【摘要】：壓電泵是近年來發(fā)展起來的一種新型流體泵，在流體系統(tǒng)中有著廣闊的應(yīng)用前景。壓電泵的輸出性能不僅取決于進(jìn)口和出口截止閥特性，而且與腔體的結(jié)構(gòu)形式息息相關(guān)。本文結(jié)合國家自然科學(xué)基金項(xiàng)目-“主動(dòng)閥壓電泵作用機(jī)理與關(guān)鍵技術(shù)研究”（項(xiàng)目編號(hào)：50575093）和教育部高等學(xué)�？萍紕�(chuàng)新工程重大項(xiàng)目培育基金項(xiàng)目-“驅(qū)動(dòng)測試控制功能一體化新型壓電機(jī)構(gòu)研究”（項(xiàng)目編號(hào)：708028），利用壓電雙晶片驅(qū)動(dòng)壓電泵工作，采用一種輪式平板閥，構(gòu)造多腔串聯(lián)結(jié)構(gòu)的小型系列壓電泵。在研發(fā)多腔串聯(lián)壓電泵的基礎(chǔ)上，開展了多腔串聯(lián)壓電泵的結(jié)構(gòu)設(shè)計(jì)以及試驗(yàn)等方面的研究。 1、壓電泵的國內(nèi)外研究現(xiàn)狀與發(fā)展 壓電泵具有結(jié)構(gòu)簡單、無電磁干擾、轉(zhuǎn)換效率高、性能可靠等優(yōu)點(diǎn)，是許多國家學(xué)者研究的熱點(diǎn)課題，已經(jīng)有30多年的研發(fā)歷史。本文在查閱大量國內(nèi)外相關(guān)文獻(xiàn)的基礎(chǔ)上，總結(jié)了壓電泵的各種分類方法，并對(duì)有閥壓電泵、無閥壓電泵的國內(nèi)外研究現(xiàn)狀和應(yīng)用情況進(jìn)行了綜述，了解到目前壓電泵產(chǎn)品已經(jīng)廣泛應(yīng)用于航空航天、化學(xué)分析、生物工程等各個(gè)領(lǐng)域。由于單腔壓電泵的輸出壓力和輸出流量均有限，采用多腔串聯(lián)結(jié)構(gòu)研發(fā)成為了一種良好的方案。國內(nèi)外對(duì)于該方面的研究還處于起步階段，研究成果較少，深入地了解多腔串聯(lián)壓電泵的工作特性，提高多腔壓電泵的輸出性能，為壓電泵在更廣泛領(lǐng)域的應(yīng)用打下基礎(chǔ)。 2、壓電振子振動(dòng)特性研究 壓電振子是壓電泵的動(dòng)力元件，它的性能直接影響到壓電泵的輸出能力。利用薄板變形理論，建立了圓形壓電振子彎曲變形的曲線方程，推導(dǎo)了壓電振子變形量和容積變化量的解析式。對(duì)本文選用基板直徑為35mm、陶瓷直徑為29mm壓電雙晶片振子變形量進(jìn)行了理論計(jì)算。應(yīng)用ANSYS仿真軟件建立了壓電振子的有限元模型，對(duì)振子振動(dòng)時(shí)的各階振型頻率和變形量進(jìn)行了仿真分析。通過試驗(yàn)方法對(duì)壓電振子的靜態(tài)特性進(jìn)行了測試，從而驗(yàn)證了理論分析和有限元仿真結(jié)果的正確性。 3、壓電泵被動(dòng)截止閥的設(shè)計(jì) 單向截止閥是決定有閥壓電泵輸出性能的關(guān)鍵部件，有閥壓電泵研究與發(fā)展是伴隨單向閥的發(fā)展而不斷進(jìn)步。針對(duì)多腔串聯(lián)壓電泵輸出壓力高的特點(diǎn)，為提高閥的承載能力和反向截止能力，本文采用一種由厚度5-7μm左右鈹青銅加工的輪式平板閥。理論分析了輪式平板閥在靜載荷作用下變形量及通流能力，確定了輪式平板閥的幾何尺寸，研究了作用在閥兩側(cè)的壓力差對(duì)閥通流能力的影響，并分析了其動(dòng)態(tài)響應(yīng)特性，為進(jìn)一步提高輸出流量提供了理論依據(jù)。 4、多腔串聯(lián)壓電泵工作性能分析與測試 多腔串聯(lián)壓電泵可以看作是多個(gè)單腔壓電泵的串聯(lián)工作模式，具有較大的輸出流量和較好的輸出壓力。多腔串聯(lián)壓電泵是脈動(dòng)輸出，很難建立精確的數(shù)學(xué)模型計(jì)算分析其輸出性能。為此，采用多個(gè)壓電晶片設(shè)計(jì)制作了雙腔串聯(lián)、三腔串聯(lián)和四腔體串聯(lián)等結(jié)構(gòu)的壓電泵系列樣機(jī)，，對(duì)各個(gè)結(jié)構(gòu)工作時(shí)的表現(xiàn)特性進(jìn)行理論分析，并對(duì)輸出壓力、輸出流量、閥的安裝位置以及不同驅(qū)動(dòng)方式等情況進(jìn)行了試驗(yàn)測試。試驗(yàn)結(jié)果表明：①從輸出壓力來看，三腔串聯(lián)壓電泵在整個(gè)工作頻率段的輸出壓力約為兩腔串聯(lián)的1.5倍，輸出壓力比較平穩(wěn)，而四腔泵輸出壓力波動(dòng)較大。但是，隨著串聯(lián)級(jí)數(shù)的增加，多腔串聯(lián)壓電泵的輸出壓力持續(xù)增大。②從輸出流量來看，多腔壓電泵在高頻段（大于200Hz）工作時(shí)，隨著腔體數(shù)量的增加，輸出流量增加較多，在輸出電壓的工作頻率為300Hz時(shí)，四腔串聯(lián)壓電泵的輸出流量達(dá)到了將近1000ml/min�？梢�，多腔體串聯(lián)壓電泵可以有效地提高壓電泵的輸出流量性能。 5、多腔串聯(lián)壓電泵驅(qū)動(dòng)電源設(shè)計(jì) 為滿足壓電振子快速響應(yīng)的要求，運(yùn)用FPGA和DDS技術(shù)為多腔串聯(lián)壓電泵設(shè)計(jì)了快速響應(yīng)的驅(qū)動(dòng)電源。DDS是一種新型的頻率合成技術(shù)，從“相位”的概念出發(fā)進(jìn)行頻率合成，具有較高的頻率分辨率。以FPGA芯片作為硬件電路的核心，通過VHDL語言設(shè)計(jì)的DDS驅(qū)動(dòng)電源的IP核嵌入在FPGA內(nèi)部。采用模塊化的思想，設(shè)計(jì)了DDS系統(tǒng)外圍電路，進(jìn)行了軟件設(shè)計(jì)，并且對(duì)該驅(qū)動(dòng)電源進(jìn)行了試驗(yàn)測試，結(jié)果表明該驅(qū)動(dòng)電源的輸出波形（正弦波、三角波和方波）精度較高，當(dāng)頻率和波形等參數(shù)改變時(shí)響應(yīng)速度快，達(dá)到電源輸出穩(wěn)定性要求。 6、多腔串聯(lián)壓電泵閉環(huán)控制系統(tǒng)設(shè)計(jì) 壓電泵在工作過程中，易受氣泡、雜質(zhì)等干擾，輸出流量有時(shí)會(huì)不穩(wěn)定。為此，設(shè)計(jì)了多腔串聯(lián)壓電泵閉環(huán)控制系統(tǒng)，它由緩沖電路、調(diào)幅電路、功率放大電路、升壓變壓器等部分組成，核心部件是在緩沖級(jí)之后由FPGA控制數(shù)字電位器組成的可變?cè)鲆娴恼{(diào)幅電路。實(shí)際的輸出流量通過換算轉(zhuǎn)換成電壓值后，與參考電壓值做比較，存在偏差則調(diào)節(jié)調(diào)幅電路的數(shù)字電位器抽頭位置，運(yùn)用FPGA芯片通過增益調(diào)整來實(shí)現(xiàn)多腔串聯(lián)壓電泵流量的穩(wěn)定控制，為今后的研究提供新的思路和試驗(yàn)平臺(tái)。
