復(fù)合微透鏡陣列的制備及成像研究
發(fā)布時間：2019-02-16 21:14
【摘要】：隨著光學(xué)技術(shù)的發(fā)展,微透鏡及其陣列結(jié)構(gòu)逐漸受到研究學(xué)者們的青睞,近些年來,微透鏡及其陣列結(jié)構(gòu)的制備方法也是層出不窮,比較成熟的制備方法有:激光刻蝕法、光刻法、熱流法、電潤濕法、電泳動法等。由于微透鏡及其陣列結(jié)構(gòu)不僅具有光學(xué)透鏡的固有屬性,而且具有微型化,便于集成化以及可調(diào)焦距等特點,廣泛應(yīng)用于各大領(lǐng)域。目前制備的微透鏡陣列大多是單層微透鏡結(jié)構(gòu),因此本文提出并制備了一復(fù)合微透鏡陣列,對其光學(xué)性能進(jìn)行了分析。本論文主要研究內(nèi)容如下:采用水輔助飛秒激光直寫技術(shù)在玻璃材料內(nèi)部制備了一種錐形微透鏡陣列。通過改進(jìn)傳統(tǒng)激光直寫技術(shù),采用水輔助飛秒激光直寫技術(shù)實現(xiàn)了玻璃材料內(nèi)部微結(jié)構(gòu)的制備,并提高了制備效率。制備過程中,首先通過三維精密平臺的精密控制在玻璃內(nèi)部制備了結(jié)構(gòu)尺寸大小以及分布情況可控的微柱形陣列結(jié)構(gòu)。隨后,對具有微柱形陣列進(jìn)行熱處理,在玻璃態(tài)轉(zhuǎn)化溫度下以及液體表面張力作用下,微腔內(nèi)表面會變得光滑,同時微柱形結(jié)構(gòu)會發(fā)生形變,轉(zhuǎn)化成錐形陣列結(jié)構(gòu)。最后,實驗上對錐形微透鏡陣列的光學(xué)性能進(jìn)行了檢測,實驗結(jié)果證明錐形陣列結(jié)構(gòu)具有較好的成像能力和分束能力。提出并制備了兩種全新的具有雙焦點成像特性的高分子聚合物復(fù)合微透鏡陣列結(jié)構(gòu),特別是具有虛焦點成像能力和實焦點成像能力的平凹面高分子聚合物復(fù)合微透鏡陣列。利用液滴法在涂有Teflon疏水材料的二氧化硅玻璃基板表面制備了多層高分子復(fù)合微透鏡陣列,制備過程中,不同的固化方式,會形成凹凸和凸凸兩種復(fù)合微透鏡陣列。研究了聚合物的固化溫度和固化時間對微透鏡直徑的影響。從理論和實驗上對復(fù)合微透鏡陣列進(jìn)行建模分析和光學(xué)性能檢測,實驗結(jié)果顯示復(fù)合微透鏡陣列具有極好的二次成像本領(lǐng)和聚焦本領(lǐng),理論結(jié)果與實驗結(jié)果得到了極好的吻合。提出一種簡單低成本制備嵌入式復(fù)合微透鏡陣列結(jié)構(gòu)的方法,此種方法制備出的復(fù)合微透鏡陣列結(jié)構(gòu)的焦距可以根據(jù)嵌入式微透鏡結(jié)構(gòu)的曲率半徑大小控制選擇。利用光學(xué)設(shè)計軟件對提出的復(fù)合微透鏡陣列結(jié)構(gòu)進(jìn)行了建模模擬,設(shè)定8組不同曲率半徑的嵌入式微透鏡結(jié)構(gòu),并進(jìn)行光線追跡仿真。隨后,利用液滴法在涂有Teflon疏水材料的二氧化硅玻璃基板表面制備了SU-8光刻膠平凸透鏡陣列結(jié)構(gòu),通過圖案轉(zhuǎn)移法,SU-8液滴嵌入,聚二甲基硅氧烷(PDMS)封裝制備了嵌入式復(fù)合微透鏡結(jié)構(gòu)。緊接著在實驗上對復(fù)合微透鏡陣列結(jié)構(gòu)的光學(xué)性能進(jìn)行了檢測,結(jié)果證明復(fù)合微透鏡陣列結(jié)構(gòu)具有較好的成像能力和聚焦能力。
[Abstract]:With the development of optical technology, microlens and its array structure have gradually been favored by researchers. In recent years, the fabrication methods of microlens and its array structure have emerged in endlessly. The more mature preparation methods are: laser etching method. Photolithography, heat flux, electrowetting, electrophoretic motility, etc. Because the microlens and its array structure not only have the inherent properties of optical lens, but also have the characteristics of miniaturization, easy integration and adjustable focal length, they are widely used in various fields. At present, most of the microlens arrays are single-layer microlens structures, so a composite microlens array is proposed and fabricated, and its optical properties are analyzed. The main contents of this thesis are as follows: a conical microlens array was fabricated in glass by water assisted femtosecond laser direct writing. Water assisted femtosecond laser direct-writing technique was used to fabricate the microstructure of glass by improving the traditional laser direct-writing technology and improving the preparation efficiency. In the process of fabrication, the micro-cylindrical array structure with controllable size and distribution is fabricated in the glass interior by the precision control of the three-dimensional precision platform. After the heat treatment of the microcylindrical array, the inner surface of the microcavity will become smooth under the glass state transition temperature and the surface tension of liquid, and the microcylindrical structure will deform into a conical array structure. Finally, the optical properties of the tapered microlens array are tested experimentally. The experimental results show that the conical array structure has good imaging ability and beam splitting ability. Two novel polymer composite microlens arrays with dual focus imaging characteristics are proposed and fabricated, especially the flat concave polymer composite microlens arrays with virtual focus imaging ability and real focus imaging ability. A multilayer polymer composite microlens array was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. In the process of preparation, two kinds of composite microlens arrays, concave and convex, were formed by different curing methods. The effects of curing temperature and curing time on the diameter of microlens were studied. The model analysis and optical performance test of the composite microlens array are carried out theoretically and experimentally. The experimental results show that the composite microlens array has excellent secondary imaging ability and focusing ability, and the theoretical results are in good agreement with the experimental results. A simple and low cost method for fabricating embedded composite microlens arrays is proposed. The focal length of the composite microlens arrays can be controlled according to the curvature radius of the embedded microlens structures. The composite microlens array structure was modeled and simulated by using optical design software. Eight embedded microlens structures with different curvature radii were set up, and the ray tracing simulation was carried out. Then, the SU-8 photoresist flat convex lens array structure was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. By pattern transfer method, SU-8 droplet was embedded. The embedded composite microlens structure was fabricated by polydimethylsiloxane (PDMS) encapsulation. Then the optical properties of the composite microlens array structure are tested experimentally. The results show that the composite microlens array structure has good imaging ability and focusing ability.