本文選題：絕對(duì)式光柵尺 + 細(xì)分技術(shù)　； 參考：《吉林大學(xué)》2017年碩士論文

【摘要】：光柵測(cè)量技術(shù)在精密測(cè)量領(lǐng)域占據(jù)著重要地位,相比激光測(cè)量,光柵常數(shù)受環(huán)境影響小,具有較強(qiáng)的抗干擾能力,因此普遍應(yīng)用于數(shù)控機(jī)床。近年來(lái)我國(guó)在光柵測(cè)量領(lǐng)域取得了長(zhǎng)足的進(jìn)步,但是仍然落后于德國(guó)和日本等發(fā)達(dá)國(guó)家,目前國(guó)內(nèi)主要生產(chǎn)增量式光柵尺,無(wú)法達(dá)到高效定位的目的。大部分超精密儀器采用的高精度光柵尺仍然依靠進(jìn)口,特別是絕對(duì)式光柵尺高端技術(shù)仍被國(guó)外壟斷。因此開(kāi)展具有高精度高分辨率的絕對(duì)式光柵尺關(guān)鍵技術(shù)的研究,分析阻礙分辨率和測(cè)量精度提升的因素并找到解決方案具有重要意義。本文就絕對(duì)式光柵尺中的細(xì)分技術(shù)、誤差補(bǔ)償算法做了專(zhuān)門(mén)的研究。設(shè)計(jì)了用于光柵尺精度檢測(cè)的氣浮式精度檢測(cè)平臺(tái),通過(guò)實(shí)驗(yàn)驗(yàn)證了各項(xiàng)技術(shù)的精度和可靠性。目前國(guó)內(nèi)公開(kāi)的對(duì)于光柵的細(xì)分技術(shù)的研究大部分是采用經(jīng)典細(xì)分技術(shù)中的幅值分割法,將測(cè)量得到的信號(hào)擬合成正切線(xiàn)中[0,45°]這一段,然后對(duì)其進(jìn)行細(xì)分,在運(yùn)用MATLAB對(duì)其進(jìn)行仿真時(shí)發(fā)現(xiàn)這一段是接近一條直線(xiàn),但是對(duì)于高倍細(xì)分誤差就變得明顯。因此新型細(xì)分技術(shù)不再是對(duì)其進(jìn)行擬合,而是直接在原曲線(xiàn)上取點(diǎn)進(jìn)行等距離細(xì)分,對(duì)采集到的曲線(xiàn)進(jìn)行濾波,修正處理后將曲線(xiàn)上的點(diǎn)送入查找表確定位置。優(yōu)點(diǎn)在于每一個(gè)位置代表的都是真實(shí)值,細(xì)分值均勻可靠,經(jīng)過(guò)測(cè)試能夠達(dá)到10nm的分辨率,精度等級(jí)達(dá)到±3um。絕對(duì)式光柵尺實(shí)時(shí)讀取絕對(duì)位置其絕對(duì)碼道的編解碼技術(shù)起到了關(guān)鍵作用,編碼方式的不同使得光柵傳感器在性能和效率上存在差異。現(xiàn)代工業(yè)產(chǎn)品向集成化,小型化方向發(fā)展,因此我們采用復(fù)合多位元m序列偽隨機(jī)碼為基礎(chǔ)的編碼方式,優(yōu)點(diǎn)是絕對(duì)碼的碼道只有一條,結(jié)構(gòu)緊湊,編碼的周期長(zhǎng)且可以復(fù)制,便于加工使用。在機(jī)誤差補(bǔ)償技術(shù)是根據(jù)安裝環(huán)境的不同將每把光柵尺用雙頻激光干涉儀檢測(cè)出自身需補(bǔ)償?shù)臄?shù)據(jù),保存到讀數(shù)頭存儲(chǔ)器,實(shí)際應(yīng)用時(shí)調(diào)用存儲(chǔ)器中的值進(jìn)行誤差補(bǔ)償。減少了由于安裝環(huán)境和裝配精度等外界因素造成的誤差。此外光柵尺本身的測(cè)量誤差是采用一種新的算法將由于存在相位差產(chǎn)生的橢圓型的李薩育圖形轉(zhuǎn)換為標(biāo)準(zhǔn)的李薩育圓,這樣便可以直接查詢(xún)標(biāo)準(zhǔn)的查找表。為了檢驗(yàn)本文研究的細(xì)分技術(shù)的高精度高穩(wěn)定性以及誤差補(bǔ)償算法的有效性,我們?cè)O(shè)計(jì)了一臺(tái)采用空氣軸承的精度檢測(cè)平臺(tái),并與常用的絲杠導(dǎo)軌的檢測(cè)平臺(tái)進(jìn)行了實(shí)驗(yàn)對(duì)比。選取同一把光柵尺的相同位置,每次前進(jìn)兩個(gè)分辨率的距離,記錄得到的數(shù)值,對(duì)每一個(gè)數(shù)組的標(biāo)準(zhǔn)差進(jìn)行對(duì)比。通過(guò)實(shí)驗(yàn)驗(yàn)證,空氣軸承的精度檢測(cè)平臺(tái)摩擦阻力小,抗振能力強(qiáng),具有更高的檢測(cè)穩(wěn)定性。在對(duì)新型光柵尺的驗(yàn)證部分,首先通過(guò)基于空氣軸承的精度檢測(cè)平臺(tái)對(duì)其進(jìn)行精度檢測(cè),通過(guò)對(duì)實(shí)驗(yàn)數(shù)據(jù)進(jìn)行分析:經(jīng)過(guò)誤差補(bǔ)償精度能夠達(dá)到±3um,同時(shí)對(duì)另一個(gè)重要參數(shù)重復(fù)度進(jìn)行測(cè)試,對(duì)光柵尺正反兩行程多點(diǎn)進(jìn)行檢測(cè),通過(guò)對(duì)數(shù)據(jù)的分析,重復(fù)度誤差同樣小于±3um,穩(wěn)定性非常好。
[Abstract]:Grating measurement technology occupies an important position in the field of precision measurement. Compared with the laser measurement, the grating constant is less affected by the environment and has strong anti-interference ability. Therefore, it is widely used in CNC machine tools. In recent years, China has made great progress in the field of grating measurement, but still lagging behind Germany and Japan and other developed countries. The main production of the incremental grating ruler can not achieve the purpose of high efficiency positioning. Most of the high-precision grating rulers used in ultra precision instruments are still dependent on the import, especially the high end technology of the absolute grating ruler is still monopolized abroad. Therefore, the research on the key technology of the absolute grating ruler with high precision and high resolution is carried out and the resolution of the resolution is analyzed. In this paper, the subdivision technology of the