【摘要】：平面光學(xué)元件是光學(xué)系統(tǒng)的重要組成部分,如今光學(xué)系統(tǒng)向著大型化、精密化的方向發(fā)展,對光學(xué)元件的數(shù)量和質(zhì)量均提出了更高的要求。一方面光學(xué)系統(tǒng)所需光學(xué)元件包括平面光學(xué)元件的數(shù)量急劇增長,要求光學(xué)元件的加工具有較高的效率；另一方面,為了達(dá)到較高的成像質(zhì)量,對光學(xué)元件的表面精度要求也越來越高。目前主流的加工工藝很難同時(shí)滿足這兩個(gè)方面的需求,所以如何能提高平面光學(xué)元件的加工效率并且保證較高的表面質(zhì)量是當(dāng)前亟需解決的科研難題之一。空間反射鏡輕量化設(shè)計(jì)引出了陶瓷類材料的廣泛應(yīng)用,但為了克服陶瓷材料本身的缺陷,需要對陶瓷基體進(jìn)行表面改性處理并對改性層進(jìn)行加工以達(dá)到使用要求。改性層厚度是決定反射鏡制造成本的重要因素,因此,在滿足使用要求的基礎(chǔ)上降低材料去除總量以減小改性層厚度能很大程度上降低反射鏡的制造成本。本文立足于以上應(yīng)用背景,在傳統(tǒng)化學(xué)機(jī)械拋光工藝的基礎(chǔ)上提出了一種全局修形加工新方法,闡述了其基本原理和理論依據(jù),通過理論分析建立了全局修形加工系統(tǒng)并進(jìn)行了試驗(yàn)驗(yàn)證,主要工作內(nèi)容如下：(1)基于傳統(tǒng)化學(xué)機(jī)械拋光的基本原理,提出了通過去除拋光墊上與拋光墊同心的環(huán)形區(qū)域,避免該區(qū)域與工件表面接觸,從而改變材料去除率分布特性以進(jìn)行表面修形的全局修形加工新方法,并在原理上對該方法進(jìn)行了闡述。(2)建立了工件徑向材料去除率分布趨勢預(yù)測模型并編寫了相應(yīng)的MATLAB GUI軟件程序,以分析工件表面材料去除率在不同修形條件(環(huán)形區(qū)域位置及寬度)和拋光參數(shù)(拋光壓力、轉(zhuǎn)速、偏心距等)下的分布趨勢。(3)研究了工件表面形貌對材料去除率分布特性的影響,基于實(shí)測的材料去除率分布和根據(jù)表面實(shí)際輪廓分析得到的接觸壓力,分析了Preston系數(shù)在工件表面的分布規(guī)律以及隨面形的變化規(guī)律,研究了材料去除率的可精確預(yù)測性。(4)針對Φ100mm玻璃晶圓的修形加工設(shè)計(jì)了專用的修形加工試驗(yàn)裝置,并使用該裝置進(jìn)行了無擺動修形和加擺動修形兩組全局修形加工試驗(yàn),試驗(yàn)結(jié)果表明,兩種方式的修形均可以大幅改善工件的面形精度,同時(shí),通過兩種方式修形結(jié)果的對比,表明加擺動修形可以明顯改善工件表面沿徑向的平滑度,同時(shí),出邊修形可以提高加工過程中對邊緣效應(yīng)的修正能力,降低材料總?cè)コ俊?br/>[Abstract]:The planar optical element is an important part of the optical system. Nowadays, the optical system is developing towards the direction of large scale and precision, so the quantity and quality of the optical element are required to be higher. On the one hand, the number of optical elements, including planar optical elements, which are needed in optical systems has increased dramatically, which requires the processing of optical elements to have a higher efficiency; on the other hand, in order to achieve a higher imaging quality, The surface accuracy of optical elements is also required higher and higher. At present, the mainstream processing technology is difficult to meet the needs of these two aspects, so how to improve the processing efficiency of planar optical elements and ensure high surface quality is one of the urgent research problems. The lightweight design of space mirror leads to the wide application of ceramic materials, but in order to overcome the defects of ceramic materials, it is necessary to modify the surface of ceramic substrate and process the modified layer to meet the requirements of application. The thickness of the modified layer is an important factor to determine the manufacturing cost of the mirror. Therefore, reducing the total amount of material removal to reduce the thickness of the modified layer can greatly reduce the manufacturing cost of the mirror. Based on the above application background, this paper puts forward a new method of global shape modification based on the traditional chemical mechanical polishing technology, and expounds its basic principle and theoretical basis. Through theoretical analysis, the global shape modification system is established and tested. The main work is as follows: (1) based on the basic principle of traditional chemical-mechanical polishing, the annular region which is concentric with the polishing pad on the polishing pad is removed. Avoiding the contact between the area and the surface of the workpiece, thus changing the material removal rate distribution characteristics to carry out a new method of global profile modification for surface modification, The method is described in principle. (2) the prediction model of radial material removal rate distribution trend is established and the corresponding MATLAB GUI software program is written. In order to analyze the removal rate of workpiece surface material in different shape modification conditions (ring area position and width) and polishing parameters (polishing pressure, rotation speed), (3) the influence of workpiece surface morphology on the material removal rate distribution is studied. Based on the measured material removal rate distribution and the contact pressure obtained from the actual surface profile analysis, The distribution law of Preston coefficient on the surface of workpiece and the variation law with the shape of workpiece are analyzed, and the accurate predictability of material removal rate is studied. (4) A special experimental device for modifying the shape of 桅 100mm glass wafer is designed. The experimental results show that both of the two methods can greatly improve the precision of workpiece profile. At the same time, the comparison of the results of the two ways is given. The results show that the workpiece surface smoothness along the radial direction can be obviously improved by adding swing modification, and the edge effect correction ability can be improved during the machining process, and the total material removal can be reduced.
【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TH74

