【摘要】：為提高M(jìn)EMS加速度計(jì)溫度穩(wěn)定性,針對MEMS加速度計(jì)零偏溫度漂移問題,提出了一種基于閉環(huán)點(diǎn)位置控制的零偏溫漂抑制方法,該方法利用測溫電路生成線性控制電壓,在不同溫度下將閉環(huán)點(diǎn)位置控制于零反饋位置附近,此時(shí)閉環(huán)加速度計(jì)的零偏近似為0,在全溫范圍內(nèi)的零偏漂移量可顯著降低。對閉環(huán)MEMS加速度計(jì)進(jìn)行溫度循環(huán)試驗(yàn),試驗(yàn)結(jié)果表明,加入線性控制電壓后閉環(huán)加速度計(jì)的零偏溫漂下降到0.1 mg/℃以內(nèi),與不加線性控制電壓相比提高了一個(gè)數(shù)量級(jí)以上。該方法實(shí)現(xiàn)簡單,可操作性強(qiáng),無需額外硬件開銷,利于工程化實(shí)現(xiàn)。
[Abstract]:In order to improve the temperature stability of MEMS accelerometer, aiming at the problem of zero bias temperature drift of MEMS accelerometer, a zero bias temperature drift suppression method based on closed loop point position control is proposed. The method uses temperature measurement circuit to generate linear control voltage. When the closed loop position is controlled near the zero feedback position at different temperatures, the zero bias of the closed loop accelerometer is approximately 0, and the zero bias drift can be significantly reduced in the whole temperature range. The temperature cycling test of the closed loop MEMS accelerometer is carried out. The experimental results show that the zero bias temperature drift of the closed loop accelerometer decreases to less than 0. 1 mg/ 鈩，

本文編號(hào)：2267318