本文選題：掃描探針顯微鏡 + 多功能組合探針　； 參考：《西南交通大學》2016年碩士論文

【摘要】：掃描探針顯微鏡是目前一種用途廣泛的表面分析儀器,它不僅廣泛應用于物理、化學、生物、醫(yī)學等基礎研究領域,還在微納制造和微電子等的應用研究領域中發(fā)揮著越來越重要的作用。然而,目前商業(yè)化的掃描探針顯微鏡主要為單一探針的工作模式,其功能相對單一,難以實現(xiàn)一些較為復雜的實驗及檢測功能。例如,在特殊環(huán)境下(如真空或輻射環(huán)境)的微觀磨損實驗中,若采用單一探針模式,在完成磨損實驗后,需要更換曲率半徑更小的針尖才能對表面磨損區(qū)域進行原位的高分辨形貌掃描與觀測。然而,在更換針尖的過程中,微觀磨損的實驗環(huán)境勢必會遭到破壞,使試樣暴露在大氣中,由此引發(fā)的氧化、電化學作用、表面污染等將可能造成試驗結果偏離真實,不利于對實驗結果的科學分析。因此,亟需研發(fā)可用于原位實驗和觀測的掃描探針顯微鏡多探針原位檢測系統(tǒng),實現(xiàn)不同功能探針的協(xié)同檢測與分析�；谏鲜鲂枨�,本論文在日本精工公司SPI3800N掃描探針顯微鏡的平臺上,通過設計高精度的移動定位平臺、可長距離移動的多探針裝夾裝置、光學窗口以及系統(tǒng)各部分密封裝置,開發(fā)出了一套低成本、高效率、穩(wěn)定性好的手動式多探針原位檢測系統(tǒng)；在此基礎上,進一步提出了具有更高探針定位精度、高自動化程度、集成拉曼光譜的多功能組合探針系統(tǒng)結構的設計方案。基于上述研究,本文的主要工作及創(chuàng)新點如下：(1)研制出了一套低成本、高效率、穩(wěn)定性好的手動式多功能組合探針原位檢測系統(tǒng)。通過設計手動高精度定位平臺、探針支撐結構、光學窗口以及系統(tǒng)綜合密封,實現(xiàn)了多功能組合探針系統(tǒng)與掃描探針顯微鏡的有效匹配；在此基礎上,設計和加工了手動式多功能組合探針原位檢測系統(tǒng)。(2)研制了一套簡易的適用于真空長距離、復雜結構、大溫差跨度的溫度測量系統(tǒng)。針對SPI3800N掃描探針顯微鏡真空腔體結構特點,選擇了鉑熱電阻傳感器和XMT806型智能PID溫控儀,并通過三線制接法消除由于導線自身電阻產(chǎn)生的溫度測量誤差。該系統(tǒng)適用于中低真空環(huán)境,具有結構簡單,測量精準,成本較低等優(yōu)點。(3)為實現(xiàn)掃描探針技術-微區(qū)拉曼兩種技術的聯(lián)用,提出兩種集成拉曼光譜的自動式多功能組合探針系統(tǒng)初步結構設計方案。根據(jù)設備的工作要求,選擇合適的壓電定位器,并通過探針載動圓盤結合探針夾具設計出探針定位平臺；在此基礎上,進一步給出拉曼物鏡“外置式”和“內(nèi)置式”兩種多功能組合探針系統(tǒng)的設計方案。以上設備的研制,將有利于增強特定測試工況下微觀摩擦磨損實驗結果的真實性和可信度。相關的研究成果不僅有助于豐富納米摩擦學的基礎理論體系,還有望促進掃描探針技術應用的進一步拓展。
[Abstract]:Scanning probe microscope is a widely used instrument for surface analysis. It is not only widely used in physical, chemical, biological, medical and other basic research fields. It also plays a more and more important role in the application of micro-nano fabrication and micro-electronics. However, at present, the commercial scanning probe microscope is mainly a single probe mode, its function is relatively single, it is difficult to achieve some more complex experimental and detection functions. For example, in microscopic wear experiments in special environments (such as vacuum or radiation), if a single probe mode is used, after finishing the wear test, It is necessary to replace the tip with smaller curvature radius in order to scan and observe the surface wear area in situ with high resolution. However, in the process of replacing the tip of the needle, the experimental environment of microscopic wear will inevitably be destroyed, and the samples will be exposed to the atmosphere, which may lead to oxidation, electrochemical action, surface contamination and so on, which may cause the test results to deviate from the truth. It is unfavorable to the scientific analysis of the experimental results. Therefore, there is an urgent need to develop a scanning probe microscope multi-probe in-situ detection system which can be used for in-situ experiments and observations to realize the cooperative detection and analysis of probes with different functions. On the platform of SPI3800N scanning probe microscope of Japan Seiko Company, this paper designs a high precision mobile positioning platform, a long distance moving multi-probe clamping device, an optical window and a sealing device of all parts of the system. A set of low cost, high efficiency and good stability manual multiprobe in situ detection system is developed. On the basis of this, it is further proposed that the system has higher probe positioning accuracy and high automation. Design scheme of multifunctional combined probe system integrated Raman spectroscopy. Based on the above research, the main work and innovation of this paper are as follows: 1) A low cost, high efficiency and good stability manual multifunctional probe in situ detection system has been developed. By designing the manual high precision positioning platform, the probe supporting structure, the optical window and the integrated sealing of the system, the effective matching between the multifunctional combined probe system and the scanning probe microscope is realized. In this paper, a manual multifunctional probe in situ detection system is designed and manufactured. A simple temperature measurement system is developed, which is suitable for long vacuum distance, complex structure and large temperature difference span. According to the structural characteristics of vacuum cavity of SPI3800N scanning probe microscope, platinum thermal resistance sensor and XMT806 intelligent pid temperature control instrument are selected, and the temperature measurement error caused by wire resistance is eliminated by three-wire connection method. The system is suitable for medium and low vacuum environment. It has the advantages of simple structure, accurate measurement, low cost and so on. Two primary structural design schemes of automatic multifunctional combined probe system integrated Raman spectroscopy are presented. According to the working requirements of the equipment, the suitable piezoelectric positioner is selected, and the probe positioning platform is designed by means of the probe moving disk and the probe clamp. Furthermore, the design scheme of two kinds of multifunctional combined probe system, "external" and "built-in", is presented. The development of the above equipment will help to enhance the authenticity and reliability of the microscopic friction and wear test results under specific test conditions. The related research results not only help to enrich the basic theoretical system of nano-tribology, but also promote the further application of scanning probe technology.
【學位授予單位】：西南交通大學
【學位級別】：碩士
【學位授予年份】：2016
【分類號】：TH742

