【摘要】：為了加快投影物鏡內(nèi)部溫度場(chǎng)和表面變形的求解速度,提出了一種快速求解算法。獲得不同入射光強(qiáng)分布與透鏡溫度場(chǎng)及應(yīng)變場(chǎng)之間的轉(zhuǎn)換矩陣,對(duì)入射光強(qiáng)分布進(jìn)行多項(xiàng)式分解,并將多項(xiàng)式系數(shù)與轉(zhuǎn)換矩陣相乘實(shí)現(xiàn)鏡片內(nèi)部節(jié)點(diǎn)溫度及表面面形變化的快速求解。通過(guò)求解三片不同類(lèi)型透鏡的節(jié)點(diǎn)溫度與表面變形,驗(yàn)證了這一算法的求解精度與計(jì)算時(shí)間:直接進(jìn)行有限元求解時(shí),計(jì)算時(shí)間為600s;而快速求解法的求解時(shí)間縮短至0.2s,且它的計(jì)算時(shí)間不隨節(jié)點(diǎn)數(shù)量的增多而增加�？焖偾蠼夥▽�(duì)溫度的求解精度可以達(dá)到0.002℃,對(duì)面形Zernike系數(shù)的求解精度可以達(dá)到0.005nm,能夠滿足像差求解過(guò)程對(duì)溫度與面形求解精度提出的要求。
[Abstract]:In order to speed up the solution of the internal temperature field and surface deformation of the projection objective, a fast algorithm is proposed. The transformation matrix between the intensity distribution of the incident light and the temperature field and strain field of the lens is obtained, and the distribution of the incident light intensity is decomposed by polynomial. By multiplying the polynomial coefficient and the transformation matrix, the fast solution of the temperature and the surface shape change of the lens is realized. The accuracy and calculation time of the algorithm are verified by solving the node temperature and surface deformation of three different types of lenses. The calculation time is 600 s when the finite element method is directly applied; The fast solution time is reduced to 0.2 s, and the calculation time does not increase with the increase of the number of nodes. The precision of the fast solution method for temperature can reach 0.002 鈩，

本文編號(hào)：2306606