本文選題：微機電陀螺 + 機械熱噪聲　； 參考：《中國慣性技術(shù)學(xué)報》2015年03期

【摘要】：研究了一種能夠在大氣壓下達(dá)到較高性能的微機電陀螺敏感結(jié)構(gòu)。設(shè)計了一種用于敏感垂直于結(jié)構(gòu)平面方向的角速度的、驅(qū)動軸和檢測軸相似的線振動微機電陀螺敏感結(jié)構(gòu)。用U形梁隔離驅(qū)動器、敏感質(zhì)量塊和檢測器以降低機械耦合,檢測軸采用變面積式檢測電容以降低阻尼。推導(dǎo)了振動速率陀螺的機械頻率響應(yīng)特性,分析了機械熱噪聲和在調(diào)諧及非調(diào)諧模式下檢測電路噪聲等效的角速度噪聲,分析了梁的剛度矩陣和機械耦合特性,測試了結(jié)構(gòu)的驅(qū)動-檢測耦合頻率響應(yīng)。在大氣壓下陀螺檢測軸品質(zhì)因數(shù)達(dá)到66,機械熱噪聲為1.89((°)·h-1)/√Hz,理論耦合剛度比大于800。
[Abstract]:A sensitive structure of MEMS gyroscope with high performance at atmospheric pressure is studied. A linear vibration MEMS gyroscope sensitive structure, which is used to sensitive angular velocity perpendicular to the plane direction of the structure and similar to the drive axis and the detecting axis, is designed. In order to reduce mechanical coupling, U beam isolation actuator, sensitive mass block and detector are used to reduce mechanical coupling, and variable area detection capacitance is used to reduce damping. The mechanical frequency response characteristics of the vibration-rate gyroscope are derived. The mechanical thermal noise and the angular velocity noise equivalent to the noise of the detection circuit in the tuning and non-tuning modes are analyzed. The stiffness matrix and the mechanical coupling characteristics of the beam are analyzed. The drive-detection coupling frequency response of the structure was tested. Under atmospheric pressure, the quality factor of the gyro detection axis is 66, the mechanical thermal noise is 1.89 (擄) h-1 / hm ~ (-1) Hz. the theoretical coupling stiffness ratio is more than 800.
【作者單位】： 清華大學(xué)精密儀器系;
【基金】：裝備預(yù)先研究項目(20114113013)
【分類號】：TH113.1;TH824.3
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本文編號：1868555