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非對(duì)稱光束干涉制備二維微納光子結(jié)構(gòu)研究

發(fā)布時(shí)間:2018-03-31 07:22

  本文選題:多光束干涉 切入點(diǎn):非對(duì)稱 出處:《物理學(xué)報(bào)》2017年21期


【摘要】:研究了基于不同偏振組合的非對(duì)稱4束和5束光干涉制備二維微納光子結(jié)構(gòu).通過改變光束的參數(shù)組合獲得了枝節(jié)狀、波形狀等結(jié)構(gòu).在非對(duì)稱光束干涉中,光束的構(gòu)型和偏振改變了波矢差分布,從而改變晶格形貌和對(duì)比度.利用CHP-C感光膠開展了全息光刻實(shí)驗(yàn)制備,獲得了與模擬一致的光子結(jié)構(gòu).該研究為制備新穎光子結(jié)構(gòu)提供了有效途徑,此類光子結(jié)構(gòu)還可以為制備不同類型的金屬點(diǎn)陣結(jié)構(gòu)提供模板,對(duì)新型光子器件的制備和應(yīng)用研究具有一定的促進(jìn)作用.
[Abstract]:Two dimensional micro and nano photonic structures based on asymmetric 4 beams and 5 beams of light interference with different polarization combinations are studied. The branches and wave shapes are obtained by changing the parameter combination of the beams. The configuration and polarization of the beam change the distribution of the wave vector, thus changing the morphology and contrast of the crystal lattice. The holographic lithography experiment was carried out by using the CHP-C photoresist. Photonic structures consistent with the simulation are obtained. This study provides an effective way to prepare novel photonic structures, which can also provide templates for the preparation of different types of metal lattice structures. It can promote the preparation and application of new photonic devices.
【作者單位】: 青島科技大學(xué)數(shù)理學(xué)院;山東省新型光電材料與技術(shù)工程實(shí)驗(yàn)室;
【基金】:山東省高等學(xué)校科技計(jì)劃(批準(zhǔn)號(hào):J14LJ06) 山東省自然科學(xué)基金(批準(zhǔn)號(hào):ZR2014FP012) 國(guó)家自然科學(xué)基金(批準(zhǔn)號(hào):11274189,11504194)資助的課題~~
【分類號(hào)】:TN256

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1 齊麗新;解決物理學(xué)中非對(duì)稱分布問題時(shí)的補(bǔ)償?shù)臃╗J];齊齊哈爾師范學(xué)院學(xué)報(bào)(自然科學(xué)版);1991年02期

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