[Abstract]:Piezoelectric pump is a new kind of fluid pump developed in recent years, and has wide application prospect in fluid system. The output performance of the piezoelectric pump depends not only on the characteristics of the inlet and outlet shut-off valves but also in the form of the structure of the cavity. This paper combines the national natural science fund project-"Study on the action mechanism and key technology of active valve piezoelectric pump" (project number:50575093) and the project-"Research on a New Type of Piezoelectric Mechanism with Integrated Drive Test and Control Function" (project number:708028) of the major project of science and technology innovation engineering of the Ministry of Education, and uses the piezoelectric bimorph to drive the piezoelectric pump to work, and adopts a wheel type flat valve. A small series of piezoelectric pumps that construct a multi-lumen series structure. On the basis of R & D multi-cavity series piezoelectric pump, the structure design and test of multi-cavity series piezoelectric pump are carried out. 1. Current research situation of piezoelectric pump at home and abroad The development of the piezoelectric pump has the advantages of simple structure, no electromagnetic interference, high conversion efficiency and reliable performance. The paper summarizes the various classification methods of the piezoelectric pump on the basis of consulting a lot of relevant literature and abroad, and reviews the present situation and application of the valve piezoelectric pump and the non-valve piezoelectric pump. Space, chemical analysis, bioengineering, etc. Because the output pressure and output flow of the single-cavity piezoelectric pump are limited, the multi-cavity series-structure R & D has become a good At home and abroad, the research on this aspect is still in the initial stage, the research results are less, the working characteristics of the multi-cavity series piezoelectric pump are better understood, the output performance of the multi-cavity piezoelectric pump is improved, and the application of the piezoelectric pump in a wider field is achieved. lower foundation The characteristic of vibration is that the piezoelectric vibrator is the power element of the piezoelectric pump, and its performance directly influences the pressure. The output power of the electric pump is established. The curve equation of the bending deformation of the circular piezoelectric vibrator is established by the deformation theory of the thin plate. The deformation and the volume of the piezoelectric vibrator are derived. In this paper, the deformation of the piezoelectric bimorph vibrator with the substrate diameter of 35 mm and the ceramic diameter of 29 mm is selected. The theoretical calculation is carried out. The finite element model of the piezoelectric vibrator is established by using the ANSYS simulation software, and the frequency and deformation of each step in the vibration of the vibrator are obtained. The static characteristic of the piezoelectric vibrator is tested by the test method, and the theoretical analysis and the finite element simulation are verified. true of true results.3, pressure The design one-way stop valve of the passive stop valve of the electric pump is the key component which determines the output performance of the valved piezoelectric pump, and the research and development of the valve piezoelectric pump are accompanied by the development of the valve According to the characteristics of high output pressure of multi-cavity series piezoelectric pump, this paper adopts a kind of one-way valve with the thickness of 5-7. m In this paper, the deformation and the flow capacity of the wheel-type plate valve under the static load are analyzed, and the geometric dimension of the wheel-type plate valve is determined. The influence of the pressure difference on the flow capacity of the valve on the two sides of the valve is studied. The