本文選題：氣浮墊 + 高剛度　； 參考：《西安工業(yè)大學》2011年碩士論文

【摘要】：精密、超精密技術的發(fā)展日益進步,對氣浮墊的剛度、精度及穩(wěn)定性都提出更高的要求。由于氣體的可壓縮性,對提高氣浮墊性能的研究帶來很大的困難,因此,研究氣浮墊的剛度及穩(wěn)定性是氣浮墊研究領域的難點問題。 本課題組在前期通過用彈性薄板來實現(xiàn)可變均壓槽、可變節(jié)流器復合作用的方法對新型氣浮墊進行研究,并發(fā)現(xiàn)用彈性薄板來實現(xiàn)可變均壓槽的結構的氣浮墊,其在靜態(tài)性能(即剛度和承載力)上明顯要強過剛性均壓槽氣浮墊。 本文所研究氣浮墊是以工程應用為最終目的來研究的,在此基礎上本論文選擇以彈性均壓槽氣浮墊作為研究內容,提出對彈性均壓槽氣浮墊動態(tài)性能進行研究,并比較彈性均壓槽氣浮墊和剛性均壓槽氣浮墊的動態(tài)性能,為氣浮墊的動力學研究和穩(wěn)定性研究提供有力的數(shù)據(jù)依據(jù)。由于氣浮墊通常工作在低速狀態(tài)下,此時氣浮墊的動態(tài)剛度和靜態(tài)剛度大小基本相等,所以本文只需研究其阻尼系數(shù)變化即可。本文首先介紹了氣浮墊的工作原理,并利用ANSYS仿真軟件對氣浮墊彈性變形情況和氣腔槽寬變化情況進行了一定研究與探索,得到氣腔槽寬規(guī)律性結論,為氣浮墊的結構設計提供參考數(shù)據(jù)。其次,推導并化簡了適宜于上述氣浮墊的動態(tài)雷諾方程,隨后使用FLUENT軟件對穩(wěn)態(tài)方程進行求解,并將解得的壓力分布數(shù)據(jù)和前人用MATLAB求得的數(shù)據(jù)進行對比確認,以此來保證求解數(shù)據(jù)的真實性和正確性,隨后又對瞬態(tài)方程求解進行初步的探索與研究。最后,在現(xiàn)有的實驗臺上對新型氣浮墊的阻尼系數(shù)進行測試,測量了氣膜厚度及其對應的載荷,并對實驗臺的工作原理、使用方法和實驗數(shù)據(jù)的處理進行了深入研究,并將彈性均壓槽氣浮墊和剛性均壓槽氣浮墊的實驗結果進行了對比分析,從實驗上證明了彈性均壓槽氣浮墊動態(tài)阻尼系數(shù)高于剛性均壓槽氣浮墊,得出彈性均壓槽氣浮墊穩(wěn)定性高的結論。
[Abstract]:With the development of precision and ultra-precision technology, the stiffness, precision and stability of air cushion are required more and more. Because of the compressibility of gas, it is difficult to improve the performance of air cushion. The research on the stiffness and stability of air cushion is a difficult problem in the field of air floatation. It is also found that the flexible thin plate is used to realize the air floatation cushion of the structure of the variable equalizing pressure slot. The static performance (i.e. stiffness and bearing capacity) of the gasket is obviously stronger than that of the over-rigid uniform pressure tank air floatation cushion, which is studied in this paper for the final purpose of engineering application. On the basis of this, this paper chooses the elastic equal pressure trough air floatation cushion as the research content, puts forward the research on the dynamic performance of the elastic equal pressure trough air floating pad, and compares the dynamic performance of the elastic equal pressure trough air floating pad with the rigid equal pressure trough air floating pad. It provides a powerful data basis for the dynamic and stability study of air cushion. Because the air cushion usually works at low speed, the dynamic stiffness and the static stiffness of the air cushion are basically equal, so we only need to study the change of damping coefficient in this paper. In this paper, the working principle of air cushion is introduced, and the elastic deformation of air cushion and the change of air cavity width are studied and explored by ANSYS simulation software, and the regular conclusion of air chamber groove width is obtained. It provides reference data for the structure design of air cushion. Secondly, the dynamic Reynolds equation is deduced and simplified, and the steady state equation is solved by fluent software, and the pressure distribution data obtained by MATLAB are compared with those obtained by MATLAB. In order to ensure the authenticity and correctness of the solution data, the transient equation solution is explored and studied. Finally, the damping coefficient of the new type of air cushion is tested on the existing test bench, the thickness of the film and its corresponding load are measured, and the working principle, using method and the processing of the experimental data are deeply studied. The experimental results of elastic equal pressure tank air floating pad and rigid uniform pressure tank air floating pad are compared and analyzed. The experimental results show that the dynamic damping coefficient of the elastic equal pressure tank air floating pad is higher than that of the rigid uniform pressure tank air floating pad. It is concluded that the stability of the air cushion is high.
【學位授予單位】：西安工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2011
【分類號】：TH133.35

【參考文獻】

相關期刊論文 前10條

1 劉承烈;;日本在超精密加工機床上應用空氣軸承的現(xiàn)況[J];光學機械;1984年02期

2 陳明,徐建民;應用邊界元法研究小孔節(jié)流空氣靜壓徑向軸承的運動精度[J];哈爾濱工業(yè)大學學報;1990年02期

3 康偉;張家忠;劉雁;任晟;;氣體動壓軸承-轉子動力系統(tǒng)穩(wěn)定性及分岔[J];航空動力學報;2007年09期

4 宋世璋;;空氣靜壓軸承數(shù)學模型的建立[J];機床與液壓;1989年01期

5 潘晉;徐豐仁;沈釗;;精密工作臺氣體靜壓軸承的有限元分析[J];機床與液壓;1989年06期

6 居冰峰,陳子辰,邱忠宇;空氣靜壓軸承主動控制技術的研究[J];機電工程;1997年06期

7 張文豪;廖波;劉波;張君安;;彈性均壓槽空氣靜壓推力軸承的實驗研究[J];機械工程師;2008年03期

8 張君安;方宗德;;空氣靜壓軸系支承的數(shù)值分析[J];機械科學與技術;2008年07期

9 王元勛,陳爾昌,師漢民,陳日曜,李春植;主動控制節(jié)流氣體潤滑軸承靜動態(tài)特性研究[J];機械工程學報;1999年03期

10 張君安;張文豪;廖波;劉波;;具有可變均壓槽的氣體靜壓推力軸承性能研究[J];摩擦學學報;2009年04期

相關博士學位論文 前1條

1 張君安;高剛度空氣靜壓軸承研究[D];西北工業(yè)大學;2006年

相關碩士學位論文 前1條

1 彭萬歡;靜壓氣體徑向軸承的靜動特性研究[D];中國工程物理研究院;2006年

，

本文編號：1997835