本文關(guān)鍵詞：加工表面幾何誤差對(duì)光學(xué)性能的影響　出處：《吉林大學(xué)》2012年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 表面幾何誤差 光學(xué)性能 光線追跡 Zernike多項(xiàng)式擬合 Harvey-Shack散射理論

【摘要】：自由曲面是指沒有任何回轉(zhuǎn)對(duì)稱性的光學(xué)曲面，是非球面發(fā)展的高階形式，應(yīng)用自由曲面的光學(xué)系統(tǒng)結(jié)構(gòu)簡化、重量輕、有更加優(yōu)異的光學(xué)性能。隨著光電子儀器要求的提高，光學(xué)系統(tǒng)已由球面和非球面光學(xué)向自由曲面光學(xué)方向發(fā)展，自由曲面加工技術(shù)快速發(fā)展。然而由于加工過程中各種因素的影響，光學(xué)加工表面幾何誤差不可避免，進(jìn)而影響光學(xué)零件、光學(xué)系統(tǒng)的光學(xué)性能，因此開展加工表面幾何誤差對(duì)光學(xué)性能影響的研究就十分必要。 本文研究光學(xué)零件加工表面的面形誤差與表面粗糙度對(duì)光學(xué)性能的影響，其數(shù)據(jù)是從恒徑向進(jìn)給仿真加工所得到的表面形貌數(shù)據(jù)中、應(yīng)用小波分析方法分離出來的。以加工表面只有面形誤差的光學(xué)零件為模型，用波像差、調(diào)制傳遞函數(shù)和點(diǎn)擴(kuò)散函數(shù)為評(píng)價(jià)指標(biāo)，研究面形誤差對(duì)光學(xué)性能的影響；以只有粗糙度的加工表面為模型，用基于Harvey-Shack散射理論的散射表面?zhèn)鬟f函數(shù)和點(diǎn)擴(kuò)散函數(shù)為評(píng)價(jià)指標(biāo)，研究表面粗糙度對(duì)光學(xué)性能的影響。 在分析面形誤差對(duì)光學(xué)性能影響的過程中，為與波像差的經(jīng)典定義區(qū)分，將經(jīng)過已加工光學(xué)零件后的實(shí)際波面與經(jīng)過設(shè)計(jì)的光學(xué)零件后的理想波面之間的偏離定義為波像差增量。利用光線追跡的方法求解含有不同面形誤差光學(xué)零件的波像差及其增量，分析面形誤差對(duì)波像差的影響；用Zernike多項(xiàng)式擬合波像差，利用Zernike多項(xiàng)式擬合系數(shù)與Seidel像差的對(duì)應(yīng)關(guān)系，分析面形誤差對(duì)Seidel像差的影響。用兩次傅里葉變換法計(jì)算含有不同面形誤差光學(xué)零件的光學(xué)傳遞函數(shù)，在此過程中點(diǎn)擴(kuò)散函數(shù)也已求出，分析面形誤差對(duì)點(diǎn)擴(kuò)散函數(shù)與調(diào)制傳遞函數(shù)的影響。面形誤差越大，波像差及其增量均變大，不同波像差擬合系數(shù)對(duì)應(yīng)的Seidel像差變化規(guī)律不同；面形誤差使像面能量分布發(fā)生變化，使成像質(zhì)量降低。 表面粗糙度使光透過光學(xué)零件時(shí)發(fā)生散射，本文基于Harvey-Shack散射理論，假設(shè)粗糙表面隨機(jī)、且高度服從高斯分布，在此基礎(chǔ)上分析表面粗糙度對(duì)光學(xué)性能的影響。粗糙表面數(shù)據(jù)由不同進(jìn)給量仿真加工的表面形貌數(shù)據(jù)分離得到，計(jì)算其相應(yīng)的方差及在X軸方向、Y軸方向的相關(guān)長度，用粗糙表面高度分布方差與相關(guān)長度描述加工表面的粗糙程度。計(jì)算不同進(jìn)給量所得到加工表面的散射表面?zhèn)鬟f函數(shù)及點(diǎn)擴(kuò)散函數(shù)，分析粗糙度對(duì)散射表面?zhèn)鬟f函數(shù)、點(diǎn)擴(kuò)散函數(shù)的影響。分析表明，粗糙度越大，，像面能量越分散，光學(xué)零件的成像質(zhì)量越低。
[Abstract]:Free-form surface is an optical surface without any rotational symmetry. It is a high-order form of aspherical development. The optical system with free-form surface is simplified and light in weight. With the improvement of optoelectronic instruments, optical system has been developed from spherical and aspherical optics to free-form surface optics. The free-form surface machining technology is developing rapidly. However, due to the influence of various factors in the process of machining, the geometric error of optical machining surface is inevitable, which further affects the optical properties of optical parts and optical systems. Therefore, it is necessary to study the effect of geometric errors on optical properties of machined surfaces. The effect of surface shape error and surface roughness of optical parts on optical properties is studied in this paper. The data are obtained from constant radial feed simulation machining. The optical parts with only surface error are used as the model, the wavefront aberration, the modulation transfer function and the point diffusion function are used as the evaluation indexes. The influence of surface shape error on optical performance is studied. Taking the machined surface with only roughness as the model, the scattering surface transfer function and the point diffusion function based on the Harvey-Shack scattering theory are used as the evaluation indexes. The effect of surface roughness on optical properties is studied. In the process of analyzing the effect of surface shape error on optical performance, it is distinguished from the classical definition of wave aberration. The deviation between the actual wavefront of the processed optical part and the ideal wave surface of the designed optical part is defined as the wave aberration increment. The method of ray tracing is used to solve the optical parts with different shape errors. Wave aberration and its increment. The influence of surface shape error on wave aberration is analyzed. The wavefront aberration is fitted with Zernike polynomial and the corresponding relation between Seidel aberration and Zernike polynomial fitting coefficient is used. The influence of surface shape error on Seidel aberration is analyzed. The optical transfer function of optical parts with different surface errors is calculated by using the twice Fourier transform method, and the point diffusion function has also been obtained in the process. The effect of plane shape error on point diffusion function and modulation transfer function is analyzed. The larger the plane shape error is, the larger the wavefront aberration and its increment are, and the variation law of Seidel aberration is different according to the fitting coefficient of different wave aberration. The shape error changes the energy distribution of the image plane and reduces the imaging quality. Surface roughness causes light scattering when it passes through optical parts. Based on Harvey-Shack scattering theory, the rough surface is assumed to be random and the height is distributed from Gao Si. On this basis, the influence of surface roughness on optical properties is analyzed. The rough surface data are separated from the surface morphology data of different feed simulation machining, and the corresponding variance and X axis direction are calculated. The correlation length of Y axis is used to describe the roughness of the machined surface with the variance of the height distribution of rough surface and the correlation length. The scattering surface transfer function and point diffusion function of the machined surface are obtained by calculating the different feed rates. The effect of roughness on the scattering surface transfer function and point diffusion function is analyzed. It is shown that the higher the roughness is, the more dispersed the image energy is, and the lower the imaging quality of the optical parts is.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2012
【分類號(hào)】：TH161

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