本文選題：硅微諧振加速度計 + FPGA��； 參考：《中國慣性技術(shù)學報》2015年03期

【摘要】：硅微諧振加速度計因具有小體積優(yōu)勢和高精度潛力,成為硅微慣性傳感器研制的熱點之一。頻率信號的高精度采集和系統(tǒng)參數(shù)補償是提高硅微諧振加速度計性能的重要手段之一。在分析硅微諧振加速度計工作機理的基礎(chǔ)上,從雙路差動頻率信號的精確采集和系統(tǒng)誤差參數(shù)補償角度出發(fā),分析了數(shù)據(jù)采集的原理,提出了一種高精度硅微諧振加速度計用數(shù)據(jù)采集與參數(shù)補償方法。給出了設(shè)計思路和電路實現(xiàn)方法,討論了誤差來源與改進方法。所設(shè)計的數(shù)據(jù)采集系統(tǒng)針對中心頻率18 k Hz.,標度因數(shù)400 Hz/g,量程±20g的加速度計,數(shù)據(jù)更新周期200 ms下頻率分辨率為0.0005 Hz,等效加速度分辨率達到1.25μg。測試表明,補償后的硅微諧振加速度計,在全溫(-40~+70℃)內(nèi),K0溫度系數(shù)從262μg/℃降低到29.9μg/℃,K1變化量從4.18%降低到2.04‰,全量程非線性從7.16‰降低到0.128‰,系統(tǒng)參數(shù)滿足設(shè)計指標。
[Abstract]:Silicon micro resonant accelerometers have become one of the hotspots in the development of silicon micro inertial sensors due to their small volume advantages and high precision potential. High precision acquisition of frequency signals and compensation of system parameters are one of the important methods to improve the performance of silicon microresonant accelerometers. Based on the analysis of the working mechanism of silicon micro-resonant accelerometer, the principle of data acquisition is analyzed from the angle of accurate acquisition of double-channel differential frequency signals and compensation of system error parameters. A method of data acquisition and parameter compensation for high precision silicon micro resonant accelerometer is presented. The design idea and circuit realization method are given, and the error source and improvement method are discussed. The designed data acquisition system is designed for an accelerometer with a central frequency of 18 kHz, a scaling factor of 400 Hz / g and a range of 鹵20 g. The frequency resolution is 0.0005 Hz at 200ms and the equivalent acceleration resolution is 1.25 渭 g. The test results show that the temperature coefficient of K _ 0 is reduced from 262 渭 g / 鈩，

本文編號：2002084