【摘要】：硅微諧振加速度計是一種頻率輸出的MEMS儀表,針對其差動頻率輸出的特點和對靜態(tài)與動態(tài)高精度測試精度的要求,設(shè)計并實現(xiàn)了一種高精度頻率輸出電路,實現(xiàn)了差動頻率的實時相減和靜態(tài)與動態(tài)頻率信號輸出。對電路及儀表的精度進(jìn)行了測試,測試結(jié)果表明,該電路穩(wěn)定性可達(dá)到1×10-9,全溫范圍內(nèi)(-40~+70℃)非線性優(yōu)于1×10-7,頻率分辨率可達(dá)到1×10-5,測試精度滿足儀表系統(tǒng)精度要求,使儀表更滿足工程應(yīng)用的條件。根據(jù)實際工程應(yīng)用要求,還對該電路提出了抗干擾設(shè)計,進(jìn)一步提高了該電路的工程應(yīng)用可靠性。
[Abstract]:Silicon microresonant accelerometer is a frequency output MEMS instrument. According to the characteristics of its differential frequency output and the requirement of static and dynamic high precision measurement precision, a high precision frequency output circuit is designed and implemented. Real-time subtraction of differential frequency and output of static and dynamic frequency signals are realized. The accuracy of the circuit and the instrument is tested. The test results show that the stability of the circuit can reach 1 脳 10 ~ (-9), the nonlinearity is better than 1 脳 10 ~ (-7) and the frequency resolution can reach 1 脳 10 ~ (-5) in the full temperature range (-40 ~ 70 鈩，

本文編號：2187602