【摘要】：隨著微機(jī)電系統(tǒng)技術(shù)的發(fā)展，壓電泵憑借其結(jié)構(gòu)簡(jiǎn)單、易于微型化等特點(diǎn)得到了廣泛的研究和應(yīng)用。壓電隔膜泵是眾多壓電泵中最典型的一種，人們通過(guò)先進(jìn)的設(shè)計(jì)理念和制造工藝對(duì)它進(jìn)行優(yōu)化，使壓電隔膜泵的穩(wěn)定性和輸出性能不斷完善和提高。在工業(yè)生產(chǎn)領(lǐng)域中壓電隔膜泵的實(shí)際應(yīng)用日趨廣泛，但是特殊應(yīng)用場(chǎng)合對(duì)壓電隔膜泵的外形尺寸和輸出性能同時(shí)提出了更高的要求。 本文結(jié)合國(guó)家自然科學(xué)基金項(xiàng)目《壓電型氣體隔膜泵設(shè)計(jì)理論與關(guān)鍵技術(shù)研究》的研究，借鑒前期利用共振原理提高壓電隔膜泵輸出性能的研究成果，，并采用較厚的矩形壓電陶瓷制作壓電振子，提高了壓電振子的輸出位移。由矩形壓電振子通過(guò)傳振塊間接驅(qū)動(dòng)泵腔隔膜，簡(jiǎn)化了振動(dòng)系統(tǒng)的結(jié)構(gòu)。 本文根據(jù)矩形壓電陶瓷的橫向振動(dòng)模態(tài)制作兩端固定的矩形壓電振子，基于Ansys的壓電耦合場(chǎng)對(duì)壓電振子的振動(dòng)模態(tài)進(jìn)行了仿真分析。兩端固定的矩形壓電振子與周邊固定的圓形壓電振子相比約束減小，增大了其中心輸出位移，進(jìn)而提高壓電隔膜泵泵腔的容積變化量。矩形基板兩端未粘接壓電陶瓷部分剛度相對(duì)較小而變形大，基板幾何中心粘接陶瓷部分由于剛度較大而變形較小，這樣的結(jié)構(gòu)保護(hù)了陶瓷。通過(guò)實(shí)驗(yàn)研究驅(qū)動(dòng)電壓和工作頻率與矩形壓電振子中心振幅的關(guān)系，分析矩形壓電振子的位移輸出特性。 泵腔結(jié)構(gòu)對(duì)壓電隔膜泵的輸出壓力和流量有直接的影響，本文通過(guò)降低泵腔橫截面積和優(yōu)化隔膜結(jié)構(gòu)來(lái)提高隔膜泵的輸出性能。應(yīng)用板殼理論分析計(jì)算壓電隔膜泵無(wú)負(fù)載情況下隔膜的撓度，并利用matlab計(jì)算泵腔的容積變化量對(duì)隔膜進(jìn)行優(yōu)化設(shè)計(jì)。壓電隔膜泵的輸出性能與隔膜剛度的關(guān)系實(shí)驗(yàn)，驗(yàn)證了相同驅(qū)動(dòng)條件下較小剛度隔膜的振幅較大，在輸出流量和壓力方面有明顯優(yōu)勢(shì)。 為了簡(jiǎn)化壓電隔膜泵的結(jié)構(gòu)，本文選用懸臂梁截止閥。建立懸臂梁閥的振動(dòng)模型，對(duì)閥的開(kāi)度進(jìn)行分析。懸臂梁閥片的運(yùn)動(dòng)近似于單自由度系統(tǒng)在簡(jiǎn)諧激勵(lì)下的振動(dòng)，存在特定的工作頻率使閥的開(kāi)度達(dá)到極大值。壓電隔膜泵的輸出性能與懸臂梁閥的開(kāi)度密切相關(guān)。通過(guò)懸臂梁閥的開(kāi)度實(shí)驗(yàn)研究它的工作狀態(tài)，找到懸臂梁閥的最佳工作頻率，提高壓電隔膜泵的輸出性能。 建立壓電隔膜泵系統(tǒng)的振動(dòng)模型，分析計(jì)算系統(tǒng)的諧振頻率。通過(guò)調(diào)整振動(dòng)系統(tǒng)的質(zhì)量和剛度力求研制一款諧振頻率較低的壓電隔膜泵樣機(jī)。對(duì)共振狀態(tài)下的隔膜泵進(jìn)行泵氣性能測(cè)試，實(shí)驗(yàn)結(jié)果呈現(xiàn)出一個(gè)重要的現(xiàn)象，在懸臂梁閥的最佳工作頻率附近雖然隔膜的振幅在持續(xù)下降，但隔膜泵的流量和輸出壓力卻同時(shí)出現(xiàn)升高。這說(shuō)明懸臂梁閥的最佳工作頻率對(duì)隔膜泵的性能影響是不容忽視的，可以進(jìn)一步調(diào)整隔膜泵的諧振頻率或者改變閥的最佳工作頻率，使兩者接近相等，提高隔膜泵的輸出性能。
[Abstract]:With the development of MEMS technology, piezoelectric pump has been widely studied and applied with its simple structure and easy miniaturization. Piezoelectric diaphragm pump is the most typical one among many piezoelectric pumps. It is optimized by advanced design concept and manufacturing technology, which makes the stability and output performance of piezoelectric diaphragm pump perfect and improve constantly. The practical application of piezoelectric diaphragm pump is becoming more and more extensive in the field of industrial production. However, in special applications, the size and output performance of piezoelectric diaphragm pump are required to be higher at the same time. Based on the research on the design theory and key technology of piezoelectric gas diaphragm pump, which is a project of National Natural Science Foundation of China, this paper draws lessons from the previous research results of improving the output performance of piezoelectric diaphragm pump by using resonance principle. A thick rectangular piezoelectric ceramic is used to fabricate the piezoelectric vibrator, which improves the output displacement of the piezoelectric oscillator. The diaphragm of the pump cavity is indirectly driven by the rectangular piezoelectric vibrator through the vibration transmission block, which simplifies the structure of the vibration system. Based on the transverse vibration modes of rectangular piezoelectric ceramics, rectangular piezoelectric oscillators with fixed ends are fabricated. The vibration modes of piezoelectric oscillators are simulated and analyzed based on the piezoelectric coupling field of Ansys. Compared with the circular piezoelectric vibrator fixed at both ends, the constraint of the rectangular piezoelectric oscillator is reduced, the output displacement of the center is