本文選題：石英振梁加速度計(jì) + 一體式結(jié)構(gòu)�。� 參考：《東南大學(xué)》2016年碩士論文

【摘要】：石英振梁加速度計(jì)(QVBA)是一種基于諧振梁力頻效應(yīng)以及石英逆壓電效應(yīng)的加速度傳感器,能夠直接輸出頻率,消除了A/D轉(zhuǎn)換帶來的誤差,可采用微細(xì)加工工藝進(jìn)行批量生產(chǎn),具有精度高、成本低、體積小、功耗低等優(yōu)點(diǎn),在民用、軍工、航空航天、勘探等低中高精度領(lǐng)域有著廣泛的應(yīng)用前景。國內(nèi)外很多研究機(jī)構(gòu)和高校研發(fā)了幾種典型QVBA結(jié)構(gòu)：基于雙梁振梁的分體式結(jié)構(gòu)、基于雙梁的一體式結(jié)構(gòu)、基于單梁振梁的一體式結(jié)構(gòu)。本文在這些典型結(jié)構(gòu)的基礎(chǔ)之上提出了一種新型一體式QVBA結(jié)構(gòu),主要由單梁、質(zhì)量塊、撓性鉸鏈、支撐座、隔離框、安裝框等組成。在厚度方向振梁和撓性鉸鏈均被腐蝕,撓性鉸鏈位于石英厚度方向的中心位置。單梁工作在面內(nèi)彎曲模態(tài),受拉或受壓時諧振頻率發(fā)生變化。該新型一體式QVBA結(jié)構(gòu)能夠?qū)z測軸方向靈敏度提高近一倍,且能夠消除交叉軸方向的加速度干擾。本文首先介紹了QVBA的工作原理以及等效電路,闡釋了衡量QVBA質(zhì)量好壞的性能指標(biāo),并對新型一體式QVBA結(jié)構(gòu)進(jìn)行了力學(xué)分析,驗(yàn)證了新型結(jié)構(gòu)設(shè)計(jì)的合理性。其次,介紹了QVBA敏感元件結(jié)構(gòu)設(shè)計(jì),用有限元分析軟件加以輔助。隨后對電極設(shè)計(jì)、加工工藝設(shè)計(jì)以及封裝設(shè)計(jì)進(jìn)行了闡釋,提出了一種兩步腐蝕方案。接著用安捷倫阻抗分析儀4294A對制作的敏感元件進(jìn)行測試。從測試結(jié)果可以看出,敏感元件的頻率為51kHz左右,標(biāo)度因數(shù)約為55Hz/g,封裝后敏感元件的Q值在8000以上。隨后設(shè)計(jì)仿真了雙反相器+雙共射極串聯(lián)諧振電路,提高了QVBA的驅(qū)動能力和穩(wěn)定性。最后搭建新型一體式QVBA系統(tǒng)并進(jìn)行了性能指標(biāo)測試。從系統(tǒng)測試結(jié)果可以看出,新型一體式QVBA結(jié)構(gòu)切實(shí)能夠提高檢測軸方向的靈敏度,標(biāo)度因數(shù)為56.8Hz/g,并且150分鐘內(nèi)1g穩(wěn)定性及零偏穩(wěn)定性達(dá)到了幾十個μg,驗(yàn)證了結(jié)構(gòu)設(shè)計(jì)以及電路設(shè)計(jì)的可行性。
[Abstract]:Quartz vibration beam accelerometer (QVBA) is an acceleration sensor based on resonant beam force frequency effect and quartz inverse piezoelectric effect. It can output frequency directly and eliminate the error caused by A / D conversion. With the advantages of high precision, low cost, small volume and low power consumption, it has wide application prospects in civil, military, aerospace, exploration and other low, medium and high precision fields. Many domestic and foreign research institutions and universities have developed several typical QVBA structures: split structure based on double beam vibration beam, integrated structure based on double beam and integrated structure based on single beam vibration beam. On the basis of these typical structures, a new integrated QVBA structure is proposed in this paper, which consists of single beam, mass block, flexible hinge, support seat, isolation frame, installation frame and so on. Both the beam and the flexure hinge are corroded in the thickness direction, and the flexure hinge is located at the center of the thickness direction of quartz. The resonant frequency of a single beam is changed when it is subjected to tension or compression in the in-plane bending mode. The new integrated QVBA structure can double the sensitivity of the detecting axis and eliminate the acceleration interference in the cross axis direction. In this paper, the working principle and equivalent circuit of QVBA are introduced, and the performance index to measure the quality of QVBA is explained. The mechanical analysis of a new type of integrated QVBA structure is carried out, which verifies the rationality of the new structure design. Secondly, the structure design of QVBA sensitive element is introduced, which is aided by finite element analysis software. Then the electrode design, process design and package design are explained, and a two-step corrosion scheme is proposed. Then the sensor was tested with Agilent Impedance Analyzer 4294A. It can be seen from the test results that the frequency of the sensor is about 51 kHz, the scaling factor is about 55 Hz / g, and the Q value of the packaged sensor is above 8000. A series resonant circuit of dual common-emitter is designed and simulated, which improves the driving ability and stability of QVBA. Finally, a new integrated QVBA system is built and the performance index is tested. It can be seen from the system test results that the new integrated QVBA structure can improve the sensitivity of the detection axis. The scaling factor is 56.8 Hz / g, and the stability of 1g and zero-bias reaches dozens of 渭 g in 150 minutes. The feasibility of structural design and circuit design is verified.
【學(xué)位授予單位】：東南大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TH824.4

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