【相似文獻】

相關期刊論文 前10條

1 趙政,丁建寧,許路寧;掃描探針顯微鏡的研究[J];機械制造;2005年02期

2 郭云昌,蔡穎謙;掃描探針顯微鏡的進展[J];現(xiàn)代科學儀器;2005年03期

3 韓桂泉;李京偉;蘇曄;方新飛;嚴虎;唐葉平;沈蘭;孫萃萃;;掃描探針顯微鏡[J];化工時刊;2006年12期

4 吳士業(yè);馮治平;劉云波;何彪;;掃描探針顯微鏡在白酒研究中應用[J];釀酒;2009年03期

5 黃龍飛;丁喜冬;;掃描探針顯微鏡中數(shù)據(jù)格式的分析及轉換程序的設計[J];電子顯微學報;2011年03期

6 邵和玉;;觀察微觀世界的一種強有力手段——掃描探針顯微鏡[J];現(xiàn)代科學儀器;1991年03期

7 白春禮,商廣義;掃描探針顯微鏡[J];現(xiàn)代科學儀器;1994年04期

8 姚王非,葉聲華,胡小唐;掃描探針顯微鏡[J];天津大學學報;1996年05期

9 戴長春，黃桂珍，，張新文，施倪承;多功能掃描探針顯微鏡的設計與實現(xiàn)[J];儀器儀表學報;1996年S1期

10 胡曉明;掃描探針顯微鏡的基礎知識[J];現(xiàn)代物理知識;1997年02期

相關會議論文 前10條

1 郭生士;;用掃描探針顯微鏡掃描二維光柵形貌[A];第六屆全國信息獲取與處理學術會議論文集（2）[C];2008年

2 戴長春;Hou Tee Ng;Yau Sam;;多探頭掃描探針顯微鏡系統(tǒng)[A];全國第七屆掃描隧道顯微學學術會議（STM'7）論文集（二）[C];2002年

3 孫鑫;費敏銳;;基于神經(jīng)網(wǎng)絡的掃描探針顯微鏡標定技術研究[A];節(jié)能環(huán)保 和諧發(fā)展——2007中國科協(xié)年會論文集（一）[C];2007年

4 韓立;韓冬;王秀鳳;陳皓明;;掃描探針顯微鏡進行細胞掃描時探針對于細胞活性的影響[A];全國第七屆掃描隧道顯微學學術會議（STM'7）論文集（一）[C];2002年

5 鄔曉華;周發(fā)升;王文偉;黃文浩;;掃描探針顯微鏡教學演示軟件[A];第五屆全國STM學術會議論文集[C];1998年

6 范紅玉;楊杞;楊德明;牛金海;倪維元;劉東平;;基于多模式掃描探針顯微鏡技術研究碳化硅的離子輻照損傷[A];第十六屆全國等離子體科學技術會議暨第一屆全國等離子體醫(yī)學研討會會議摘要集[C];2013年

7 劉輝;黃自元;費敏銳;;基于DSP的掃描探針顯微鏡中壓電陶瓷管非線性校正技術及其實現(xiàn)[A];全國冶金企業(yè)計控網(wǎng)絡化研討會論文集[C];2003年

8 陳津平;胡曉東;陳峰;郭彤;胡小唐;;振動與掃描速率綜合影響SPM圖像的實驗研究[A];全國第七屆掃描隧道顯微學學術會議（STM'7）論文集（二）[C];2002年

9 趙亞軍;程茜;錢夢

本文編號：1994610