【摘要】：掃描探針顯微鏡（SPM）憑借其原子級(jí)的分辨力迅速在表面科學(xué)、材料科學(xué)、生命科學(xué)等研究領(lǐng)域中得到廣泛的應(yīng)用，但是隨著科學(xué)研究和工業(yè)應(yīng)用對(duì)成像范圍、掃描速度等需求的提高，迫切希望SPM性能也隨之提高。本文研究了一種基于微機(jī)電系統(tǒng)（MEMS）技術(shù)的陣列式SPM測(cè)頭，借助靜電梳齒結(jié)構(gòu)的大行程、高線性度、易集成性和陣列式探針的特點(diǎn)，結(jié)合大范圍納米定位平臺(tái)，搭建了大范圍陣列式探針SPM。在提高SPM的掃描效率、擴(kuò)大測(cè)量范圍等方面進(jìn)行了較深入的研究工作。主要工作包括： 1.研究了測(cè)頭的力學(xué)等效模型，推導(dǎo)了測(cè)頭三個(gè)維度上的彈性系數(shù)計(jì)算公式，，并結(jié)合有限元方法進(jìn)行仿真，優(yōu)化測(cè)頭結(jié)構(gòu)的設(shè)計(jì)參數(shù)。設(shè)計(jì)了MEMS陣列式探針SPM測(cè)頭。并合理配置測(cè)頭整體結(jié)構(gòu)三個(gè)維度上的彈性系數(shù)，使測(cè)頭更穩(wěn)定的工作。 2.構(gòu)建了測(cè)頭的電學(xué)模型，并研究了其電學(xué)特性，分析了測(cè)頭針尖所連接的主梁在受力發(fā)生平移和偏轉(zhuǎn)時(shí)，給測(cè)頭電容模型帶來(lái)的非線性影響。分析測(cè)頭在加載靜電場(chǎng)時(shí)的側(cè)向吸合力和懸浮力等。確定了測(cè)頭的掃描模式、極限掃描行程和極限施加電壓。 3.提出了陣列式靜電梳齒結(jié)構(gòu)測(cè)頭的三種工作模式：恒高模式、恒力模式和動(dòng)態(tài)模式。分析三種工作模式的特點(diǎn)。并對(duì)恒高模式和恒力模式進(jìn)行了實(shí)驗(yàn)研究 4.提出了一種利用納米測(cè)量機(jī)和超精密電磁天平快速可溯源的探針彈性系數(shù)標(biāo)定方法。保證了測(cè)頭恒力工作模式的穩(wěn)定性和測(cè)量準(zhǔn)確性。 5.將測(cè)頭與大范圍精密定位測(cè)量平臺(tái)—納米測(cè)量機(jī)結(jié)合，設(shè)計(jì)了陣列式探針SPM。實(shí)驗(yàn)標(biāo)定了測(cè)頭的靈敏度、遲滯性、重復(fù)性、分辨力、低頻振動(dòng)性能等各項(xiàng)參數(shù)。在恒力工作模式下，實(shí)現(xiàn)了多個(gè)探針同時(shí)獨(dú)立地對(duì)一維柵格樣板、二維柵格樣板進(jìn)行掃描成像，證明了測(cè)頭的二維掃描成像能力。通過(guò)對(duì)一維柵格樣品600μm行程的線掃描，驗(yàn)證了測(cè)頭具有一定的大范圍掃描能力。
[Abstract]:The scanning probe microscope (SPM) has been widely used in many fields such as surface science, material science, life science and so on, because of its atomic resolution. With the improvement of scanning speed and other requirements, it is hoped that the performance of SPM will also be improved. In this paper, an array SPM probe based on (MEMS) technology of MEMS is studied. With the help of the characteristics of large stroke, high linearity, easy integration and array probe of electrostatic comb structure, a large range of nanometer positioning platform is developed. A large range of array probe SPM was constructed. In order to improve the scanning efficiency of SPM and expand the measurement range, the research work has been carried out in depth. The main work includes: 1. In this paper, the equivalent mechanical model of the probe is studied, and the calculation formula of elastic coefficient on the three dimensions of the probe is derived, and the design parameters of the probe structure are optimized by using the finite element method. MEMS array probe SPM probe is designed. And reasonable configuration of the overall structure of the probe on the three dimensions of the elastic coefficient, so that the probe more stable work. 2. The electrical model of the probe is constructed and its electrical characteristics are studied. The nonlinear effect of the main beam connected by the probe tip on the capacitance model of the probe is analyzed when the force is shifted and deflected. The lateral suction force and suspension force of the probe under electrostatic field loading are analyzed. The scanning mode, the limit scan stroke and the limit applied voltage of the probe are determined. 3. 3. Three working modes of array electrostatic comb structure probe are proposed: constant height mode, constant force mode and dynamic mode. The characteristics of the three working modes are analyzed. The constant height mode and constant force mode are studied experimentally. A method for calibrating the elastic coefficient of the probe using nanometers and ultra-precision electromagnetic balance is proposed. The stability and accuracy of the constant force working mode of the probe are guaranteed. 5. 5. An array probe SPM was designed by combining the probe with a wide range of precision positioning and measuring platform-nanometers. The sensitivity, hysteresis, repeatability, resolution and low frequency vibration performance of the probe are calibrated experimentally. In the constant force mode, multiple probes are realized to independently scan one dimensional grid template and two dimensional grid template at the same time, which proves the two dimensional scanning imaging ability of the probe. The line scanning of one-dimensional raster sample with 600 渭 m stroke proves that the probe has a certain wide range scanning ability.
【學(xué)位授予單位】：天津大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2013
【分類(lèi)號(hào)】：TH-39;TH742

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