【摘要】：在航空、航天、能源、機(jī)械和冶金等工程領(lǐng)域中,有許多材料(部件)因固體粒子沖蝕磨損導(dǎo)致失效。特別是隨著航空航天等高新技術(shù)行業(yè)的日益發(fā)展,傳統(tǒng)的結(jié)構(gòu)材料難以滿足抗砂粒沖蝕的要求。利用氣相沉積技術(shù)在工程部件表面制備防護(hù)涂層是解決該難題的有效途徑之一。國(guó)外已有將該氣相沉積抗沖蝕硬質(zhì)薄膜應(yīng)用于航空發(fā)動(dòng)機(jī)壓氣機(jī)部件的報(bào)道。但我國(guó)在這方面起步晚,研究不系統(tǒng),特別是表現(xiàn)在對(duì)硬質(zhì)膜層的抗沖蝕行為和失效機(jī)理缺乏理論指導(dǎo);還沒完全弄清楚膜層對(duì)基體材料疲勞性能的影響等。本文采用陰極電弧離子鍍技術(shù)制備了Ti-TiN-Zr-ZrN軟硬交替抗沖蝕多層膜,并系統(tǒng)研究了多層膜微觀結(jié)構(gòu)、殘余應(yīng)力和主要性能評(píng)價(jià)。得出以下結(jié)果:1)在多層膜厚度相當(dāng)條件下,隨著周期數(shù)的增加,單一周期變薄,多層膜的表面光潔度和平整度、硬度、結(jié)合力及抗砂粒沖刷性能均有明顯提升,而殘余應(yīng)力則呈降低趨勢(shì);隨著鈦基與鋯基調(diào)制比(RTi/TiN:RZr/ZrN)的下降,殘余應(yīng)力呈增大的趨勢(shì),結(jié)合力也有所下降,硬度略有增加,而抗砂粒沖刷性能變化不明顯;隨著金屬與金屬氮化物調(diào)制比(RMe:RMeN)的增加,多層膜硬度有所下降,而結(jié)合力及抗砂粒沖刷性能變化不明顯。本試驗(yàn)Ti-TiN-Zr-ZrN多層膜的優(yōu)化工藝為每周期約(200~300)nm,金屬與金屬氮化物調(diào)制比RMe:RMe N=1:6,鈦基與鋯基調(diào)制比RTi/TiN:RZr/ZrN=2:1。增加多層膜厚度,殘余應(yīng)力穩(wěn)定在一定水平,結(jié)合力則由于支撐強(qiáng)度的增加而呈上升趨勢(shì),當(dāng)膜厚達(dá)到某一值(本試驗(yàn)為7.54μm)后,硬度基本穩(wěn)定在30GPa以上。2)Ti-TiN-Zr-ZrN多層膜對(duì)基體材料有良好的抗砂粒沖蝕保護(hù)作用,增加厚度,多層膜抗砂粒沖蝕的能力增強(qiáng),并且低沖蝕角(30°)保護(hù)作用明顯優(yōu)于高沖蝕角(90°)。TC11鈦合金的砂粒沖蝕磨損機(jī)理屬于塑性材料沖蝕機(jī)制,即在低沖蝕角條件下主要是砂粒的切削或犁削作用;而在高沖蝕角時(shí)則是材料因受砂粒沖擊產(chǎn)生塑性變形后導(dǎo)致加工硬化,最終出現(xiàn)疲勞斷裂剝落。Ti-TiN-Zr-ZrN軟硬交替多層膜的沖蝕磨損機(jī)理為在應(yīng)力集中區(qū)或液滴脫落坑萌生裂紋源并沿縱向擴(kuò)展,當(dāng)裂紋擴(kuò)展到金屬軟層時(shí)應(yīng)力得到緩沖吸收,從而使裂紋擴(kuò)展方向改變?yōu)檠仄叫杏趯娱g界面橫向擴(kuò)展,當(dāng)裂紋之間擴(kuò)展相連時(shí),部分膜層便從多層膜中片狀分離出來,造成磨損,作者依此建立了軟硬交替多層膜沖蝕失效機(jī)理模型。3)Ti-Ti N-Zr-ZrN多層膜經(jīng)300℃和500℃熱沖擊50次循環(huán)后,膜層保持完好,沒有裂紋、起泡和剝落,只發(fā)生表面氧化而產(chǎn)生顏色加深及顆粒脫落現(xiàn)象,說明多層膜能夠有效地保護(hù)基體材料。在600℃熱沖擊10次循環(huán)后試樣表面均出現(xiàn)膜層因氧化而粉未化和裂紋擴(kuò)展而分層剝落,膜層已經(jīng)開始失效。600℃熱沖擊50次循環(huán)后,厚度約10μm的Ti-TiN-Zr-ZrN多層膜已經(jīng)完全失效,而厚度約20μm的Ti-TiN-Zr-ZrN多層膜仍未完全失效。因此,本試驗(yàn)所制備厚度10μm的Ti-TiN-Zr-ZrN多層膜使用溫度≤500℃。4)TC11材料經(jīng)鍍Ti-TiN-Zr-ZrN后疲勞極限由440MPa提高至470MPa,提高了6.8%。應(yīng)力-疲勞壽命關(guān)系(S-N曲線)表明,在應(yīng)力水平低于570MPa時(shí),多層膜提高了TC11基材疲勞壽命,但當(dāng)應(yīng)力水平高于570MPa時(shí),多層膜反而降低了TC11基材的疲勞壽命。對(duì)于TC11基材,裂紋源一般萌生于表面缺陷處,且裂紋源數(shù)量隨應(yīng)力水平升高而增多,斷裂形式是韌性和解理混合型斷裂。TC11經(jīng)鍍多層膜后,膜層覆蓋基材表面缺陷,在應(yīng)力水平小于570MPa時(shí),樣品只有單一裂紋源,同時(shí)軟硬交替調(diào)制結(jié)構(gòu)的多層膜緩沖了裂紋的擴(kuò)展,從而提高了試樣的的疲勞壽命;在應(yīng)力水平超過570MPa后,樣品有多個(gè)裂紋源,多層膜破損嚴(yán)重,從而降低了疲勞壽命,斷裂形式也是韌性和解理混合型斷裂。5)在同一工藝條件下,基體材料表面粗糙度對(duì)多層膜性能的影響很大:降低基體表面粗糙度,有利于改善膜/基結(jié)合力、抗沖刷能力和耐腐蝕性能。為了獲得良好的膜層綜合應(yīng)用性能,待表面處理目標(biāo)工件的表面粗糙度必須控制在Ra0.40μm。
[Abstract]:In the fields of aviation, aerospace, energy, machinery and metallurgy, there are many materials (components) caused by erosion and wear of solid particles. Especially with the development of high and new technology industries such as aeronautics and Astronautics, traditional structural materials are difficult to meet the requirement of abrasive erosion. The protective coating is one of the effective ways to solve this problem. There has been a report on the application of the anti erosion hard film to the aero engine compressor components in foreign countries. However, our country is late in this field, and the research is not systematic, especially in the lack of theoretical guidance on the anti erosion behavior and failure mechanism of the hard film; it has not been completely clarified. The effect of the Chu film layer on the fatigue property of the matrix material. In this paper, the Ti-TiN-Zr-ZrN soft and hard alternating anti erosion multilayer film was prepared by cathode arc ion plating technology. The microstructure, residual stress and main performance evaluation of the multilayer film were studied systematically. The following results were obtained: 1) under the condition of the thickness of multilayer film, the number of periods increased. As a period of thinner, the surface smoothness of the multilayer films, the hardness, the hardness, the binding force and the abrasive resistance are obviously improved, while the residual stress is decreasing. With the decrease of the RTi/TiN:RZr/ZrN, the residual stress is increasing, the bonding force also decreases, and the hardness is slightly increased, and the abrasive resistance is scoured. The performance changes are not obvious; with the increase of metal and metal nitride (RMe:RMeN) ratio (RMe:RMeN), the hardness of the multilayer film decreases, and the binding force and the performance change of the abrasive scour are not obvious. The optimization process of the Ti-TiN-Zr-ZrN multilayer