【摘要】：本課題由國家自然科學(xué)基金項(xiàng)目"小功率微波微等離子體的研究"(批準(zhǔn)號:61072007)部分資助。超材料在寬頻電磁吸收、太赫茲調(diào)制、熱輻射探測和納米光學(xué)成像、智能天線等領(lǐng)域具有極大的應(yīng)用潛力。超材料的負(fù)磁導(dǎo)率特性,使得其非常適合作為微等離子體源的介質(zhì)材料,可改善微波的傳輸效率,并且能產(chǎn)生高密度的微等離子體。而微等離子體可應(yīng)用在材料表面處理、生物MEMS的消毒殺菌和等離子體顯示等領(lǐng)域。因此在超材料表面產(chǎn)生微等離子體具有重要的研究意義。本文基于超材料的諧振吸波特性,根據(jù)微帶諧振器理論和無線傳輸理論,對2.45GHz無線激勵超材料微波微等離子體陣列源進(jìn)行了探究,主要研究了發(fā)射部分為矩形貼片天線、接收部分分別為單開口諧振環(huán)(SSRR)和雙開口諧振環(huán)(DSRR),發(fā)射部分為圓形貼片天線、接收部分分別為單開口諧振環(huán)(SSRR)和雙開口諧振環(huán)(DSRR)等四種情況下微波微等離子體陣列源的S參數(shù)和電磁場分布等特性。仿真結(jié)果表明,發(fā)射與接收部分的間距、發(fā)射與接收的中心偏離距離、接收環(huán)的邊長和各環(huán)之間的間距等對微波微等離子體陣列源的S參數(shù)、Q值和放電間隙處的電磁場分布等有很大的影響。本文工作對無線激勵方式的大面積和非線性的微波微等離子體陣列源的研究提供了一定的參考。
[Abstract]:This project is partly supported by the National Natural Science Foundation of China, Research on low Power Microwave Microplasmas (Grant No.: 61072007). Metamaterials have great potential applications in broadband electromagnetic absorption, terahertz modulation, thermal radiation detection, nano-optical imaging, smart antennas and so on. The negative permeability of the supermaterial makes it very suitable for the dielectric material as a microplasma source, which can improve the transmission efficiency of microwave and produce high density microplasma. Microplasma can be used in surface treatment of materials, disinfection and sterilization of biological MEMS, plasma display and so on. Therefore, it is of great significance to produce microplasma on the surface of supermaterial. In this paper, based on the resonant absorbing characteristics of metamaterials, and based on the theory of microstrip resonator and wireless transmission theory, the 2.45GHz wireless excited microwave microplasma array source is studied. The transmitting part is rectangular patch antenna. The receiving part is a single open resonant ring (SSRR) and a double open resonant ring (DSRR), transmitting part is a circular patch antenna. The receiving part is the single open resonant ring (SSRR) and the double open resonant ring (DSRR). The S parameters and electromagnetic field distribution of the microwave microplasma array source are obtained. The simulation results show that the distance between the transmitting and receiving parts, the distance between the center of the transmitter and the receiver, The length of the receiving ring and the distance between the rings have great influence on the S parameter Q value of the microwave microplasma array source and the electromagnetic field distribution at the discharge gap. The work in this paper provides a reference for the study of large area and nonlinear microwave microplasma array sources with wireless excitation mode.
【學(xué)位授予單位】：華東師范大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN820

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本文編號：2242897