absolute grating size and the error compensation algorithm are studied in this paper. The air floatation precision testing platform for grating ruler precision detection is designed, and the accuracy and reliability of various technologies are verified by experiments. At present, it is open at home. Most of the research on the subdivision of the grating is the use of the amplitude segmentation method in the classical subdivision technology. The measured signal is proposed to synthesize the [0,45 degree section of the positive tangent line. Then it is subdivided. When the MATLAB is used to simulate it, it is found that this section is close to a straight line, but the high subdivision error becomes clear. Therefore, the new subdivision technique is no longer fit for it, but it takes the distance subdivision directly on the original curve, filters the collected curves, and then corrections the points on the curve to determine the position. The advantage is that each position represents the true value, the subdivision value is uniform and reliable, and the test can be carried out. In order to reach the resolution of 10nm, the precision grade reaches the absolute position of the absolute position of the 3um. absolute grating ruler. The coding and decoding technology plays a key role. The difference of the encoding mode makes the grating sensor difference in performance and efficiency. The modern industrial product develops to the integrated and miniaturized direction, so we use the composite The multi bit m sequence pseudorandom code is based on the coding method. It has the advantage that the code channel of the absolute code is only one piece, the structure is compact, the encoding period is long and can be copied, which is convenient for processing. The reading head memory is used to compensate the value of the memory in the actual application. It reduces the error caused by the external factors such as the installation environment and assembly precision. In addition, the measurement error of the grating ruler itself is a new algorithm that converts the elliptical type of plum breeding graphics from the existence of the phase difference to the standard Li Sa. In order to test the high precision and high stability of the subdivision technology and the validity of the error compensation algorithm, we designed a precision testing platform using air bearing, and compared the test platform with the common screw guide rail. The same position of the ruler, each time the distance of two resolutions forward, the value recorded, the standard deviation of each array is compared. Through the experiment, it is proved that the friction resistance of the air bearing detection platform is small, the anti vibration ability is strong, and the test stability is higher. The accuracy detection platform of the bearing is accurate. Through the analysis of the experimental data, the accuracy of the error compensation can reach to + 3um. At the same time, the repetition of another important parameter is tested, and the multiple point of the positive and negative two stroke of the grating ruler is detected. Through the analysis of the data, the repeatability error is also less than + 3um, and the stability is very stable. OK.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TP212;TG659

