發(fā)布時(shí)間：2019-05-07 06:35

【摘要】：離子牽引泵是一種以庫侖力作為主導(dǎo)驅(qū)動(dòng)力的電流體動(dòng)力泵，在未來的微電子散熱和微流控等領(lǐng)域有著廣闊的應(yīng)用前景。本文基于電流體動(dòng)力學(xué)基本原理，采用光致抗蝕法設(shè)計(jì)制造了具有多種結(jié)構(gòu)和尺寸參數(shù)的離子牽引泵用電極片，并組裝成平板型微泵，利用數(shù)值模擬的方法研究了腔體高度對于微泵性能的影響，又對各種參數(shù)的電極片對微泵性能的影響進(jìn)行了實(shí)驗(yàn)和分析。主要內(nèi)容如下： （1）電極片的結(jié)構(gòu)設(shè)計(jì)與制備 利用正交實(shí)驗(yàn)法設(shè)計(jì)具有多種尺寸參數(shù)和圖形結(jié)構(gòu)的電極。選用光致抗蝕法作為電極圖形的刻蝕方法，選用FR-4型環(huán)氧玻纖維布覆銅板作為電極片的基體材料。在制作工藝中增加沉金工藝，使電極表面形成鍍金層，以減少后期實(shí)驗(yàn)過程中電極的腐蝕。通過梳線線寬，電極邊緣間距，凸點(diǎn)尖端圓弧半徑以及掏蝕深度四個(gè)參數(shù)對制作完成后的電極結(jié)構(gòu)尺寸及其誤差進(jìn)行了評價(jià)。 （2）介電液體中電極片電壓-電流關(guān)系研究 根據(jù)實(shí)驗(yàn)過程中存在的泵體易爆炸，丙酮工質(zhì)易揮發(fā)等潛在危險(xiǎn)，自主搭建具有較高安全性能的實(shí)驗(yàn)平臺。利用實(shí)驗(yàn)平臺對不同結(jié)構(gòu)參數(shù)的電極片電壓-電流關(guān)系（U-I關(guān)系）進(jìn)行測試。對不同電壓下，電流的變化規(guī)律進(jìn)行了總結(jié)和分析。此外還研究了電極的梳線線寬，電極邊緣間距和凸點(diǎn)結(jié)構(gòu)對于電壓-電流關(guān)系（U-I關(guān)系）的影響。 （3）離子牽引微泵簡化模型的數(shù)值模擬 根據(jù)離子牽引微泵結(jié)構(gòu)重復(fù)性的特點(diǎn)對離子牽引泵數(shù)值模型進(jìn)行了簡化。選用COMSOL Multiphysics軟件來進(jìn)行數(shù)值求解。通過利用電場控制方程，電荷傳輸方程和流體控制方程三組求解方程，并對應(yīng)采用COMSOL軟件中靜電場，稀物質(zhì)傳遞和層流模塊及其之間的耦合來實(shí)現(xiàn)數(shù)值求解。此外還將數(shù)值計(jì)算結(jié)果與實(shí)驗(yàn)結(jié)果進(jìn)行了部分比對，并在結(jié)果的趨勢變化上得到了一致。通過對數(shù)值結(jié)果的分析得出微泵腔體的高度具有最優(yōu)值，同時(shí)也說明利用稀物質(zhì)傳遞過程代替介電液體中離子注入過程來進(jìn)行模型計(jì)算的建模方法是可行的。 （4）電極片結(jié)構(gòu)對微泵性能的影響 對平板型微泵的結(jié)構(gòu)進(jìn)行了設(shè)計(jì)，同時(shí)針對性地設(shè)計(jì)了能夠滿足測試精度要求的流量，，泵壓測試裝置，并對流量和泵壓轉(zhuǎn)換的計(jì)算方法進(jìn)行了說明。分別分析了電極邊緣間距，線寬，凸點(diǎn)結(jié)構(gòu)和焦耳熱對于微泵流量和泵壓的影響。在幾種影響參數(shù)中梳線的線寬對于微泵動(dòng)力效果影響最為明顯，梳線寬度越大就能夠提供越大流量和越高的泵壓；此外，還研究了焦耳熱對于微泵動(dòng)力效果的削弱作用。
[Abstract]:Ion traction pump is a kind of electrohydrodynamic pump with Coulomb force as the main driving force. It has a wide application prospect in the fields of microelectronic heat dissipation and microfluidic in the future. Based on the basic principle of electrohydrodynamics, the electrode plate for ion traction pump with various structure and size parameters was designed and fabricated by photoresist method, and assembled into flat-plate micro-pump. The influence of cavity height on the performance of micro-pump is studied by numerical simulation, and the effects of electrode plates with various parameters on the performance of micro-pump are tested and analyzed. The main contents are as follows: (1) the structure design and preparation of electrode plate are as follows: (1) the electrode with various size parameters and graphic structure is designed by orthogonal experiment. The photoresist method is used as the etching method of the electrode pattern, and the FR- 4 epoxy glass fiber cloth copper clad plate is selected as the substrate material of the electrode plate. In order to reduce the corrosion of the electrode during the later experiment, gold plating layer was formed on the surface of the electrode by adding the gold deposition process in the fabrication process. The size and error of electrode structure after fabrication were evaluated by four parameters, such as line width of comb, distance between electrode edges, radius of arc at the point of convex point and depth of cutting. (2) study on the voltage-current relationship of electrode plate in dielectric liquid according to the potential danger of easy explosion of pump body and volatilization of acetone working fluid, the experimental platform with high safety performance can be built independently. The voltage-current relationship (U-I relationship) of electrode plates with different structure parameters was tested on an experimental platform. The law of current variation under different voltages is summarized and analyzed. In addition, the influence of comb linewidth, edge spacing and convex structure on the voltage-current relationship (U-I) is also studied. (3) numerical simulation of the simplified model of ion-traction micro-pump the numerical model of ion-traction pump is simplified according to the repeatability of the structure of ion-traction micro-pump. The numerical solution is carried out by using COMSOL Multiphysics software. Three sets of equations are solved by using electric field control equation, charge transfer equation and fluid control equation, and the numerical solution is realized by using electrostatic field, thin matter transfer and laminar flow module and their coupling in COMSOL software. In addition, the numerical results are compared with the experimental results, and the trend of the results is consistent. Through the analysis of the numerical results, it is found that the height of the micro-pump cavity has the optimal value, and it is also shown that the modeling method of using the thin material transfer process instead of the ion implantation process in the dielectric liquid is feasible. (4) the structure of the flat-plate micro-pump is designed by the influence of the electrode structure on the performance of the micro-pump. At the same time, the flow rate and pump pressure testing device which can meet the requirements of the test precision is designed. The calculation method of flow rate and pump pressure conversion is explained. The effects of electrode edge spacing, linewidth, convex structure and Joule heat on the flow rate and pump pressure of micropump are analyzed. Among the parameters, the linewidth of the comb wire has the most obvious influence on the dynamic effect of the micro-pump, and the larger the width of the comb line, the greater the flow rate and the higher pump pressure. In addition, the weakening effect of Joule heat on the dynamic effect of the micro-pump is also studied.
【學(xué)位授予單位】：華南理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：TH38

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