發(fā)布時(shí)間：2018-06-20 06:17

  本文選題：固結(jié)磨料研磨墊 + 親水性��； 參考：《南京航空航天大學(xué)》2017年碩士論文

【摘要】：隨著微電子、光電子、傳感器技術(shù)和材料技術(shù)的不斷發(fā)展,各類光學(xué)材料得到了廣泛應(yīng)用,同時(shí)也對(duì)光學(xué)材料的超光滑無(wú)損傷加工提出了更高的要求。傳統(tǒng)固結(jié)磨料研磨拋光技術(shù)由于結(jié)合劑的硬度較大,加工光學(xué)材料時(shí)易產(chǎn)生較大的損傷層,嚴(yán)重影響光學(xué)材料的加工效率和使用性能,由此親水性固結(jié)磨料研磨拋光技術(shù)應(yīng)運(yùn)而生。自修整性能作為親水性固結(jié)磨料研磨拋光墊(FAP)最主要的特性之一,直接影響著加工效率和被加工工件的表面質(zhì)量。本文采用理論分析與試驗(yàn)探索相結(jié)合的方法,建立親水性FAP自修整性能與主要影響因素之間的定量關(guān)系。主要完成的工作有:(1)探索了親水性FAP自修整性能的實(shí)現(xiàn)途徑,建立親水性FAP自修整過程模型,初步確定親水性FAP自修整性能的影響因素。通過單因素試驗(yàn),探索因素水平對(duì)親水性FAP自修整性能的影響。研究表明:材料硬脆性增大、研磨壓力提高、金剛石粒徑增加,親水性FAP自修整性能提高;隨著FAP中銅粉含量、研磨液中三乙醇胺含量、孔隙率的增加,親水性FAP自修整性能先增加后降低。(2)將工件材料去除速率變化率作為評(píng)價(jià)指標(biāo),采用回歸正交試驗(yàn)方法,探索親水性FAP自修整性能與工件材料特性(脆-塑轉(zhuǎn)變臨界切深)、研磨壓力、金剛石粒徑、孔隙率、研磨液中三乙醇胺含量之間的定量關(guān)系,建立親水性FAP自修整性能的回歸方程。對(duì)研磨過程磨屑尺寸形狀進(jìn)行統(tǒng)計(jì)分析,探索磨屑對(duì)親水性FAP自修整性能的影響。結(jié)果表明:工件材料特性、孔隙率、孔隙率與研磨壓力的交互作用對(duì)親水性FAP自修整性能影響較大;隨著研磨加工的持續(xù),磨屑尺寸減小,親水性FAP自修整性能降低。(3)采用正交試驗(yàn)的方法,探索工件材料特性、研磨壓力、孔隙率、基體強(qiáng)度弱化率等因素在多水平下對(duì)親水性FAP自修整性能的影響。同時(shí),將親水性FAP自修整性能與被加工工件的表面質(zhì)量聯(lián)系起來(lái)。研究表明:工件材料脆性大、研磨壓力高,親水性FAP自修整過程容易實(shí)現(xiàn);親水性FAP具備較好自修整能力,被加工工件的表面質(zhì)量較高。
[Abstract]:With the development of microelectronics, optoelectronics, sensor technology and material technology, all kinds of optical materials have been widely used, and higher requirements for ultra-smooth and non-damage processing of optical materials have been put forward. Because of the high hardness of binder, the traditional abrasive grinding and polishing technology is easy to produce a large damage layer when processing optical materials, which seriously affects the processing efficiency and performance of optical materials. Therefore, the hydrophilic consolidation abrasive grinding and polishing technology emerged as the times require. Self-dressing, as one of the most important properties of hydrophilic bonded abrasive grinding and polishing pad (FAPs), directly affects the processing efficiency and the surface quality of the workpiece being processed. In this paper, the quantitative relationship between hydrophilic FAP self-dressing performance and main influencing factors is established by combining theoretical analysis with experimental exploration. The main work accomplished is: (1) explore the way to realize hydrophilic FAP self-dressing, establish the hydrophilic FAP self-dressing process model, and preliminarily determine the influencing factors of hydrophilic FAP self-dressing performance. The effect of factor level on hydrophilic FAP self dressing performance was investigated by single factor test. The results show that the self-dressing property of hydrophilic FAP increases with the increase of hard brittleness, grinding pressure, diameter of diamond and the content of copper powder, triethanolamine content and porosity of grinding solution. The self-dressing property of hydrophilic FAP was firstly increased and then decreased. (2) the change rate of material removal rate of workpiece was taken as the evaluation index, and the regression orthogonal test method was used. The quantitative relationship between hydrophilic FAP self-dressing properties and workpiece material properties (critical cutting depth of brittle plastic transition, grinding pressure, diamond particle size, porosity, triethanolamine content in grinding fluid) was investigated. The regression equation of hydrophilic FAP self-dressing was established. The size and shape of abrasive debris in grinding process were statistically analyzed to explore the effect of debris on hydrophilic FAP self-dressing performance. The results show that the properties of workpiece, the interaction of porosity and grinding pressure have great influence on the self-dressing properties of hydrophilic FAP, and the size of debris decreases with the continuous grinding process. The effects of the properties of workpiece material, grinding pressure, porosity and matrix strength weakening rate on the self-dressing properties of hydrophilic FAP were investigated by orthogonal test. At the same time, the hydrophilic FAP self-dressing performance is related to the surface quality of the workpiece. The results show that the workpiece material is brittle, the grinding pressure is high, the hydrophilic FAP self-dressing process is easy to realize, the hydrophilic FAP has better self-dressing ability, and the surface quality of the workpiece is higher.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TG580.68

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