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 張峰;;納米級面形精度光學(xué)平面鏡加工[J];中國光學(xué);2014年04期

2 王同慶;路新春;趙德文;門延武;何永勇;;300mm晶圓化學(xué)機(jī)械拋光機(jī)關(guān)鍵技術(shù)研究與實(shí)現(xiàn)[J];機(jī)械工程學(xué)報(bào);2014年05期

3 張峰;;非球面碳化硅表面硅改性層的數(shù)控化學(xué)機(jī)械拋光[J];光學(xué)精密工程;2013年12期

4 張峰;;空間相機(jī)碳化硅反射鏡表面硅改性層的組合式拋光[J];中國激光;2013年07期

5 謝磊;馬平;劉義彬;游云峰;鄢定堯;;大口徑反射元件環(huán)形拋光工藝[J];強(qiáng)激光與粒子束;2012年07期

6 陳真;楊煒;郭隱彪;;快速拋光技術(shù)接觸壓力建模與仿真[J];廈門大學(xué)學(xué)報(bào)(自然科學(xué)版);2012年02期

7 苑永濤;劉紅;陳益超;敬畏;宋寧;方敬忠;;RB-SiC高致密、超光滑SiC表面改性涂層的制備[J];航天返回與遙感;2011年06期

8 郭偉遠(yuǎn);成賢鍇;梁斌;;離子束拋光工藝中駐留時(shí)間的綜合算法[J];應(yīng)用光學(xué);2011年05期

9 馬占龍;劉健;王君林;;超光滑光學(xué)表面加工技術(shù)發(fā)展及應(yīng)用[J];激光與光電子學(xué)進(jìn)展;2011年08期

10 苑永濤;劉紅;邵傳兵;陳益超;方敬忠;;RB-SiC表面改性Si涂層的制備與性能[J];強(qiáng)激光與粒子束;2011年05期

相關(guān)博士學(xué)位論文 前1條

1 孫禹輝;硅片化學(xué)機(jī)械拋光中材料去除非均勻性研究[D];大連理工大學(xué);2011年

相關(guān)碩士學(xué)位論文 前6條

1 陳曦;計(jì)算機(jī)控制拋光去除函數(shù)優(yōu)化分析[D];蘇州大學(xué);2011年

2 馬志成;大口徑平面光學(xué)元件加工的工藝方法研究[D];中國科學(xué)院研究生院（長春光學(xué)精密機(jī)械與物理研究所）;2010年

3 陰旭;環(huán)形拋光技術(shù)研究[D];電子科技大學(xué);2007年

4 彭寶華;神光Ⅲ激光裝置系統(tǒng)可靠性建模分析[D];國防科學(xué)技術(shù)大學(xué);2005年

5 朱海波;大口徑平面光學(xué)元件的數(shù)控拋光技術(shù)研究[D];四川大學(xué);2005年

6 王健;大口徑高精度光學(xué)元件數(shù)控拋光技術(shù)研究[D];四川大學(xué);2004年

，

本文編號：2250297