本文選題：微點(diǎn)膠器 + 多物理場(chǎng)��； 參考：《光學(xué)精密工程》2016年05期

【摘要】：針對(duì)微型器件封裝對(duì)非接觸式微膠量的需求,研制了壓電驅(qū)動(dòng)微點(diǎn)膠器,利用壓電陶瓷管擠壓毛細(xì)管產(chǎn)生的瞬時(shí)變形實(shí)現(xiàn)了微膠滴的分配。分析了毛細(xì)管內(nèi)的流體行為及液滴形成條件;基于多物理場(chǎng)耦合的方法,建立了壓電微噴的三設(shè)備(壓電陶瓷、毛細(xì)管、膠體)耦合模型。然后,討論了驅(qū)動(dòng)電壓、噴嘴直徑、膠體黏度對(duì)控制膠滴形成的影響。在構(gòu)建的實(shí)驗(yàn)平臺(tái)上,開展了控制膠滴形成的實(shí)驗(yàn)研究。分析了多控制參數(shù)(噴嘴直徑、膠體黏度、電壓幅值、脈沖寬度)的復(fù)合作用,通過匹配相應(yīng)的參數(shù)實(shí)現(xiàn)了pL級(jí)微膠滴的非接觸式分配。實(shí)驗(yàn)結(jié)果顯示:使用黏度為30mPa·s膠體,直徑為10μm的噴嘴,在驅(qū)動(dòng)電壓幅值為50V,脈沖寬度為37μs等參數(shù)配置下,可獲得最小膠滴的體積為8.31pL。實(shí)驗(yàn)結(jié)果驗(yàn)證了所提出方法和研制工具的有效性。
[Abstract]:In view of the requirement of micro device packaging for non-contact microgel, a piezoelectric microgel device is developed. The distribution of microgel droplets is realized by the instantaneous deformation produced by the piezoceramic tube extrusion capillary. The fluid behavior and droplet formation conditions in the capillary are analyzed. Based on the method of multi physical field coupling, the three setting of piezoelectric microjet is established. The effects of the driving voltage, nozzle diameter and colloid viscosity on the formation of droplets were discussed. An experimental study on the formation of droplets was carried out on the experimental platform. The composite effects of the multiple control parameters (nozzle straight diameter, colloid viscosity, voltage amplitude, pulse width) were analyzed. The non contact distribution of pL level microgel droplets is realized by matching the corresponding parameters. The experimental results show that the volume of the minimum droplet can be obtained by using the nozzle with the viscosity of 30mPa s colloid and the diameter of 10 u m, with the driving voltage amplitude of 50V and the pulse width of 37 u s. The results of the proposed method and development are verified by the experimental results. The validity of it.
【作者單位】： 哈爾濱工業(yè)大學(xué)機(jī)器人技術(shù)與系統(tǒng)國(guó)家重點(diǎn)實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金委員會(huì)創(chuàng)新研究群體科學(xué)基金項(xiàng)目支持(No.51521003) 機(jī)器人技術(shù)與系統(tǒng)國(guó)家重點(diǎn)實(shí)驗(yàn)室(哈爾濱工業(yè)大學(xué))自主研究課題(No.SKLRSZ01602C)
【分類號(hào)】：TG95

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