本文選題：Mo-10Nb合金靶材 + 熱壓燒結(jié)　； 參考：《北方民族大學(xué)》2017年碩士論文

【摘要】：本文以鉬粉、鈮粉為原料,采用熱壓燒結(jié)工藝制備Mo-10Nb合金靶材,并將Mo-10Nb靶材用于直流磁控濺射鍍膜,分析Mo-10Nb靶材的制備工藝對(duì)濺射薄膜性能與微觀形貌的影響。通過(guò)研究不同熱壓工藝參數(shù)和Nb粉含量對(duì)Mo-10Nb合金靶材致密度和微觀形貌的影響,探索合適的熱壓工藝參數(shù),從而制備出高純、高致密和晶粒均勻的Mo-10Nb合金靶材,并探討了制備工藝對(duì)磁控濺射薄膜性能的影響。本實(shí)驗(yàn)采用X射線衍射儀、四探針電阻儀、AFM和SEM等分別表征濺射薄膜的擇優(yōu)取向、結(jié)晶性、導(dǎo)電性能、表面粗糙度、截面形貌及薄膜厚度,繼而確定Mo-10Nb合金靶材的熱壓溫度與薄膜性能之間的關(guān)系。研究結(jié)果表明:采用熱壓燒結(jié)工藝比無(wú)壓燒結(jié)工藝更容易獲得高致密、結(jié)晶性好和Nb元素分布均勻的Mo-10Nb合金靶材,且Mo-10Nb合金熱壓燒結(jié)的致密化過(guò)程與McClelland(麥克萊蘭德)熱壓方程吻合,表明熱壓燒結(jié)溫度和壓力是Mo-10Nb合金致密化的關(guān)鍵因素。同時(shí),通過(guò)研究加入不同含量Nb粉對(duì)Mo-Nb合金靶材的物相、致密度、微觀形貌等的影響,得出10 wt%的Nb粉加入有利于靶材的致密化和晶粒細(xì)化。此外,對(duì)Nb粉含量為10 wt%時(shí),不同熱壓燒結(jié)溫度制備的Mo-10Nb合金靶材進(jìn)行磁控濺射,分析其濺射薄膜的性能,結(jié)果表明:熱壓燒結(jié)溫度為1820℃,保溫時(shí)間為2 h,壓力為15 MPa時(shí),制備的Mo-10Nb合金靶材,其濺射薄膜的結(jié)晶性較好,擇優(yōu)取向?yàn)?110)晶面,表面粗糙度為87 nm,方阻值為0.1?(14)?。
[Abstract]:Mo-10Nb alloy targets were prepared by hot pressing sintering with molybdenum powder and niobium powder as raw materials. Mo-10Nb targets were used in DC magnetron sputtering deposition. Mo-10Nb alloy targets with high purity, high density and uniform grain size were prepared by studying the effects of different hot pressing process parameters and NB powder content on the density and micromorphology of Mo-10Nb alloy targets. The effect of preparation process on the properties of magnetron sputtering films was discussed. X-ray diffractometer, AFM and SEM were used to characterize the preferred orientation, crystallinity, conductivity, surface roughness, cross-section morphology and film thickness of the sputtering films, respectively. Then the relationship between hot pressing temperature and film properties of Mo-10Nb alloy target was determined. The results show that it is easier to obtain Mo-10Nb alloy targets with high density, good crystallinity and uniform distribution of NB elements by hot pressing sintering than by pressureless sintering. The densification process of Mo-10Nb alloy is in agreement with the McClelland (McClelland) hot pressing equation, which indicates that the sintering temperature and pressure are the key factors for the densification of Mo-10Nb alloy. At the same time, the effects of NB powder with different content on the phase, densification and micromorphology of Mo-Nb alloy target were studied. It was concluded that the addition of 10 wt% NB powder was beneficial to the densification and grain refinement of the target. In addition, the magnetron sputtering of Mo-10Nb alloy target prepared by different hot pressing sintering temperature was carried out when NB powder content was 10 wt%. The results showed that the sintering temperature was 1820 鈩，

本文編號(hào)：2099549