發(fā)布時間：2019-02-12 12:34

【摘要】：隨著光纖通信技術(shù)的快速發(fā)展,集成光電子器件特別是光開關(guān)由于制作簡單、成品率高、成本低、易于集成等優(yōu)點得到了廣泛的應(yīng)用。本論文首先介紹了集成光電子器件的發(fā)展、光開關(guān)的應(yīng)用以及已有的熱光開關(guān)器件的種類。與鈮酸鋰和III-V族半導(dǎo)體材料相比,二氧化硅材料和聚合物材料在材料成本和制作成本上更具優(yōu)勢。本論文的創(chuàng)新點在于有效地結(jié)合了SU8高熱光系數(shù)和二氧化硅低傳輸損耗、低耦合損耗的優(yōu)勢,使得器件的功率損耗低、尺寸較小。相較于其他以聚合物材料作為芯層、二氧化硅作為下包層來實現(xiàn)電光、熱光開關(guān)功能的器件,本論文提出的混合集成熱光是將SU8波導(dǎo)作為MZI的雙臂,二氧化硅波導(dǎo)作為3dB的功分器和合波器。SU8熱光系數(shù)較高,當(dāng)溫度相同時SU8產(chǎn)生的有效折射率差較大,根據(jù)馬赫曾德干涉儀基本原理可知,△neff較大時實現(xiàn)相同開關(guān)功能所需的傳輸臂長度較小,減小了器件的尺寸。首先,本文簡單介紹了平面光波導(dǎo)的基本理論和數(shù)值計算方法。文中分析了解平板波導(dǎo)的解析方法和求解條形波導(dǎo)的近似方法,以及單模條件、彎曲損耗和模式耦合理論。為了解決復(fù)雜波導(dǎo)和器件的精確求解問題,須要采用數(shù)值計算方法,結(jié)合本文所要采用的波導(dǎo)結(jié)構(gòu),對器件仿真設(shè)計所用到的光束傳播方法做了詳細的理論分析介紹。其次,本文對混合集成熱光開關(guān)的結(jié)構(gòu)做了仿真分析和優(yōu)化設(shè)計。文中給出了基于馬赫曾德干涉儀型的混合集成熱光開關(guān)SU8波導(dǎo)和二氧化硅波導(dǎo)的端面耦合方案,并利用模場疊加積分優(yōu)化了方案中的波導(dǎo)結(jié)構(gòu)。利用基于光束傳播方法的Rsoft軟件驗證了優(yōu)化過后的波導(dǎo)結(jié)構(gòu),兩波導(dǎo)之間的耦合效率約為0.81。同時,用Rsoft軟件確定了3dB功分器(合波器)采用多模干涉的結(jié)構(gòu)以及其具體的結(jié)構(gòu)參數(shù)。最后,根據(jù)仿真設(shè)計得到的波導(dǎo)結(jié)構(gòu),本文進行了混合集成熱光開關(guān)的制作。采用了在二氧化硅波導(dǎo)圖形上套刻窗口,旋涂套刻SU8波導(dǎo)的工藝制作方法。同時,采用兩次勻膠的方法實現(xiàn)了在6μm二氧化硅臺階上旋涂光刻膠,成功制備了SU8-二氧化硅混合波導(dǎo)。測試結(jié)果顯示,溫度變化不到20℃即可實現(xiàn)開關(guān)功能,消光比可達到23dB
[Abstract]:With the rapid development of optical fiber communication technology, integrated optoelectronic devices, especially optical switches, have been widely used because of the advantages of simple fabrication, high yield, low cost and easy integration. In this paper, the development of integrated optoelectronic devices, the application of optical switches and the kinds of thermo-optical switch devices are introduced. Compared with lithium niobate and III-V semiconductor materials, silica and polymer materials have more advantages in material cost and fabrication cost. The innovation of this thesis lies in combining the advantages of high thermal optical coefficient of SU8 and low transmission loss of silicon dioxide and low coupling loss, which makes the power loss of the device low and the size smaller. Compared with other devices which use polymer material as core layer and silicon dioxide as lower cladding layer to realize electro-optic and thermo-optical switch function, the hybrid integrated thermo-optical device proposed in this paper uses SU8 waveguide as the double arm of MZI. Silicon dioxide waveguide is used as the power divider and waver of 3dB. The thermo-optical coefficient of SU8 is relatively high, and the difference of effective refractive index produced by SU8 is large when the temperature is the same. According to the basic principle of Mach Zende interferometer, we can know that, When the neff is larger, the length of the transmission arm needed to realize the same switch function is smaller, which reduces the size of the device. Firstly, the basic theory and numerical method of planar optical waveguide are introduced briefly. In this paper, the analytical method of planar waveguide and the approximate method for solving strip waveguide, as well as the theory of single mode condition, bending loss and mode coupling are analyzed. In order to solve the problem of accurate solution of complex waveguides and devices, a numerical calculation method is needed. Combined with the waveguide structure to be adopted in this paper, the beam propagation method used in the device simulation design is analyzed and introduced in detail. Secondly, the structure of hybrid integrated thermooptic switch is simulated and optimized. A hybrid integrated thermo-optical switch (SU8) waveguide and a silica waveguide based on Mach Zende interferometer are presented in this paper. The waveguide structure is optimized by mode field superposition integral. The optimized waveguide structure is verified by Rsoft software based on beam propagation method. The coupling efficiency between the two waveguides is about 0.81. At the same time, the structure of 3dB power divider using multimode interference and its specific structure parameters are determined by Rsoft software. Finally, according to the waveguide structure designed by simulation, the hybrid integrated thermo-optical switch is fabricated in this paper. The fabrication method of SU8 waveguide with spin coating is adopted in this paper. At the same time, the SU8- silica mixed waveguide was successfully fabricated by using the method of twice homogenizing. The photoresist was spin-coated on the 6 渭 m silica step. The test results show that the switch function can be realized by changing the temperature less than 20 鈩，

本文編號：2420447