發(fā)布時(shí)間：2018-02-28 14:27

  本文關(guān)鍵詞： 白光干涉 變速掃描 臺(tái)階標(biāo)準(zhǔn)樣板　出處：《紅外與激光工程》2017年07期 　論文類型：期刊論文

【摘要】：為了提高大尺寸臺(tái)階結(jié)構(gòu)的單邊測(cè)量精度、縮短測(cè)量時(shí)間,基于變速掃描技術(shù),并利用傅里葉變換提取法及單邊臺(tái)階評(píng)價(jià)算法進(jìn)行掃描干涉信號(hào)的處理,提出并搭建了具有變速掃描功能的白光干涉測(cè)量系統(tǒng)。并且利用該系統(tǒng)對(duì)標(biāo)稱值為9.976±0.028μm的臺(tái)階標(biāo)準(zhǔn)樣板進(jìn)行了測(cè)量,10次重復(fù)性測(cè)量結(jié)果為9.971μm,標(biāo)準(zhǔn)偏差量為0.007μm,測(cè)量時(shí)間僅為35 s,遠(yuǎn)小于常規(guī)掃描方法的222 s,大大縮短了測(cè)量時(shí)間,因此說明了該系統(tǒng)在大尺寸臺(tái)階結(jié)構(gòu)測(cè)量中,具有較高的精確性與高效性。
[Abstract]:In order to improve the accuracy and shorten the measuring time of large scale step structure, the scanning interference signal is processed by Fourier transform extraction method and single step evaluation algorithm based on variable speed scanning technology. A white light interferometry system with variable speed scanning function is proposed and built, and 10 times repeatability measurement results are 9.971 渭 m, 0.007 渭 m and 0.007 渭 m for the step standard template with a nominal value of 9.976 鹵0.028 渭 m. The interval is only 35 s, which is much smaller than that of the conventional scanning method (222 s), which greatly shortens the measuring time. Therefore, the system has high accuracy and efficiency in large scale step structure measurement.
【作者單位】： 上海市計(jì)量測(cè)試技術(shù)研究院;
【基金】：financially supported by national key scientific instrument and equipment development projects of China (2014YQ090709)~~
【分類號(hào)】：O436.1
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本文編號(hào)：1547673