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直流磁控濺射沉積N-Ti-TiN鍍膜耐蝕性能

發(fā)布時間:2018-09-14 10:32
【摘要】:通過固定N層和Ti N層的沉積時間,改變Ti層沉積時間,在AZ31鎂合金表面采用直流磁控濺射技術制備N-Ti-Ti N鍍膜,研究鍍鈦時間對N-Ti-Ti N鍍膜的形貌、腐蝕性能的影響。利用掃描電鏡(SEM)、能譜儀等手段分析鍍膜的表面形貌和成分,通過動電位極化試驗,研究鍍膜的耐蝕性。結果表明:改變不同鍍鈦時間獲得的N-Ti-Ti N鍍膜的厚度在1~1.4μm之間,鍍膜分布均勻,隨著鍍鈦膜沉積時間的增加鍍膜的厚度增加,膜間結合性好;與鎂合金基體相比,不同鍍鈦時間的N-Ti-Ti N鍍膜均能提高材料的耐蝕性,鍍鈦時間為20 min的N-Ti-Ti N鍍膜的耐蝕性更為優(yōu)異。
[Abstract]:By changing the deposition time of Ti layer by fixed N layer and Ti N layer, N-Ti-Ti N coating was prepared on AZ31 magnesium alloy surface by DC magnetron sputtering. The influence of titanium plating time on the morphology and corrosion property of N-Ti-Ti N coating was studied. The surface morphology and composition of the coating were analyzed by means of scanning electron microscope (SEM) (SEM), spectrometer. The corrosion resistance of the coating was studied by potentiodynamic polarization test. The results show that the thickness of N-Ti-Ti N coating is between 11. 4 渭 m and 11. 4 渭 m, and the film distribution is uniform. With the increase of the deposition time of titanium film, the adhesion of N-Ti-Ti N film is better than that of magnesium alloy substrate. The corrosion resistance of N-Ti-Ti N coating with different titanium plating time was improved, and the corrosion resistance of N-Ti-Ti N coating with 20 min titanium plating time was better than that of N-Ti-Ti N coating.
【作者單位】: 佳木斯大學黑龍江省高校生物醫(yī)學材料重點實驗室;
【基金】:國家自然科學基金項目(31370979) 黑龍江省高校生物醫(yī)學材料重點實驗室2012年度開放課題(YX12002) 佳木斯大學科學技術面上項目(L2013-073);佳木斯大學大學生科技創(chuàng)新項目(XSlz2016-06)
【分類號】:TG174.4


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