本文選題：MEMS + 微平板�。� 參考：《力學(xué)學(xué)報(bào)》2016年04期

【摘要】：微機(jī)電系統(tǒng)(micro-electro-mechanical system,MEMS)是指內(nèi)部微結(jié)構(gòu)尺寸在微米甚至納米量級(jí)的微電子機(jī)械裝置,是一個(gè)獨(dú)立的智能系統(tǒng).長(zhǎng)寬厚均處于微米量級(jí)的微平板為MEMS中的典型結(jié)構(gòu),其聲學(xué)和力學(xué)特性直接影響MEMS的性能.針對(duì)同時(shí)受聲壓激勵(lì)和氣膜力(通過考慮相同尺寸微平板振動(dòng)引入)作用的四邊簡(jiǎn)支微平板結(jié)構(gòu),應(yīng)用Cosserat理論和Hamilton原理,建立了考慮微尺度效應(yīng)(本征長(zhǎng)度和Knudsen數(shù))影響的聲振耦合理論模型,并通過多重Fourier展開法求解了耦合方程,得到了系統(tǒng)的傳聲損失結(jié)果.通過頻域分析,考慮微平板的不同振動(dòng)頻率、振動(dòng)幅度和板間距,系統(tǒng)研究了不同尺度效應(yīng)下微結(jié)構(gòu)中氣體薄膜所產(chǎn)生的阻尼力對(duì)微平板結(jié)構(gòu)傳聲特性的影響.研究發(fā)現(xiàn)尺度效應(yīng)對(duì)于微結(jié)構(gòu)的聲振特性影響巨大,振動(dòng)行為對(duì)微結(jié)構(gòu)的傳聲特性也有很大影響,控制并減小微平板的振動(dòng)幅度以及增大微平板的間距都能夠提高微平板的聲振性能.研究結(jié)果為MEMS中微平板的穩(wěn)定性優(yōu)化設(shè)計(jì)提供了理論參考.
[Abstract]:Micro-electro-mechanical system (MEMS) is an independent intelligent system, which refers to micro-electromechanical devices with internal microstructures in the order of micron or even nanometers. The microplate with length, width and thickness in the order of micron is a typical structure in MEMS. Its acoustic and mechanical properties directly affect the performance of MEMS. In this paper, the Cosserat theory and Hamilton principle are applied to the four-side simply supported micro-plate structure, which is subjected to sound pressure excitation and film force (by considering the vibration of the same size microplate). A theoretical model of acousto-vibration coupling considering the effect of microscale effect (intrinsic length and Knudsen number) is established. The coupling equation is solved by the method of multiple Fourier expansion, and the result of sound transmission loss is obtained. Based on the frequency domain analysis, considering the different vibration frequencies, vibration amplitude and plate spacing, the influence of damping force produced by the gas film on the sound transmission characteristics of the microplate structure is systematically studied under different scale effects. It is found that the scale effect has a great influence on the acoustic and vibration characteristics of the microstructures, and the vibration behavior also has a great influence on the sound transmission characteristics of the microstructures. Controlling and reducing the vibration amplitude of micro plate and increasing the spacing of micro plate can improve the acoustic vibration performance of micro plate. The results provide a theoretical reference for the stability optimization design of microplates in MEMS.
【作者單位】： 西安交通大學(xué)航天航空學(xué)院多功能材料與結(jié)構(gòu)教育部重點(diǎn)實(shí)驗(yàn)室;西安交通大學(xué)航天航空學(xué)院機(jī)械結(jié)構(gòu)強(qiáng)度與振動(dòng)國(guó)家重點(diǎn)實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金(5152850) 中央高校基本科研專項(xiàng)基金(2014qngz12) 國(guó)家留學(xué)基金資助項(xiàng)目
【分類號(hào)】：TH-39;TH113.1
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本文編號(hào)：1949225