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TH74
，
本文編號：2424838
[Abstract]:With the development of optical technology, microlens and its array structure have gradually been favored by researchers. In recent years, the fabrication methods of microlens and its array structure have emerged in endlessly. The more mature preparation methods are: laser etching method. Photolithography, heat flux, electrowetting, electrophoretic motility, etc. Because the microlens and its array structure not only have the inherent properties of optical lens, but also have the characteristics of miniaturization, easy integration and adjustable focal length, they are widely used in various fields. At present, most of the microlens arrays are single-layer microlens structures, so a composite microlens array is proposed and fabricated, and its optical properties are analyzed. The main contents of this thesis are as follows: a conical microlens array was fabricated in glass by water assisted femtosecond laser direct writing. Water assisted femtosecond laser direct-writing technique was used to fabricate the microstructure of glass by improving the traditional laser direct-writing technology and improving the preparation efficiency. In the process of fabrication, the micro-cylindrical array structure with controllable size and distribution is fabricated in the glass interior by the precision control of the three-dimensional precision platform. After the heat treatment of the microcylindrical array, the inner surface of the microcavity will become smooth under the glass state transition temperature and the surface tension of liquid, and the microcylindrical structure will deform into a conical array structure. Finally, the optical properties of the tapered microlens array are tested experimentally. The experimental results show that the conical array structure has good imaging ability and beam splitting ability. Two novel polymer composite microlens arrays with dual focus imaging characteristics are proposed and fabricated, especially the flat concave polymer composite microlens arrays with virtual focus imaging ability and real focus imaging ability. A multilayer polymer composite microlens array was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. In the process of preparation, two kinds of composite microlens arrays, concave and convex, were formed by different curing methods. The effects of curing temperature and curing time on the diameter of microlens were studied. The model analysis and optical performance test of the composite microlens array are carried out theoretically and experimentally. The experimental results show that the composite microlens array has excellent secondary imaging ability and focusing ability, and the theoretical results are in good agreement with the experimental results. A simple and low cost method for fabricating embedded composite microlens arrays is proposed. The focal length of the composite microlens arrays can be controlled according to the curvature radius of the embedded microlens structures. The composite microlens array structure was modeled and simulated by using optical design software. Eight embedded microlens structures with different curvature radii were set up, and the ray tracing simulation was carried out. Then, the SU-8 photoresist flat convex lens array structure was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. By pattern transfer method, SU-8 droplet was embedded. The embedded composite microlens structure was fabricated by polydimethylsiloxane (PDMS) encapsulation. Then the optical properties of the composite microlens array structure are tested experimentally. The results show that the composite microlens array structure has good imaging ability and focusing ability.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TH74
，
本文編號：2424838
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