【摘要】：陀螺儀作為一種傳統(tǒng)的慣性器件,在智能硬件興起的今天,愈加得到各方的關(guān)注。本文對(duì)目前轉(zhuǎn)子式陀螺提出了一種新型撓性梁轉(zhuǎn)子式陀螺結(jié)構(gòu),旨在實(shí)現(xiàn)更好的性能,增大測(cè)量范圍,提高陀螺精度。在該陀螺系統(tǒng)中,撓性梁為關(guān)鍵部件,直接決定了器件的最終性能。本文針對(duì)該轉(zhuǎn)子式陀螺的撓性梁展開了結(jié)構(gòu)設(shè)計(jì)仿真分析,提出應(yīng)變檢測(cè)的方法。由于開環(huán)對(duì)系統(tǒng)中誤差因素控制能力弱,精度較低,后期加入壓電閉環(huán)反饋環(huán)節(jié),進(jìn)一步改善撓性梁結(jié)構(gòu)檢測(cè)結(jié)果的線性度和靈敏度,提高了系統(tǒng)最終性能。本論文中通過(guò)對(duì)材料力學(xué)等相關(guān)理論研究,建立了微陀螺撓性梁變形檢測(cè)力學(xué)模型,導(dǎo)出梁變形與系統(tǒng)性能表征之間的線性理論證明。而后通過(guò)solidworks軟件進(jìn)行了系統(tǒng)整體建模,在ansys workbench中針對(duì)撓性梁結(jié)構(gòu)從材料,結(jié)構(gòu)布置,截面等因素進(jìn)行尺寸優(yōu)化仿真,改進(jìn)梁結(jié)構(gòu)合理性設(shè)計(jì)方案。隨后在ansys workbench環(huán)境中搭建了惠斯通電橋三維模型完成了撓性梁應(yīng)變檢測(cè)。對(duì)應(yīng)變檢測(cè)中誤差進(jìn)行仿真分析,優(yōu)化了應(yīng)變薄膜厚度尺寸,此外通過(guò)Mexwell軟件研究了系統(tǒng)中磁場(chǎng)對(duì)撓性梁應(yīng)變檢測(cè)的影響誤差。最后通過(guò)ansys參數(shù)優(yōu)化對(duì)撓性梁壓電執(zhí)行中反饋效果進(jìn)行仿真研究,改進(jìn)了梁的壓電反饋結(jié)構(gòu)。通過(guò)仿真研究發(fā)現(xiàn),撓性梁等截面尺寸厚度對(duì)梁變形檢測(cè)靈敏相關(guān)性最大,在形變限度內(nèi),優(yōu)化撓性梁厚度尺寸到0.2mm。變截面梁結(jié)構(gòu)削減梁截面尺寸有效提高了應(yīng)變值,在合理限度內(nèi)優(yōu)化了梁變形檢測(cè)。應(yīng)變檢測(cè)采用全橋式檢測(cè)有效補(bǔ)償了硅應(yīng)變片溫度影響,提高檢測(cè)靈敏度,優(yōu)化壓阻薄膜厚度為0.02mm。陀螺偏轉(zhuǎn)中相較撓性梁應(yīng)變檢測(cè),磁場(chǎng)中電磁阻矩自平衡影響占4.7%,加入應(yīng)變檢測(cè)修正系數(shù)1.05。閉環(huán)環(huán)節(jié)得到輸入角速度與閉環(huán)壓電反饋?zhàn)罴殉C正電壓點(diǎn)性能指標(biāo),同時(shí)改進(jìn)了撓性梁結(jié)構(gòu),嵌入應(yīng)變薄膜優(yōu)化厚度尺寸0.04mm,增大系統(tǒng)檢測(cè)范圍達(dá)±45°/s。最終新型撓性梁轉(zhuǎn)子陀螺整體性能提升,非線性度為0.13%,閉環(huán)標(biāo)度因子達(dá)到332.4mV/(°)?s~(-1)。
[Abstract]:Gyroscope as a traditional inertial device, in the rise of intelligent hardware today, more and more attention. In this paper, a new type of rotor gyroscope with flexible beam is proposed, which aims at achieving better performance, increasing measurement range and improving gyroscope precision. In the gyroscope system, the flexible beam is the key component, which directly determines the final performance of the device. In this paper, the structural design simulation analysis of the flexible beam of the rotor gyroscope is carried out, and the method of strain detection is proposed. Due to the weak control ability of open loop to the error factors and the low precision, the linearity and sensitivity of the test results of the flexible beam structure are further improved by adding piezoelectric closed-loop feedback link in the later stage, and the final performance of the system is improved. In this paper, a mechanical model of micro gyro flexible beam deformation detection is established by studying the theory of material mechanics, and the linear theoretical proof between beam deformation and system performance characterization is derived. Then the whole system is modeled by solidworks software, and the dimension optimization simulation of flexible beam structure is carried out in ansys workbench from the aspects of material, structure layout, section and so on, so as to improve the rationality design scheme of beam structure. Then the three-dimensional model of Wheatstone bridge is built in ansys workbench environment to measure the strain of flexible beam. The error of strain detection is simulated and the thickness of strain film is optimized. In addition, the effect of magnetic field on strain measurement of flexible beam is studied by Mexwell software. Finally, the feedback effect in the piezoelectric performance of flexible beam is simulated by optimizing the ansys parameters, and the piezoelectric feedback structure of the beam is improved. The results of simulation show that the thickness of the same section of the flexible beam has the most sensitive correlation to the deformation detection of the beam, and the thickness of the flexible beam is optimized to 0.2 mm within the deformation limit. The reduction of beam section size of variable section beam structure can effectively improve the strain value and optimize the beam deformation detection within reasonable limits. The effect of silicon strain gauge temperature is compensated effectively by full-bridge method, and the sensitivity is improved, and the thickness of piezoresistive film is optimized to be 0.02 mm. In gyroscope deflection, the influence of electromagnetic resistance moment self-balance in magnetic field is 4.7, and the correction coefficient of strain detection is 1.05. At the same time, the structure of flexible beam is improved, the optimum thickness of embedded strain film is 0.04mm, and the detection range of the system is increased to 鹵45 擄/ s. Finally, the overall performance of the new flexible beam rotor gyroscope is improved, the nonlinearity is 0.13 and the closed-loop scaling factor reaches 332.4mV/ (擄)? s ~ (-1).
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN96

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