大中型SiC非球面反射鏡確定性高效加工工藝的研究
發(fā)布時(shí)間：2018-10-11 10:47
【摘要】：大中型非球面反射鏡在地面望遠(yuǎn)光學(xué)系統(tǒng)和空間對地偵查光學(xué)系統(tǒng)中廣泛應(yīng)用,需求量日益增加,大中型非球面的加工要求已經(jīng)從過去的可以加工改變?yōu)楝F(xiàn)在能夠快速確定性高效加工。本文以大中型非球面確定性高效加工為出發(fā)點(diǎn),對大中型非球面加工的銑磨階段和拋光階段的確定性高效加工方式進(jìn)行研究。作者結(jié)合國家工程任務(wù)需求和自身工作需要開展了大中型Si C非球面反射鏡確定性高效加工的研究,論文主要完成的工作有:1.超聲復(fù)合磨削確定性高效加工的研究:分析了超聲復(fù)合磨削的機(jī)理,從原理上證明超聲復(fù)合磨削的高效性。對金剛石砂輪種類進(jìn)行分析確定適合Si C反射鏡超聲復(fù)合磨削三階段加工的金剛石砂輪并進(jìn)行設(shè)計(jì)。通過磨削實(shí)驗(yàn)確定超聲復(fù)合磨削Si C材料的各項(xiàng)磨削工藝參數(shù)并進(jìn)行優(yōu)化,建立了超聲復(fù)合磨削Si C材料工藝參數(shù)數(shù)據(jù)庫。對超聲主軸和刀柄進(jìn)行分析,通過磨削工藝實(shí)驗(yàn)證明超聲復(fù)合磨削的高效性。2.大中型Si C非球面反射鏡超聲復(fù)合確定性磨削的研究:采用系數(shù)法和逆向工程法建立非球面高精度模型,根據(jù)模型進(jìn)行加工仿真和刀軸路徑規(guī)劃。在Si C反射鏡超聲復(fù)合磨削加工的過程中利用激光跟蹤儀進(jìn)行在線檢測,降低了風(fēng)險(xiǎn),提高了磨削效率和磨削精度。對工程用Ф800mm Si C非球面反射鏡進(jìn)行超聲復(fù)合確定性磨削并進(jìn)行在線檢測,磨削效率提高30%以上,磨削精度達(dá)到PV值11.2μm,RMS值1.8μm。3.磁介質(zhì)輔助拋光的研究:設(shè)計(jì)完成了輪式磁介質(zhì)輔助拋光模塊并進(jìn)行優(yōu)化設(shè)計(jì),可以直接應(yīng)用于主軸為BT40錐柄的加工中心。對磁介質(zhì)輔助拋光工藝參數(shù)進(jìn)行優(yōu)化,確定了改性Si磁介質(zhì)輔助拋光的最優(yōu)工藝參數(shù)。輪式磁介質(zhì)輔助拋光對Φ150mm改性Si平面鏡進(jìn)行確定性拋光實(shí)驗(yàn),最終結(jié)果達(dá)到PV0.107λ、RMS0.23λ(λ=0.6328μm)。磁介質(zhì)輔助拋光的研究為磁流變拋光的研究打下良好的基礎(chǔ)。4.球形輪式磁流變拋光系統(tǒng)設(shè)計(jì)和機(jī)床設(shè)計(jì)分析:采用模塊化設(shè)計(jì)理念設(shè)計(jì)完成了磁流變拋光系統(tǒng)的拋光機(jī)構(gòu)模塊和磁流變液循環(huán)模塊,并對球形輪進(jìn)行分析。確定了磁流變拋光對機(jī)床的性能參數(shù)要求,并根據(jù)要求對立式加工中心進(jìn)行重新改造設(shè)計(jì)和分析。采用千分表找正的方法對球形磁流變拋光去除函數(shù)中心進(jìn)行精密定標(biāo),提高了磁流變拋光的確定性。改造完成的立式磁流變數(shù)控拋光機(jī)床拋光口徑Φ400mm的改性Si離軸凸非球面,經(jīng)過一個(gè)周期12小時(shí)的磁流變拋光,非球面精度由拋光前的PV0.614λ、RMS0.099λ收斂至PV0.201λ、RMS0.025λ。本文的研究工作提高了大中型Si C非球面反射鏡磨削加工效率和非球面磨削精度,減少了后續(xù)研磨加工的時(shí)間;磁流變拋光的高確定性使改性后的大中型Si C非球面反射鏡的拋光效率有了明顯提高。
[Abstract]:Large and medium sized aspherical mirrors are widely used in the optical systems of terrestrial telescopes and space-to-ground reconnaissance, and the demand for them is increasing day by day. The machining requirements of large and medium aspheric surfaces have changed from being able to be machined in the past to being able to process rapidly and efficiently. Based on the deterministic and efficient machining of large and medium aspheric surfaces, this paper studies the deterministic and efficient machining methods in milling and polishing stages of large and medium aspheric surfaces. In this paper, the deterministic and efficient fabrication of large and medium-sized Si C aspheric mirrors is studied in combination with the national engineering task and their own needs. The main work accomplished in this paper is as follows: 1. Research on deterministic high efficiency machining of ultrasonic composite grinding: the mechanism of ultrasonic composite grinding is analyzed, and the high efficiency of ultrasonic composite grinding is proved in principle. The type of diamond grinding wheel is analyzed and the diamond grinding wheel suitable for Si C mirror ultrasonic composite grinding is determined and designed. The grinding parameters of ultrasonic composite grinding Si C material were determined and optimized by grinding experiment. The database of ultrasonic composite grinding Si C material process parameters was established. The ultrasonic spindle and cutter handle are analyzed and the high efficiency of ultrasonic composite grinding is proved by grinding experiment. 