本文選題：超潤滑 + 石墨�。� 參考：《物理學報》2016年23期

【摘要】：超潤滑可能是解決摩擦磨損問題的理想方案.目前已經(jīng)能夠在大氣環(huán)境下實現(xiàn)基于石墨的微米尺度超潤滑,但石墨接觸面在超潤滑實現(xiàn)過程中的影響還需要深入研究.為此,本文用電子束曝光及反應離子刻蝕方法在高定向熱解石墨上加工出微米尺度的氧化硅/石墨方臺結構,并用鎢針尖推開方臺的上部獲得超潤滑的石墨接觸面.然后用原子力顯微鏡對多個石墨接觸面進行了形貌表征,并使用能譜儀及X射線光電子能譜對石墨接觸面的邊緣進行測試.研究發(fā)現(xiàn),高定向熱解石墨的多晶結構在接觸面的形成過程中有重要影響,能夠決定接觸面的質量進而決定超潤滑能否實現(xiàn).石墨接觸面的邊緣存在大量加工中引入的化學鍵及在大氣中吸附的物理鍵,這些鍵是推開石墨方臺形成接觸面時阻力的來源,并在接觸面發(fā)生相對滑動時表現(xiàn)為摩擦力.本文通過對具有微米尺寸的超潤滑石墨接觸面進行研究,明確了接觸面內部及邊緣影響超潤滑實現(xiàn)的規(guī)律,對大面積超潤滑的實現(xiàn)及應用能夠提供有益的幫助.
[Abstract]:Superlubrication may be an ideal solution to the problem of friction and wear. At present, it is possible to realize graphite-based micro-scale superlubrication in atmospheric environment, but the influence of graphite contact surface on the realization of super-lubrication needs to be deeply studied. In this paper, the micron scale silicon oxide / graphite square structure was fabricated on high directional pyrolytic graphite by electron beam exposure and reactive ion etching, and superlubricated graphite contact surface was obtained by pushing the top of the square table with a tungsten needle. The morphologies of several graphite contact surfaces were characterized by atomic force microscope (AFM). The edge of graphite contact surfaces was measured by energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). It is found that the polycrystalline structure of highly oriented pyrolytic graphite plays an important role in the formation of the contact surface, which can determine the quality of the contact surface and then determine whether the superlubrication can be realized. There are a large number of chemical bonds and physical bonds adsorbed in the atmosphere on the edge of the graphite contact surface. These bonds are the source of resistance when pushing away the graphite square table to form the contact surface and show friction when the contact surface is relatively sliding. In this paper, the superlubricated graphite contact surface with micron size is studied, and the law of the influence of the interface interior and edge on the realization of superlubrication is clarified, which can provide useful help for the realization and application of large area superlubrication.
【作者單位】： 軍械工程學院電子與光學工程系;清華大學精密儀器系;清華大學精密測試技術及儀器國家重點實驗室;清華大學微納米力學與多學科交叉創(chuàng)新研究中心;
【基金】：國家自然科學基金(批準號:51375263) 國家重大科學研究計劃(批準號:2013CB934200)資助的課題~~
【分類號】：O313.5
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本文編號：1931291