increased, and the volume change of the pump cavity of the piezoelectric diaphragm pump is increased. The stiffness of unbonded piezoelectric ceramic at both ends of rectangular substrate is relatively small and the deformation is large. The relationship between the driving voltage and the working frequency and the amplitude of the center of the rectangular piezoelectric oscillator is studied experimentally, and the displacement output characteristics of the rectangular piezoelectric oscillator are analyzed. The pump cavity structure has direct influence on the output pressure and flow rate of piezoelectric diaphragm pump. In this paper, the output performance of the diaphragm pump is improved by reducing the cross section area of the pump cavity and optimizing the diaphragm structure. The plate and shell theory is used to analyze and calculate the deflection of piezoelectric diaphragm pump without load, and matlab is used to calculate the volume change of pump cavity to optimize the design of diaphragm. The experiment of the relationship between the output performance of piezoelectric diaphragm pump and the diaphragm stiffness proves that the amplitude of the diaphragm with smaller stiffness is larger under the same driving conditions and has obvious advantages in output flow and pressure. In order to simplify the structure of piezoelectric diaphragm pump, the cantilever beam globe valve is selected in this paper. The vibration model of cantilever beam valve was established and the opening of the valve was analyzed. The motion of the valve plate of the cantilever beam is similar to the vibration of the single degree of freedom system under the simple harmonic excitation, and there is a special working frequency to maximize the opening of the valve. The output performance of piezoelectric diaphragm pump is closely related to the opening of cantilever valve. The optimum working frequency of cantilever beam valve is found through the experimental study of the opening of cantilever valve and the output performance of piezoelectric diaphragm pump is improved. The vibration model of piezoelectric diaphragm pump system is established and the resonance frequency of the system is analyzed and calculated. By adjusting the mass and stiffness of vibration system, a prototype of piezoelectric diaphragm pump with low resonant frequency is developed. The pump performance of diaphragm pump in resonant state is tested. The experimental results show an important phenomenon. The amplitude of diaphragm decreases continuously near the optimum working frequency of cantilever valve. However, the diaphragm pump flow and output pressure at the same time increased. This shows that the optimum working frequency of cantilever beam valve can not be ignored and the resonant frequency of diaphragm pump can be further adjusted or the optimum working frequency of valve can be changed so that the two are close to the same and the output performance of diaphragm pump can be improved.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TH323

【參考文獻(xiàn)】

相關(guān)期刊論文 前6條

1 裴先茹;高海榮;;壓電材料的研究和應(yīng)用現(xiàn)狀[J];安徽化工;2010年03期

2 闞君武,楊志剛,程光明;壓電泵的現(xiàn)狀與發(fā)展[J];光學(xué)精密工程;2002年06期

3 謝海峰;吳越;接勐;楊志剛;王興元;;磁力彈簧式壓電共振型氣泵的設(shè)計(jì)[J];光學(xué)精密工程;2012年07期

4 焦小衛(wèi),黃衛(wèi)清,趙淳生;壓電泵技術(shù)的發(fā)展及其應(yīng)用[J];微電機(jī)(伺服技術(shù));2005年05期

5 劉長(zhǎng)庚,周兆英,王曉浩,葉雄英;壓電驅(qū)動(dòng)微型噴霧器的研究[J];壓電與聲光;2001年04期

6 ;Analysis on Flow Field of the Valveless Piezoelectric Pump with Two Inlets and One Outlet and a Rotating Unsymmetrical Slopes Element[J];Chinese Journal of Mechanical Engineering;2012年03期

本文編號(hào)：2340312