本文選題：掃描探針顯微鏡 + 多功能組合探針　； 參考：《西南交通大學(xué)》2016年碩士論文

【摘要】：掃描探針顯微鏡是目前一種用途廣泛的表面分析儀器,它不僅廣泛應(yīng)用于物理、化學(xué)、生物、醫(yī)學(xué)等基礎(chǔ)研究領(lǐng)域,還在微納制造和微電子等的應(yīng)用研究領(lǐng)域中發(fā)揮著越來越重要的作用。然而,目前商業(yè)化的掃描探針顯微鏡主要為單一探針的工作模式,其功能相對(duì)單一,難以實(shí)現(xiàn)一些較為復(fù)雜的實(shí)驗(yàn)及檢測功能。例如,在特殊環(huán)境下(如真空或輻射環(huán)境)的微觀磨損實(shí)驗(yàn)中,若采用單一探針模式,在完成磨損實(shí)驗(yàn)后,需要更換曲率半徑更小的針尖才能對(duì)表面磨損區(qū)域進(jìn)行原位的高分辨形貌掃描與觀測。然而,在更換針尖的過程中,微觀磨損的實(shí)驗(yàn)環(huán)境勢必會(huì)遭到破壞,使試樣暴露在大氣中,由此引發(fā)的氧化、電化學(xué)作用、表面污染等將可能造成試驗(yàn)結(jié)果偏離真實(shí),不利于對(duì)實(shí)驗(yàn)結(jié)果的科學(xué)分析。因此,亟需研發(fā)可用于原位實(shí)驗(yàn)和觀測的掃描探針顯微鏡多探針原位檢測系統(tǒng),實(shí)現(xiàn)不同功能探針的協(xié)同檢測與分析�；谏鲜鲂枨�,本論文在日本精工公司SPI3800N掃描探針顯微鏡的平臺(tái)上,通過設(shè)計(jì)高精度的移動(dòng)定位平臺(tái)、可長距離移動(dòng)的多探針裝夾裝置、光學(xué)窗口以及系統(tǒng)各部分密封裝置,開發(fā)出了一套低成本、高效率、穩(wěn)定性好的手動(dòng)式多探針原位檢測系統(tǒng)；在此基礎(chǔ)上,進(jìn)一步提出了具有更高探針定位精度、高自動(dòng)化程度、集成拉曼光譜的多功能組合探針系統(tǒng)結(jié)構(gòu)的設(shè)計(jì)方案�；谏鲜鲅芯�,本文的主要工作及創(chuàng)新點(diǎn)如下：(1)研制出了一套低成本、高效率、穩(wěn)定性好的手動(dòng)式多功能組合探針原位檢測系統(tǒng)。通過設(shè)計(jì)手動(dòng)高精度定位平臺(tái)、探針支撐結(jié)構(gòu)、光學(xué)窗口以及系統(tǒng)綜合密封,實(shí)現(xiàn)了多功能組合探針系統(tǒng)與掃描探針顯微鏡的有效匹配；在此基礎(chǔ)上,設(shè)計(jì)和加工了手動(dòng)式多功能組合探針原位檢測系統(tǒng)。(2)研制了一套簡易的適用于真空長距離、復(fù)雜結(jié)構(gòu)、大溫差跨度的溫度測量系統(tǒng)。針對(duì)SPI3800N掃描探針顯微鏡真空腔體結(jié)構(gòu)特點(diǎn),選擇了鉑熱電阻傳感器和XMT806型智能PID溫控儀,并通過三線制接法消除由于導(dǎo)線自身電阻產(chǎn)生的溫度測量誤差。該系統(tǒng)適用于中低真空環(huán)境,具有結(jié)構(gòu)簡單,測量精準(zhǔn),成本較低等優(yōu)點(diǎn)。(3)為實(shí)現(xiàn)掃描探針技術(shù)-微區(qū)拉曼兩種技術(shù)的聯(lián)用,提出兩種集成拉曼光譜的自動(dòng)式多功能組合探針系統(tǒng)初步結(jié)構(gòu)設(shè)計(jì)方案。根據(jù)設(shè)備的工作要求,選擇合適的壓電定位器,并通過探針載動(dòng)圓盤結(jié)合探針夾具設(shè)計(jì)出探針定位平臺(tái)；在此基礎(chǔ)上,進(jìn)一步給出拉曼物鏡“外置式”和“內(nèi)置式”兩種多功能組合探針系統(tǒng)的設(shè)計(jì)方案。以上設(shè)備的研制,將有利于增強(qiáng)特定測試工況下微觀摩擦磨損實(shí)驗(yàn)結(jié)果的真實(shí)性和可信度。相關(guān)的研究成果不僅有助于豐富納米摩擦學(xué)的基礎(chǔ)理論體系,還有望促進(jìn)掃描探針技術(shù)應(yīng)用的進(jìn)一步拓展。
[Abstract]:Scanning probe microscope is a widely used instrument for surface analysis. It is not only widely used in physical, chemical, biological, medical and other basic research fields. It also plays a more and more important role in the application of micro-nano fabrication and micro-electronics. However, at present, the commercial scanning probe microscope is mainly a single probe mode, its function is relatively single, it is difficult to achieve some more complex experimental and detection functions. For example, in microscopic wear experiments in special environments (such as vacuum or radiation), if a single probe mode is used, after finishing the wear test, It is necessary to replace the tip with smaller curvature radius in order to scan and observe the surface wear area in situ with high resolution. However, in the process of replacing the tip of the needle, the experimental environment of microscopic wear will inevitably be destroyed, and the samples will be exposed to the atmosphere, which may lead to oxidation, electrochemical action, surface contamination and so on, which may cause the test results to deviate from the truth. It is unfavorable to