film in this experiment is about (200~300) NM, the modulation ratio of the gold and metal nitride is RMe:RMe N=1:6, the titanium and zirconium base modulation With the increase of the thickness of multilayer film, the residual stress is stable at a certain level, and the bonding force is on the rise due to the increase of the support strength. When the thickness of the film reaches a certain value (the test is 7.54 m), the hardness is basically stable above 30GPa.2) Ti-TiN-Zr-ZrN multi layer film has good anti abrasive erosion protection for the matrix material. With the increase of thickness, the ability of multilayer film to resist sand erosion is enhanced, and the protective effect of low erosion angle (30 degree) is obviously better than that of high erosion angle (90 degrees). The erosion mechanism of sand particles of.TC11 titanium alloy belongs to the erosion mechanism of plastic material, that is, the main effect is the cutting or plowing effect of sand under the low erosion angle, while the material is due to the high erosion angle. The plastic deformation of the sand particles is caused by the plastic deformation and causes the hardening. Finally, the mechanism of the erosion and wear of the.Ti-TiN-Zr-ZrN soft and hard alternate multilayer film appears in the stress concentration zone or the drop off pit, and expands along the longitudinal direction. When the crack extends to the metal soft layer, the stress is buffered and absorbed, thus the direction of the crack growth is extended. When the change is transversely extended along the interlayer interface, when the cracks are connected, some films are separated from the multilayer film and cause wear. The author establishes the mechanism model of the erosion failure mechanism of the soft and hard alternating multilayer film.3). After 50 cycles of heat shock at 300 and 500 degrees C, the film remains intact. Cracks, blisters and exfoliation only occur surface oxidation and produce color deepening and particle shedding. It shows that the multilayer film can effectively protect the matrix material. After 10 cycles of heat shock at 600 C, the surface of the specimen appears to be delamination on the surface due to the oxidation of the powder and the crack expansion, and the film has begun to fail at.600 C for 50 cycles. After that, the Ti-TiN-Zr-ZrN multilayer film with a thickness of about 10 m has completely failed, and the Ti-TiN-Zr-ZrN multilayer film with a thickness of about 20 m is still not completely invalid. Therefore, the use temperature of the Ti-TiN-Zr-ZrN multilayer film with thickness of 10 mu m is less than 500 degrees C.4) and the fatigue limit of TC11 material is increased from 440MPa to 470MPa, which increases the stress of 6.8%.. The fatigue life relationship (S-N curve) shows that when the stress level is lower than 570MPa, the multilayer film improves the fatigue life of the TC11 substrate, but when the stress level is higher than the 570MPa, the multilayer film reduces the fatigue life of the TC11 substrate. For the TC11 substrate, the crack source usually sprouts on the surface defects, and the number of crack sources increases with the increase of the stress level. The fracture form is a mixture of ductile and cleavage fracture.TC11 after plating multilayer film, the film covers the surface defects of the substrate. When the stress level is less than 570MPa, the sample has only a single crack source. At the same time, the multilayer film with soft and hard alternating modulation structure cushions the crack growth, thus improving the fatigue life of the specimen, after the stress level exceeds the 570MPa, The sample has multiple crack sources, the multilayer film is badly damaged and the fatigue life is reduced. The fracture form is also the ductile and cleavage mixed type fracture.5. Under the same technological conditions, the surface roughness of the matrix material has a great influence on the properties of the multilayer film: reducing the surface roughness of the matrix, improving the film / base resultant force, anti scour ability and corrosion resistance. The surface roughness of the target workpiece to be treated must be controlled at Ra 0.40 micron in order to obtain good comprehensive application performance of the film.
【學(xué)位授予單位】：華南理工大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TG174.4