2. Study on ultrasonic composite deterministic grinding of large and medium-sized Si C aspheric reflector: the high precision model of aspheric surface is established by coefficient method and reverse engineering method. Machining simulation and tool path planning are carried out according to the model. In the process of ultrasonic combined grinding of Si C mirror, laser tracker is used for on-line inspection, which reduces the risk and improves the grinding efficiency and precision. Ultrasonic composite deterministic grinding of 800mm Si C aspheric reflector used in engineering is carried out. The grinding efficiency is improved by more than 30%, and the grinding accuracy is up to 11.2 渭 m ~ (-1) 渭 m ~ (-1). The research of magnetic medium assisted polishing: the module of wheel medium assisted polishing is designed and optimized, which can be directly applied to the machining center with BT40 taper handle. The optimum process parameters of modified Si medium assisted polishing were determined by optimizing the process parameters. A deterministic polishing experiment on 桅 150mm modified Si plane mirror was carried out by using wheeled magnetodielectric assisted polishing. The final results reached PV0.107 位, RMS0.23 位 (位 = 0.6328 渭 m). The research of magnetic medium aided polishing has laid a good foundation for the research of magnetorheological polishing. 4. Design and Analysis of spherical Wheel Magnetorheological polishing system and Machine tool Design: the polishing mechanism module and the magnetorheological fluid cycle module of the magnetorheological polishing system are designed by using the modular design concept, and the spherical wheel is analyzed. The requirements of the performance parameters of Mr polishing for machine tools are determined, and the design and analysis of the remade machining centers are carried out according to the requirements. The precision calibration of the removal function center of spherical magnetorheological polishing (MRP) is carried out by using the calibration method of the millmeter, which improves the certainty of MRP. The modified Si off-axis convex aspherical surface of the polishing caliber 桅 400mm of the modified vertical magnetorheological NC polishing machine was completed. The aspheric precision converged from PV0.614 位, RMS0.099 位 to PV0.201 位, RMS0.025 位 after 12 hours of magnetorheological polishing with a cycle of 12 hours. The research work in this paper improves the grinding efficiency and accuracy of the large and medium-sized Si C aspheric mirror, and reduces the time of subsequent grinding. The high certainty of magnetorheological polishing improves the polishing efficiency of the modified Si C aspheric mirror.
