本文選題：微加工　切入點：雙光束干涉　出處：《吉林大學(xué)學(xué)報(理學(xué)版)》2017年03期

【摘要】：利用納秒激光雙光束干涉的光刻方法,在光刻膠層制備具有周期性的一維光柵結(jié)構(gòu)樣品,并研究其形狀記憶特性.結(jié)果表明:顯影后的樣品在環(huán)境溫度為195℃及壓力的作用下,光柵形貌發(fā)生改變,光柵垂直高度降低,衍射光強減弱;當樣品冷卻至室溫時,光柵形貌可維持不變;當樣品的環(huán)境溫度為120℃時,光柵形貌恢復(fù)原狀,實現(xiàn)微觀形狀記憶功能.
[Abstract]:Using nanosecond laser double-beam lithography method, one-dimensional grating structure samples with periodicity were prepared in the photoresist layer, and their shape memory characteristics were studied.The results show that under the influence of ambient temperature of 195 鈩，

本文編號：1723764