本文選題：類金剛石碳膜 + 陶瓷軸承　； 參考：《哈爾濱工業(yè)大學》2012年碩士論文

【摘要】：微納米尺度的DLC膜廣泛應用于工業(yè)領域，尤其在陶瓷球軸承中起到了有效的減摩抗磨作用。本文運用分子動力學方法和有限元法來研究DLC膜的壓痕和劃擦過程，分析了陶瓷球軸承中微納米DLC膜的力學和摩擦學特性，為微納米DLC膜的分析方法奠定基礎。 分別用Tersoff勢和EAM勢描述氮化硅基體與DLC膜、金屬基體與DLC膜接觸界面的原子間作用力，然后采用蒸汽均勻冷凝的方法生成DLC膜并通過分析截斷半徑、密度和勢函數(shù)對DLC膜屬性的影響，確定合適的模擬條件，為后續(xù)模擬做好準備。 基體對薄膜的力學和摩擦學特性有重要的影響。本文利用分子動力學方法模擬僅受法向力作用下氮化硅和金屬鐵基體上DLC膜的壓痕過程、受法向力和切向力共同作用下無膜和有膜氮化硅的劃擦過程，分析了基體、DLC膜密度、膜厚對壓痕過程的影響以及DLC膜和劃擦深度對劃擦過程的影響，為納米DLC膜在陶瓷軸承中的應用提供理論基礎。 本文最后采用有限元法研究微納米DLC膜的壓痕過程，分析基體材料、膜厚、膜的彈性模量、基體厚度對DLC膜力學特性的影響及膜厚從納米過渡到微米時力學特性的變化規(guī)律，，并與分子動力學模擬的結果進行比較，確定適合微納米DLC膜的分析方法。
[Abstract]:Micro-nano-scale DLC films are widely used in industrial fields, especially in ceramic ball bearings. In this paper, the indentation and scratch process of DLC film are studied by molecular dynamics method and finite element method. The mechanical and tribological properties of DLC film in ceramic ball bearing are analyzed, which lays a foundation for the analysis method of DLC film. Tersoff potential and EAM potential were used to describe the interatomic force between silicon nitride substrate and DLC film and the interface between metal substrate and DLC film respectively. Then the DLC film was formed by steam uniform condensation and the truncation radius was analyzed. The effect of density and potential function on the properties of DLC film was determined, and the suitable simulation conditions were determined to prepare for the subsequent simulation. The substrate plays an important role in the mechanical and tribological properties of the films. In this paper, molecular dynamics method is used to simulate the indentation process of DLC film on silicon nitride and iron substrate under normal force only, and the scrape process of silicon nitride film without film and film under the combined action of normal force and tangential force. The density of DLC film on the substrate is analyzed. The effect of film thickness on indentation process and the effect of DLC film and scratch depth on scratch process provide a theoretical basis for the application of nano-DLC film in ceramic bearings. In the end, the indentation process of DLC film is studied by finite element method. The influence of substrate material, film thickness, elastic modulus of film, substrate thickness on the mechanical properties of DLC film and the change of film thickness from nanometer to micron are analyzed. Compared with the results of molecular dynamics simulation, the analytical method of DLC film was determined.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2012
【分類號】：TH133.3;TB383.2

【參考文獻】

相關期刊論文 前7條

1 肖鵬,馮曉利,李志信;單晶硅薄膜法向熱導率分子動力學研究[J];工程熱物理學報;2002年06期

2 肖鵬,李志信;單晶硅薄膜面向熱導率分子動力學研究[J];工程熱物理學報;2003年06期

3 黃躍飛;張俊杰;周軍暉;;單晶銅薄膜納米壓痕過程的分子動力學模擬[J];機械工程材料;2008年04期

4 曾凡林;孫毅;;納米薄膜潤滑的分子動力學模擬[J];哈爾濱工業(yè)大學學報;2006年09期

5 劉小明;由小川;柳占立;聶君鋒;莊茁;;納米Ni薄膜在摩擦過程中塑性行為的分子動力學模擬[J];金屬學報;2009年02期

6 文玉華,朱如曾,周富信,王崇愚;分子動力學模擬的主要技術[J];力學進展;2003年01期

7 荊翠妮;古樂;張傳偉;唐光澤;王黎欽;;氮化硅陶瓷表面DLC膜的制備及摩擦性能研究[J];潤滑與密封;2010年09期

相關博士學位論文 前2條

1 盆洪民;微構件納米切削過程及其力學特性的多尺度模擬研究[D];哈爾濱工業(yè)大學;2011年

2 張俊杰;基于分子動力學的晶體銅納米機械加工表層形成機理研究[D];哈爾濱工業(yè)大學;2011年

本文編號：2041792