【學(xué)位授予單位】：中國科學(xué)院研究生院(長春光學(xué)精密機(jī)械與物理研究所)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TH74
[Abstract]:Large and medium sized aspherical mirrors are widely used in the optical systems of terrestrial telescopes and space-to-ground reconnaissance, and the demand for them is increasing day by day. The machining requirements of large and medium aspheric surfaces have changed from being able to be machined in the past to being able to process rapidly and efficiently. Based on the deterministic and efficient machining of large and medium aspheric surfaces, this paper studies the deterministic and efficient machining methods in milling and polishing stages of large and medium aspheric surfaces. In this paper, the deterministic and efficient fabrication of large and medium-sized Si C aspheric mirrors is studied in combination with the national engineering task and their own needs. The main work accomplished in this paper is as follows: 1. Research on deterministic high efficiency machining of ultrasonic composite grinding: the mechanism of ultrasonic composite grinding is analyzed, and the high efficiency of ultrasonic composite grinding is proved in principle. The type of diamond grinding wheel is analyzed and the diamond grinding wheel suitable for Si C mirror ultrasonic composite grinding is determined and designed. The grinding parameters of ultrasonic composite grinding Si C material were determined and optimized by grinding experiment. The database of ultrasonic composite grinding Si C material process parameters was established. The ultrasonic spindle and cutter handle are analyzed and the high efficiency of ultrasonic composite grinding is proved by grinding experiment. 2. Study on ultrasonic composite deterministic grinding of large and medium-sized Si C aspheric reflector: the high precision model of aspheric surface is established by coefficient method and reverse engineering method. Machining simulation and tool path planning are carried out according to the model. In the process of ultrasonic combined grinding of Si C mirror, laser tracker is used for on-line inspection, which reduces the risk and improves the grinding efficiency and precision. Ultrasonic composite deterministic grinding of 800mm Si C aspheric reflector used in engineering is carried out. The grinding efficiency is improved by more than 30%, and the grinding accuracy is up to 11.2 渭 m ~ (-1) 渭 m ~ (-1). The research of magnetic medium assisted polishing: the module of wheel medium assisted polishing is designed and optimized, which can be directly applied to the machining center with BT40 taper handle. The optimum process parameters of modified Si medium assisted polishing were determined by optimizing the process parameters. A deterministic polishing experiment on 桅 150mm modified Si plane mirror was carried out by using wheeled magnetodielectric assisted polishing. The final results reached PV0.107 位, RMS0.23 位 (位 = 0.6328 渭 m). The research of magnetic medium aided polishing has laid a good foundation for the research of magnetorheological polishing. 4. Design and Analysis of spherical Wheel Magnetorheological polishing system and Machine tool Design: the polishing mechanism module and the magnetorheological fluid cycle module of the magnetorheological polishing system are designed by using the modular design concept, and the spherical wheel is analyzed. The requirements of the performance parameters of Mr polishing for machine tools are determined, and the design and analysis of the remade machining centers are carried out according to the requirements. The precision calibration of the removal function center of spherical magnetorheological polishing (MRP) is carried out by using the calibration method of the millmeter, which improves the certainty of MRP. The modified Si off-axis convex aspherical surface of the polishing caliber 桅 400mm of the modified vertical magnetorheological NC polishing machine was completed. The aspheric precision converged from PV0.614 位, RMS0.099 位 to PV0.201 位, RMS0.025 位 after 12 hours of magnetorheological polishing with a cycle of 12 hours. The research work in this paper improves the grinding efficiency and accuracy of the large and medium-sized Si C aspheric mirror, and reduces the time of subsequent grinding. The high certainty of magnetorheological polishing improves the polishing efficiency of the modified Si C aspheric mirror.
【學(xué)位授予單位】：中國科學(xué)院研究生院(長春光學(xué)精密機(jī)械與物理研究所)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TH74
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