本文選題：光學(xué)檢測(cè)　切入點(diǎn)：光學(xué)元件　出處：《光子學(xué)報(bào)》2015年12期 　論文類型：期刊論文

【摘要】：基于等效應(yīng)力法分析了溫度變化對(duì)反射鏡面形準(zhǔn)確度的影響.對(duì)反射鏡粘接處施加一定量的徑向強(qiáng)迫位移約束,使其受到與熱應(yīng)力大小一致的應(yīng)力作用,在該強(qiáng)迫位移約束下反射鏡面形變化與熱應(yīng)力作用下反射鏡面形變化基本一致.對(duì)直徑為70mm、厚度為15mm的反射鏡進(jìn)行粘接實(shí)驗(yàn),用ZYGO干涉儀測(cè)定溫變前后反射鏡的面形變化.當(dāng)溫度由20℃降到16℃時(shí),反射鏡面形峰谷值和均方根值的變化量分別為0.005λ和0.002λ(λ=632.8nm),理論計(jì)算的峰谷值和均方根值變化量分別為0.004λ和0.002λ;當(dāng)溫度由20℃升高到30℃時(shí),反射鏡面形峰谷值和均方根值變化量分別為0.013λ和0.006λ,理論計(jì)算的峰谷值和均方根值變化量分別為0.012λ和0.004λ,實(shí)驗(yàn)值和模擬分析值基本一致.
[Abstract]:Based on the method of equal effect force, the effect of temperature change on the accuracy of mirror shape is analyzed. A certain amount of radial forced displacement constraint is applied to the bonding of the mirror, which is subjected to the same stress as the thermal stress. The change of reflection mirror shape under the constraint of forced displacement is basically the same as that of reflection mirror shape under thermal stress. The bonding experiment of the mirror with a diameter of 70 mm and a thickness of 15 mm is carried out. ZYGO interferometer was used to measure the surface shape change of the mirror before and after the temperature change. When the temperature was reduced from 20 鈩，

本文編號(hào)：1556676