the scientific analysis of the experimental results. Therefore, there is an urgent need to develop a scanning probe microscope multi-probe in-situ detection system which can be used for in-situ experiments and observations to realize the cooperative detection and analysis of probes with different functions. On the platform of SPI3800N scanning probe microscope of Japan Seiko Company, this paper designs a high precision mobile positioning platform, a long distance moving multi-probe clamping device, an optical window and a sealing device of all parts of the system. A set of low cost, high efficiency and good stability manual multiprobe in situ detection system is developed. On the basis of this, it is further proposed that the system has higher probe positioning accuracy and high automation. Design scheme of multifunctional combined probe system integrated Raman spectroscopy. Based on the above research, the main work and innovation of this paper are as follows: 1) A low cost, high efficiency and good stability manual multifunctional probe in situ detection system has been developed. By designing the manual high precision positioning platform, the probe supporting structure, the optical window and the integrated sealing of the system, the effective matching between the multifunctional combined probe system and the scanning probe microscope is realized. In this paper, a manual multifunctional probe in situ detection system is designed and manufactured. A simple temperature measurement system is developed, which is suitable for long vacuum distance, complex structure and large temperature difference span. According to the structural characteristics of vacuum cavity of SPI3800N scanning probe microscope, platinum thermal resistance sensor and XMT806 intelligent pid temperature control instrument are selected, and the temperature measurement error caused by wire resistance is eliminated by three-wire connection method. The system is suitable for medium and low vacuum environment. It has the advantages of simple structure, accurate measurement, low cost and so on. Two primary structural design schemes of automatic multifunctional combined probe system integrated Raman spectroscopy are presented. According to the working requirements of the equipment, the suitable piezoelectric positioner is selected, and the probe positioning platform is designed by means of the probe moving disk and the probe clamp. Furthermore, the design scheme of two kinds of multifunctional combined probe system, "external" and "built-in", is presented. The development of the above equipment will help to enhance the authenticity and reliability of the microscopic friction and wear test results under specific test conditions. The related research results not only help to enrich the basic theoretical system of nano-tribology, but also promote the further application of scanning probe technology.
【學(xué)位授予單位】：西南交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH742

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