本文選題：儀器 + 探測器�。� 參考：《天文學(xué)報》2013年05期

【摘要】：碲鋅鎘(CdZnTe)陣列探測器是近年來迅速發(fā)展的新型半導(dǎo)體探測器,具有高空間分辨率、高能量分辨率和可在室溫下工作的特點.介紹了碲鋅鎘晶體的物理特性和工作原理,并重點敘述了碲鋅鎘陣列探測器的制作工藝,包括晶片的預(yù)處理、鈍化、歐姆電極制作、陣列模板選擇、陣列封裝工藝選擇(微互聯(lián)方式).為了測試碲鋅鎘探測器性能,中國科學(xué)院暗物質(zhì)與空間天文重點實驗室和合作單位成功制作了4 pixel×4 pixel和8pixel×8 pixel碲鋅鎘陣列(厚度分別為5mm和2 mm,像素大小為2 mm×2 mm,間隙分別為0.15 mm和0.2 mm).在~(137)Cs放射源照射下,實驗室利用自行研制的、基于ASIC(Application Specific Integrated Circuit)芯片的多通道電子讀出系統(tǒng),對4 pixel×4 pixel碲鋅鎘陣列進行了實驗評估,首次獲得了16 pixel的能譜以及對應(yīng)的能量分辨本領(lǐng),其最優(yōu)分辨本領(lǐng)達4.8%@662 keV.
[Abstract]:CdZnTe array detector is a new type of semiconductor detector developed rapidly in recent years. It has high spatial resolution, high energy resolution and can work at room temperature. In this paper, the physical characteristics and working principle of ZnCdTe crystal are introduced, and the fabrication process of ZnCdTe array detector is described in detail, including pretreatment, passivation, ohmic electrode fabrication, selection of array template, etc. Array packaging process selection (micro-interconnection mode). In order to test the performance of zinc cadmium tellurium detector, The 4 pixel 脳 4 pixel and 8pixel 脳 8 pixel Zn / CD tellurium arrays (thickness of 5mm and 2 mm, pixel size of 2 mm 脳 2 mm, gap of 0.15 mm and 0.20 mm) have been successfully fabricated by the key Laboratory of Dark matter and Space Astronomy of the Chinese Academy of Sciences. An experimental evaluation of 4 pixel 脳 4 pixel zinc cadmium tellurium array was carried out by using a multichannel electronic readout system based on ASIC Application specific Integrated Circuit (ASIC Application specific Integrated Circuit) chip. The energy spectrum of 16 pixel and the corresponding energy resolution are obtained for the first time. The optimal resolution is 4.8keV and 662keV.
【作者單位】： 中國科學(xué)院紫金山天文臺;中國科學(xué)院暗物質(zhì)與空間天文重點實驗室;中國科學(xué)院大學(xué);
【基金】：中國科學(xué)院知識創(chuàng)新工程重要方向項目(空間科學(xué)預(yù)先研究項目) 國家自然科學(xué)基金項目(11003051,11273070)資助
【分類號】：P111

【參考文獻】

相關(guān)期刊論文 前1條

1 張冬敏;朱世富;趙北君;高德友;陳俊;唐世紅;方軍;程曦;;CdZnTe探測器晶片的表面處理工藝[J];人工晶體學(xué)報;2006年04期

【共引文獻】

相關(guān)期刊論文 前3條

1 王璽;肖沙里;張流強;陳宇曉;曹玉琳;黎淼;沈敏;蔡欣;蔣建;;基于CdZnTe晶體的2×2像素陣列探測器研究[J];光電子.激光;2010年05期

2 孫玉寶;傅莉;任潔;g智，

本文編號：2004163