本文選題：噴墨打印　切入點(diǎn)：氣體傳感器　出處：《傳感技術(shù)學(xué)報》2017年04期

【摘要】：噴墨打印技術(shù)具有無需掩膜圖形化、室溫加工、方便操作等優(yōu)點(diǎn)。利用噴墨打印技術(shù)在微熱板上打印SnO_2多孔薄膜。根據(jù)打印機(jī)的定位精度和微熱板的懸空尺寸設(shè)計了打印圖形,根據(jù)目標(biāo)厚度確定打印層數(shù),以及打印后的干燥工藝參數(shù);通過掃描電鏡對薄膜結(jié)構(gòu)進(jìn)行微觀表征,敏感薄膜表面平整,成膜均勻;最后對其進(jìn)行氣敏測試,當(dāng)微熱板工作在250℃時,打印的SnO_2氣敏薄膜對乙醇有良好的響應(yīng),檢測到最低乙醇濃度為0.5×10~(-6),響應(yīng)和恢復(fù)時間均在3 s左右。
[Abstract]:The ink jet printing technology has the advantages of no mask graphics, room temperature processing, easy operation and so on. The printing pattern is designed according to the positioning accuracy of printer and the hanging size of micro hot plate, using inkjet printing technology to print SnO_2 porous film on the micro hot plate. According to the target thickness, the number of printing layers and the drying process parameters after printing are determined. The microstructure of the film is characterized by scanning electron microscope. The surface of the sensitive film is flat and the film is even. Finally, the gas sensing test is carried out. When the micro-hot plate is working at 250 鈩，

本文編號：1688870