【摘要】：針對(duì)大口徑光學(xué)元件精密檢測(cè)平臺(tái)空間誤差難以直接測(cè)量的問題,提出了一種空間誤差計(jì)算方法.首先,將空間誤差分解為平面內(nèi)兩軸聯(lián)動(dòng)誤差和該平面沿第三軸運(yùn)動(dòng)所引起的誤差;其次,利用上述兩項(xiàng)誤差,基于多項(xiàng)式擬合和平面幾何相關(guān)理論,求解出空間誤差值;運(yùn)用球桿儀、激光干涉儀等設(shè)備對(duì)于模型中所涉及的多項(xiàng)幾何誤差進(jìn)行測(cè)量,計(jì)算得到檢測(cè)平臺(tái)的空間誤差值為-5.22~5.80μm;為驗(yàn)證本方法的正確性,以泰勒霍普森的Form Talysurf PGI 1240輪廓儀的校準(zhǔn)半球?yàn)榛鶞?zhǔn)進(jìn)行測(cè)量,測(cè)量結(jié)果為半球半徑的誤差值為-5.02~5.37μm,與計(jì)算得到的空間誤差結(jié)果一致,證明了該方法的正確性和有效性.
[Abstract]:In order to solve the problem that it is difficult to directly measure the spatial error of the precision measuring platform of large aperture optical element, a method of calculating spatial error is proposed. Firstly, the spatial error is decomposed into the two axis linkage error in the plane and the error caused by the plane moving along the third axis, secondly, the spatial error is solved by using the above two errors based on polynomial fitting and plane geometry correlation theory. The geometric errors involved in the model are measured by means of a ball rod instrument and a laser interferometer, and the spatial error of the detection platform is calculated to be -5.22 ~ 5.80 渭 m. In order to verify the correctness of this method, the calibration hemispheres of Taylor Hopson's Form Talysurf PGI 1240 profilometer are used as the reference. The error of the measurement is -5.02 ~ 5.37 渭 m, which is consistent with the calculated spatial error. The correctness and validity of the method are proved.
【作者單位】： 廈門大學(xué)物理與機(jī)電工程學(xué)院;
【分類號(hào)】：TH741

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本文編號(hào)：2364114