一種基于SEM在線納米切削的切削力檢測方法
發(fā)布時間：2018-07-17 22:29
【摘要】：針對納米切削中實時檢測切削力的難題,提出了基于掃描電鏡(SEM)原位納米切削平臺,實時檢測刀桿撓度變化的有效方法.通過視頻采集切削過程,對視頻進行分幀處理得到刀具切削過程的圖片.選取特征圖像,進行去噪、濾波、二值化、腐蝕及邊緣提取等圖像處理后,提取各幀圖像刀具區(qū)域目標(biāo)點像素信息,計算得到刀桿撓度的變化.將刀桿撓度值與有限元仿真所推得的力與撓度的關(guān)系相結(jié)合,定量給出撓度與切削力的數(shù)據(jù),獲得單晶硅切削中切削力的大小及波動情況,解決了SEM原位納米切削加工平臺的切削力實時檢測難題,為分析實際加工中刀具變形行為以及材料切削特性提供了理論依據(jù).
[Abstract]:Aiming at the difficult problem of real-time measuring cutting force in nano-cutting, an effective method of real-time detecting the deflection of cutter rod based on scanning electron microscope (SEM) in-situ nano-cutting platform is proposed. The cutting process of the cutting tool is obtained by the video capture and cutting process, and the video is divided into frames. After image processing such as denoising, filtering, binarization, etch and edge extraction, the pixel information of the cutter region of each frame is extracted, and the deflection of the tool rod is calculated. Combining the deflection value of tool rod with the relation between force and deflection obtained by finite element simulation, the data of deflection and cutting force are given quantitatively, and the magnitude and fluctuation of cutting force in single crystal silicon cutting are obtained. The problem of real time measuring of cutting force in SEM in situ machining platform is solved, which provides a theoretical basis for analyzing the deformation behavior of cutting tools and the cutting characteristics of materials in practical machining.
【作者單位】： 天津大學(xué)精密儀器與光電子工程學(xué)院;華為北京研究所;
【基金】：國家自然科學(xué)基金資助項目(51575389) 天津市自然科學(xué)基金資助項目(15JCYBJC19400)~~
【分類號】：TG501.3;TP391.41
本文編號：2131126
[Abstract]:Aiming at the difficult problem of real-time measuring cutting force in nano-cutting, an effective method of real-time detecting the deflection of cutter rod based on scanning electron microscope (SEM) in-situ nano-cutting platform is proposed. The cutting process of the cutting tool is obtained by the video capture and cutting process, and the video is divided into frames. After image processing such as denoising, filtering, binarization, etch and edge extraction, the pixel information of the cutter region of each frame is extracted, and the deflection of the tool rod is calculated. Combining the deflection value of tool rod with the relation between force and deflection obtained by finite element simulation, the data of deflection and cutting force are given quantitatively, and the magnitude and fluctuation of cutting force in single crystal silicon cutting are obtained. The problem of real time measuring of cutting force in SEM in situ machining platform is solved, which provides a theoretical basis for analyzing the deformation behavior of cutting tools and the cutting characteristics of materials in practical machining.
【作者單位】： 天津大學(xué)精密儀器與光電子工程學(xué)院;華為北京研究所;
【基金】：國家自然科學(xué)基金資助項目(51575389) 天津市自然科學(xué)基金資助項目(15JCYBJC19400)~~
【分類號】：TG501.3;TP391.41
【相似文獻】
相關(guān)期刊論文 前8條
1 劉小明;裴建文;江聲久;丁秀香;;銅基形狀記憶合金相組織形態(tài)的SEM研究[J];廣西大學(xué)學(xué)報(自然科學(xué)版);1993年S1期
2 陳敬區(qū);;吊車支架螺栓斷口SEM分析[J];南方金屬;2010年05期
3 吳小娟,張孝彬,浙江大學(xué);鐵道車輛減速頂構(gòu)件失效斷口的SEM分析[J];材料科學(xué)與工程;1998年01期
4 李巧玲,葉云;SEM對45鋼與W9MnCrV磨擦焊焊接接頭組織分析[J];電子顯微學(xué)報;2003年06期
5 徐飛;康戈文;任文偉;李聰;邱紹宇;;鋯-4合金低周疲勞斷口SEM特征提取及斷口分析[J];電子顯微學(xué)報;2006年02期
6 葉云,李巧玲;SEM對0Cr13不銹鋼襯里結(jié)構(gòu)的分析[J];電子顯微學(xué)報;2004年04期
7 趙賢平;羅麗;孫紅英;;SEM在安鋼線材研發(fā)中的應(yīng)用[J];河南冶金;2010年05期
8 金嘉陵;SEM多功能加載樣品臺在材料科學(xué)和機械工程中的應(yīng)用[J];上海鋼研;1996年02期
相關(guān)會議論文 前1條
1 沈一騎;;SEM電子光學(xué)光路自動設(shè)計初探[A];第七次全國電子顯微學(xué)會議論文摘要集[C];1993年
，本文編號：2131126
本文鏈接：http://sikaile.net/kejilunwen/jiagonggongyi/2131126.html
最近更新
教材專著