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2 任喜強(qiáng);熱軋H700×300型鋼殘余應(yīng)力的控制[D];河北聯(lián)合大學(xué);2014年

3 宋金潮;非調(diào)質(zhì)鋼棒材軋后冷卻過程殘余應(yīng)力數(shù)值模擬及實(shí)驗(yàn)研究[D];燕山大學(xué);2015年

4 翟紫陽(yáng);超高強(qiáng)鋼厚板結(jié)構(gòu)件MIG焊溫度場(chǎng)應(yīng)力場(chǎng)數(shù)值模擬及試驗(yàn)研究[D];南京理工大學(xué);2015年

5 康玲;正交異性鋼橋面板縱、橫肋焊接殘余應(yīng)力數(shù)值模擬[D];西南交通大學(xué);2015年

6 孫彥文;Q345B鋼等離子-MAG復(fù)合焊工藝研究[D];西南交通大學(xué);2015年

7 王曉臣;面向衛(wèi)星零件工藝設(shè)計(jì)的拓?fù)鋬?yōu)化技術(shù)研究[D];北華航天工業(yè)學(xué)院;2015年

8 劉何亮;U肋與頂板連接焊縫殘余應(yīng)力的三維數(shù)值模擬[D];西南交通大學(xué);2015年

9 周鵬;微晶玻璃磨削表面的殘余應(yīng)力研究[D];蘇州大學(xué);2015年

10 張愛愛;基于SYSWELD的7A52鋁合金雙絲MIG焊殘余應(yīng)力分析[D];內(nèi)蒙古工業(yè)大學(xué);2015年

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