dynamic response characteristics of the system are analyzed and the dynamic response characteristics are further improved. The output flow provides a theoretical basis. The series piezoelectric pump working performance analysis and testing multi-cavity series piezoelectric pump can be regarded as a series working mode of a plurality of single-cavity piezoelectric pumps, The large output flow and the better output pressure. The multi-cavity series piezoelectric pump is a pulsating output and it is difficult to establish the essence. In this paper, a series of piezoelectric pump series of two-cavity series, three-cavity series and four-cavity series and other structures are fabricated by using a plurality of piezoelectric crystal plates, and the performance characteristics of the two-cavity series, three-cavity series and four-cavity series are made. the analysis, and the output pressure, the output flow rate, the installation position of the valve, The test results show that the output pressure of the three-cavity series piezoelectric pump in the whole working frequency range is about 1.5 times that of the two-cavity series and the output pressure is compared with the output pressure. The output pressure of the four-cavity pump is large, however, with the increase of the series series, the output pressure of the four-cavity pump is large. The output pressure of the cavity series piezoelectric pump is continuously increased. According to the output flow, the multi-cavity piezoelectric pump is operated at a high frequency band (more than 200 Hz), the output flow is increased as the number of cavities is increased, the output flow of the four-cavity series piezoelectric pump is increased when the working frequency of the output voltage is 300 Hz, It can be seen that the multi-cavity series piezoelectric pump can effectively improving the output flow performance of the piezoelectric pump and 5, the multi-cavity series piezoelectric pump driving power supply is designed to meet the requirement of the fast response of the piezoelectric vibrator, The multi-cavity series piezoelectric pump has designed a fast response driving power supply. DDS is a new kind of frequency synthesis technology, from the concept of the "phase" The FPGA chip is used as the core of the hardware circuit and is designed by the VHDL language. The IP core of the DS drive power supply is embedded in the FPGA. The design of the peripheral circuit of the DDS system is designed. The software design is carried out, and the driving power supply is tested and tested. The result shows that the drive power is lost. The output waveform (sine wave, triangular wave and square wave) is high in precision, and when the parameters such as frequency and waveform change The response speed of the power supply is high, and the output stability of the power supply is achieved Requirement.6. The closed-loop control system of multi-cavity series piezoelectric pump is designed to design the piezoelectric pump in the working process in that invention, the closed-loop control system of the multi-cavity series piezoelectric pump is designed, the actual output flow is converted into a voltage value, compared with the reference voltage value, the position of the digital potentiometer tap of the amplitude-modulation circuit is adjusted by the deviation, and the FPGA chip is used Multi-cavity series piezoelectric pump flow by gain adjustment
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2013
【分類號(hào)】：TH38

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