發(fā)布時(shí)間：2018-02-21 19:14

  本文關(guān)鍵詞： 激光器 災(zāi)變性光學(xué)鏡面損傷 選擇性腐蝕 腔面再生　出處：《半導(dǎo)體光電》2017年01期 　論文類(lèi)型：期刊論文

【摘要】：圍繞鍺基InAs量子點(diǎn)激光器,開(kāi)展了激光器腔面失效及再生的研究。研究并分析了災(zāi)變性光學(xué)鏡面損傷產(chǎn)生的機(jī)理及其對(duì)激光器腔面的影響,開(kāi)展了腔面再生研究,發(fā)展了一套創(chuàng)新性的腔面再生工藝并實(shí)現(xiàn)了失效的鍺基InAs量子點(diǎn)激光器的再生。根據(jù)鍺基InAs量子點(diǎn)激光器材料結(jié)構(gòu)設(shè)計(jì)腐蝕工藝,通過(guò)選擇性腐蝕在激光器腔面制備出懸臂結(jié)構(gòu),采用細(xì)針解理使懸臂結(jié)構(gòu)自然解理,獲得新的激光器諧振腔面,失效激光器重新工作。對(duì)比了激光器失效前和再生后的工作性能,結(jié)果表明因?yàn)?zāi)變性光學(xué)鏡面損傷而失效的鍺基InAs量子點(diǎn)激光器獲得全新的諧振腔面,鍺基激光器器件性能和失效前相當(dāng)。
[Abstract]:The study on cavity surface failure and regeneration of germanium based InAs quantum dot laser is carried out. The mechanism of catastrophic optical mirror damage and its influence on laser cavity surface are studied. A set of innovative cavity surface regeneration technology has been developed and the regeneration of germanium based InAs quantum dot laser has been realized. According to the material structure of germanium based InAs quantum dot laser, corrosion process has been designed. The cantilever structure was fabricated by selective etching on the laser cavity surface. The cantilever structure was naturally cleavaged by fine needle cleavage, and a new laser resonator surface was obtained. The working performance of the laser before and after the laser failure is compared. The results show that the germanium based InAs quantum dot laser has a new resonator surface due to the damage of the optical mirror surface. The performance of germanium based laser device is similar to that before failure.
【作者單位】： 中國(guó)科學(xué)院上海微系統(tǒng)與信息技術(shù)研究所;
【基金】：國(guó)家“973”計(jì)劃項(xiàng)目(2014CB643902) 國(guó)家自然科學(xué)基金項(xiàng)目(61334004,61404152);國(guó)家自然科學(xué)基金創(chuàng)新群體項(xiàng)目(61321492)
【分類(lèi)號(hào)】：TN248

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