子束轟擊物質(zhì)表面產(chǎn)生二次離子,根據(jù)不同核質(zhì)比的二次離子在質(zhì)量分析器中飛行時間不同而得知樣品表面元素的質(zhì)譜圖,實現(xiàn)對被檢樣品分析。TOF-SIMS以其高分辨率、高靈敏度的特性而廣泛應(yīng)用于地質(zhì)學(xué)研究、生物樣品分析以及食品化學(xué)等領(lǐng)域。直流高壓電源是TOFSIMS的重要組成部分,通過在提取電極和透鏡電極上施加不同的高壓實現(xiàn)對二次離子的提取和聚焦,其中提取電極和透鏡電極施加的電壓對二次離子運(yùn)動情況和儀器性能影響很大,研制適用于該儀器的高壓電源具有重要意義。本論文立足于“國家重大科學(xué)儀器設(shè)備開發(fā)專項-同位素地質(zhì)年代學(xué)專用TOF-SIMS科學(xué)裝置”項目,旨在為TOF-SIMS儀器設(shè)計一款直流高壓電源,并基于現(xiàn)行的高壓電源研制技術(shù),從主電路拓?fù)浣Y(jié)構(gòu)的選取、單元電路的設(shè)計、電源的仿真與參數(shù)優(yōu)化等多個方面對高壓電源進(jìn)行設(shè)計。根據(jù)TOF-SIMS對直流高壓電源的要求,首先提出高壓電源的總體技術(shù)方案為高頻升壓變壓器與倍壓電路相結(jié)合。其次,對比不同種類的電源主電路拓?fù)浣Y(jié)構(gòu),并根據(jù)高壓電源的設(shè)計要求及適用條件等因素,確定高壓電源的主電路拓?fù)浣Y(jié)構(gòu),即斬波調(diào)壓與全橋逆變的拓?fù)浣Y(jié)構(gòu)。同時,根據(jù)模塊化電路的設(shè)計思想,對包括整流濾波電路、斬波調(diào)壓電路、逆變電路、控制電路、倍壓電路等單元電路進(jìn)行了詳細(xì)設(shè)計,并重點闡述斬波電路中關(guān)鍵器件功率電感的參數(shù)設(shè)計,以及通過面積積法對高頻高壓變壓器的設(shè)計與制作進(jìn)行了深入研究。再次,基于Multisim軟件,對主電路中主要功能電路進(jìn)行仿真分析,并深入探討斬波電路及倍壓電路中不同參數(shù)對輸出紋波的影響,探討其形成原因,并給出減小紋波的解決方案,驗證本設(shè)計方案的可行性。最后,根據(jù)抗電磁干擾的PCB設(shè)計原則繪制電源線路板,對焊接制作完成的直流高壓電源進(jìn)行單元電路測試與整體性能測試,包括阻性負(fù)載測試、紋波測試、時漂測試與溫度測試,以及TOF-SIMS應(yīng)用測試并對測試結(jié)果進(jìn)行了分析。
[Abstract]:The time-of-flight secondary ion mass spectrometer (Time of fly-secondary ion mass spectrometry, (TOF-SIMS) produces secondary ions by bombarding the surface of the material with high energy primary ion beam. According to the different flight time of the secondary ions with different nuclear-mass ratio in the mass analyzer, the mass spectrum of the elements on the surface of the sample is obtained, and the analysis of the tested sample is realized. TOF-SIMS with its high resolution, High sensitivity is widely used in geological research, biological sample analysis and food chemistry. DC high voltage power supply is an important part of TOFSIMS. The secondary ion is extracted and focused by applying different high voltage to the extraction electrode and lens electrode. The voltage applied by the extraction electrode and lens electrode has a great influence on the movement of secondary ions and the performance of the instrument. It is of great significance to develop a high voltage power supply suitable for the instrument. This paper is based on the project of "National Major Scientific instrument and equipment Development Project-Isotope Geological Geochronology Special TOF-SIMS Scientific device". The purpose of this paper is to design a DC high voltage power supply for TOF-SIMS instrument, and based on the current high voltage power supply development technology. The design of high voltage power supply is carried out from many aspects, such as the selection of main circuit topology, the design of unit circuit, the simulation of power supply and the optimization of parameters. According to the requirements of TOF-SIMS for DC high voltage power supply, the overall technical scheme of high voltage power supply is put forward, which is the combination of high frequency boost transformer and double voltage circuit. Secondly, the main circuit topology of different kinds of power supply is compared, and according to the design requirements and applicable conditions of high voltage power supply, the main circuit topology of high voltage power supply is determined, that is, chopping voltage regulation and full bridge inverter topology. At the same time, according to the design idea of modular circuit, the unit circuits, including rectifier and filter circuit, chopper voltage regulating circuit, inverter circuit, control circuit, voltage doubling circuit and so on, are designed in detail. The parameter design of power inductance of key devices in chopping circuit is emphasized, and the design and manufacture of high frequency and high voltage transformer are deeply studied by area product method. Thirdly, based on Multisim software, the main functional circuits in the main circuit are simulated and analyzed, and the influence of different parameters in chopping circuit and voltage doubling circuit on the output ripples is deeply discussed, the causes of its formation are discussed, and the solutions to reduce the ripples are given. Verify the feasibility of the design. Finally, according to the PCB design principle of anti-electromagnetic interference, the power supply circuit board is drawn, and the unit circuit test and the overall performance test of the DC high voltage power supply made by welding are carried out, including resistive load test and wave test. Time drift test and temperature test, as well as TOF-SIMS application test, and the test results are analyzed.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TH843

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