【相似文獻(xiàn)】

相關(guān)期刊論文 前2條

1 盧國(guó)綱;;機(jī)床絕對(duì)式位移測(cè)量及信號(hào)傳輸[J];金屬加工(冷加工);2009年22期

2 鄭黎明;譚向全;;絕對(duì)式光柵尺母光柵刻劃裝置的設(shè)計(jì)[J];機(jī)電產(chǎn)品開(kāi)發(fā)與創(chuàng)新;2014年02期

相關(guān)會(huì)議論文 前3條

1 李正生;馬文彥;;用EWB設(shè)計(jì)單道絕對(duì)式碼盤(pán)的M序列編碼[A];'2008系統(tǒng)仿真技術(shù)及其應(yīng)用學(xué)術(shù)會(huì)議論文集[C];2008年

2 楊俊志;;單碼道絕對(duì)式角度編碼器的通用編碼原理及解碼方法[A];大珩先生九十華誕文集暨中國(guó)光學(xué)學(xué)會(huì)2004年學(xué)術(shù)大會(huì)論文集[C];2004年

3 楊俊志;;單碼道絕對(duì)式角度編碼器的編碼及解碼原理[A];第二屆全國(guó)信息獲取與處理學(xué)術(shù)會(huì)議論文集[C];2004年

相關(guān)博士學(xué)位論文 前1條

1 丁紅昌;絕對(duì)式單碼道線(xiàn)位移光柵傳感器原理與實(shí)現(xiàn)[D];長(zhǎng)春理工大學(xué);2016年

相關(guān)碩士學(xué)位論文 前8條

1 李斐然;基于霍爾原理的絕對(duì)式磁編碼器的研究[D];哈爾濱工業(yè)大學(xué);2015年

2 伍劍;衍射型絕對(duì)式軸角編碼技術(shù)研究[D];浙江大學(xué);2015年

3 張靜;基于絕對(duì)式時(shí)柵的FMT研究與設(shè)計(jì)[D];重慶理工大學(xué);2016年

4 胡國(guó)良;絕對(duì)式光柵傳感器關(guān)鍵技術(shù)的研究[D];吉林大學(xué);2017年

5 章晶;基于機(jī)器視覺(jué)的絕對(duì)式角位置傳感器研究[D];北京交通大學(xué);2014年

6 高麗娜;一種單圈絕對(duì)式碼盤(pán)編譯碼技術(shù)的研究與實(shí)現(xiàn)[D];中國(guó)科學(xué)院研究生院（西安光學(xué)精密機(jī)械研究所）;2012年

7 楊寧;絕對(duì)式光柵位移傳感器裝調(diào)系統(tǒng)研究[D];長(zhǎng)春理工大學(xué);2013年

8 侯林汝;絕對(duì)式磁電編碼器通信接口研究[D];華南理工大學(xué);2012年

，

本文編號(hào)：1925923