發(fā)布時(shí)間：2018-10-21 09:16

【摘要】：微坑陣列可以改善摩擦副表面的摩擦磨損性能,減小摩擦力,降低磨損,提高摩擦副的使用壽命。微坑陣列的大面積、高精度加工技術(shù)成為一個(gè)研究重點(diǎn)。光刻電解加工技術(shù)是微坑陣列的一種有效加工方法。傳統(tǒng)的光刻電解加工技術(shù)采用光刻膠作為掩模,光刻工藝復(fù)雜;電解加工后需要去除光刻膠,生產(chǎn)成本高,制作時(shí)間長(zhǎng)。由于陽(yáng)極工件表面的電場(chǎng)邊緣效應(yīng),微坑陣列的大面積電解加工時(shí),存在加工精度低等問(wèn)題。針對(duì)上述問(wèn)題,本文采用基于PDMS柔性模板的光刻電解加工方法進(jìn)行微坑陣列的大面積、高精度加工。本文完成的研究?jī)?nèi)容主要包含以下部分:(1)采用抽真空注模的方式制作PDMS模板。提出采用電火花線切割技術(shù)制備不銹鋼微群柱模具,并基于此模具制作出PDMS模板。采用一種改進(jìn)的雙層SU-8膠光刻工藝制備光刻膠模具,所制作的模板直徑達(dá)90 mm,適用于微坑陣列的大面積加工。(2)提出一種微坑陣列的高壓低流速電解加工方法。PDMS模板上方的電解液處于高壓低流速狀態(tài),利用電解液的壓力和重力促使PDMS模板與工件緊密貼合。試驗(yàn)研究了加工電壓、時(shí)間、占空比對(duì)微坑形貌的影響。試驗(yàn)結(jié)果表明,微坑內(nèi)電解產(chǎn)物的堆積可以抑制電場(chǎng)邊緣效應(yīng),微坑尺寸對(duì)一定范圍內(nèi)的電壓變化不敏感。占空比是影響微坑尺寸的重要因素,高占空比的電流效率低。試驗(yàn)加工出圓形陣列區(qū)域?yàn)橹睆?0mm的微坑,微坑的邊長(zhǎng)和深度分別是94.6和18.8μm,標(biāo)準(zhǔn)差分別為0.84和0.23μm,實(shí)現(xiàn)了微坑陣列的大面積、高精度電解加工。(3)提出一種基于高壓靜液的電解加工方法。電解加工過(guò)程中,電解液處于高壓強(qiáng)靜止?fàn)顟B(tài),抑制了電解產(chǎn)物的逸出,同時(shí)提高PDMS模板與工件的貼合度。試驗(yàn)研究表明高壓強(qiáng)的電解液有助于提高微坑尺寸的光刻電解加工精度,而且壓強(qiáng)為0.5 MPa的電解液適用于微坑陣列的高精度電解加工。(4)開(kāi)展微坑陣列的大面積高精度電解加工應(yīng)用。采用PDMS模板在通孔工件表面進(jìn)行微坑陣列的電解加工,制備出高精度的微坑陣列。采用高壓靜液的方式,在回轉(zhuǎn)體表面進(jìn)行微坑陣列的電解加工。
[Abstract]:The microcrater array can improve the friction and wear performance of the friction pair, reduce the friction force, reduce the wear, and improve the service life of the friction pair. The large-area and high-precision machining technology of microcrater array has become a research focus. Photolithography is an effective method for machining microcrater arrays. The traditional ECM technology uses photoresist as mask, and the lithography process is complex. After ECM, the photoresist needs to be removed, the production cost is high and the production time is long. Due to the electric field edge effect on the surface of anode workpiece, the machining accuracy is low in the large area ECM of microcrater array. In order to solve the above problems, this paper adopts PDMS flexible template based lithography electrolysis machining method for large area and high precision machining of microcrater array. The main contents of this paper are as follows: (1) PDMS template is fabricated by vacuum injection. A stainless steel micro group column die was fabricated by WEDM, and PDMS template was made based on the die. An improved double-layer SU-8 lithography process was used to prepare the photoresist mould. The template diameter of 90 mm, is suitable for large area machining of microcrater array. (2) A high voltage and low velocity ECM method for microcrater array is proposed. The electrolyte above the PDMS template is in the state of high pressure and low velocity. The pressure and gravity of the electrolyte are used to make the PDMS template fit closely with the workpiece. The effects of processing voltage, time and duty ratio on the morphology of micropits were investigated. The experimental results show that the accumulation of electrolytic products in the microcrater can suppress the electric field edge effect and the size of the microcrater is not sensitive to the voltage change in a certain range. Duty cycle is an important factor affecting the size of microcrater, and the current efficiency of high duty cycle is low. Micropits with diameter 40mm in circular array region were fabricated. The side length and depth of micropits were 94.6 渭 m and 18.8 渭 m, respectively, and the standard deviations were 0.84 渭 m and 0.23 渭 m, respectively. A large area of microcrater array was realized. High precision ECM. (3) A method based on high pressure hydrostatic machining is proposed. In the process of ECM, the electrolyte is in a static state at high pressure, which inhibits the escape of the electrolysis product and improves the adhesion between the PDMS template and the workpiece. The experimental results show that the high pressure electrolyte is helpful to improve the precision of lithography with microcrater size. The electrolyte with a pressure of 0. 5 MPa is suitable for high precision ECM of microcrater array. (4) the application of large area and high precision ECM of microcrater array is carried out. The PDMS template was used to fabricate the high precision microcrater array by electrolytic machining of the through hole workpiece surface. Electrochemical machining of microcrater array was carried out on the surface of rotary body by high pressure hydrostatic method.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TG662

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