本文選題：TiC涂層 + Ag、Si結(jié)構(gòu)改性TiAlN涂層�。� 參考：《南昌航空大學》2017年碩士論文

【摘要】：當前,對于涂層摩擦學性能的實驗室研究大都在恒溫條件下進行,但在實際的工況中,涂層的溫度是逐漸變化的。因此,對于應用和研究較廣泛的TiAlN和TiAlSiN涂層,本文選用Al2O3為對磨材料,在對其室溫(RT)、300oC、600oC恒溫摩擦學性能研究的基礎上,研究其在RT-600oC和600oC-300oC變溫環(huán)境的摩擦學性能。并且制備了TiC/TiAlN-Ag、TiC/TiAlN-Ag/Ti AlSiN多層復合膜,研究多層復合涂層在恒溫及變溫環(huán)境的摩擦學性能。(1)采用電弧離子鍍技術(shù)在Ar/CH4氣氛中AISI304不銹鋼表面制備Ti-C涂層,研究了CH4流量對涂層結(jié)構(gòu)和摩擦學性能的影響。發(fā)現(xiàn)隨著CH4流量的升高,涂層沉積速率下降。當CH4流量為2sccm和10sccm時,C原子主要作為間隙原子固溶在密排六方Ti晶格內(nèi);當CH4流量為20sccm時,涂層的主要結(jié)構(gòu)為TiC相。CH4流量為2sccm時,涂層硬度值為700Hv0.05,摩擦系數(shù)值波動較大,磨損機理主要為粘著磨損。CH4流量為20sccm時,涂層硬度值最高,為2010Hv0.05,摩擦系數(shù)值最低,而且較平穩(wěn),約為0.57,磨損機理主要為磨粒磨損。(2)采用電弧離子鍍技術(shù)制備TiAlN和TiAlSiN涂層,采用磁控濺射技術(shù)制備TiAlN-Ag涂層。在300oC和RT-600oC環(huán)境中,空氣濕度相對較低,吸附在涂層與摩擦副之間的水膜被破壞,導致涂層磨損劇烈,磨損機理以粘著磨損和疲勞斷裂為主。其中,TiAlN涂層摩擦系數(shù)值較高(大于1),波動較大,磨損率分別為0.21×10-3mm3/(Nm)和0.17×10-3mm3/(Nm),TiAlSiN和TiAlN-Ag涂層也均已磨穿或接近磨穿。600oC和600oC-300oC的環(huán)境中,涂層的表面大都生成了氧化物,起到了較好的潤滑效果。TiAlN-Ag涂層在室溫條件下摩擦系數(shù)值較高,較TiAlN涂層耐磨性下降,磨損機理主要為粘著磨損。(3)采用電弧離子鍍和磁控濺射交替沉積技術(shù),分別制備TiC/TiAlN-Ag和TiC/TiAlN-Ag/TiAlSiN多層復合膜。TiC/TiAlN-Ag多層膜的調(diào)制周期約為0.46μm,TiC、TiAlN-Ag厚度比為3:2;Ti C/TiAlN-Ag/Ti AlSiN多層膜的調(diào)制周期約為0.45μm,TiC、TiAlN-Ag、TiAlSiN厚度比約為3:2:2。涂層的表面質(zhì)量較TiC涂層有較大改善。兩者的主要結(jié)構(gòu)為TiC相和TiAlN相,硬度值分別為1141.5Hv0.05和2194.7Hv0.05。TiC/TiAlN-Ag復合膜在600oC條件下,發(fā)生了較嚴重的氧化,導致機械性能降低,涂層發(fā)生了嚴重的塑形位移,磨損率較大,為0.158×10-3mm3/(Nm),在300oC和RT-600oC條件下,涂層被磨穿。TiC/TiAlN-Ag/TiAlSiN多層復合膜在600oC條件下的抗氧化性增強,在Al2O3球磨痕表面形成了Ag轉(zhuǎn)移膜,摩擦系數(shù)約為1.1,磨損率約為0.06×10-3mm3/(Nm)。在300oC和RT-600oC的條件下,摩擦學性能較單層膜有較大改善,摩擦系數(shù)約為0.8,磨損機理主要為磨粒磨損,磨損率分別為0.15×10-3mm3/(Nm)和0.13×10-3mm3/(Nm),其原因為多層結(jié)構(gòu)阻止了疲勞裂紋的縱向生長。但是涂層在室溫條件下,耐磨性較差,有可能是因為涂層內(nèi)部較大的殘余內(nèi)應力。
[Abstract]:At present, most of the laboratory researches on the tribological properties of the coatings are carried out under the condition of constant temperature, but the temperature of the coating changes gradually in the actual working conditions. Therefore, for the widely used and studied TiAlN and TiAlSiN coatings, the tribological properties of Al2O3 are studied in RT-600oC and 600oC-300oC environments on the basis of the tribological properties of 300oC and 600oC at room temperature. TiC / TiAlN-AgN / TiC- / TiAlN-AgTi AlSiN multilayer composite films were prepared. The tribological properties of the multilayer composite coatings in constant and variable temperature environments were investigated. The Ti-C coating was prepared on the surface of AISI304 stainless steel in Ar/CH4 atmosphere by arc ion plating. The effect of CH4 flow rate on the structure and tribological properties of the coating was studied. It is found that the deposition rate decreases with the increase of CH4 flow rate. When the flow rate of CH4 is 2sccm and 10sccm, the C atoms are mainly dissolved as interstitial atoms in hexagonal Ti lattice, and when the flow rate of CH4 is 20sccm, the main structure of the coating is TiC phase. Ch 4 flow rate is 2sccm, the hardness of the coating is 700Hv 0.05, and the friction coefficient fluctuates greatly. The wear mechanism is mainly adhesive wear. Ch _ 4 flow rate is 20sccm, the hardness of the coating is the highest (2010 Hv 0.05), the friction coefficient is the lowest, and the friction coefficient is relatively stable, about 0.57.The wear mechanism is mainly abrasive wear. 2) TiAlN and TiAlSiN coatings are prepared by arc ion plating. TiAlN-Ag coatings were prepared by magnetron sputtering. In the environment of 300oC and RT-600oC, the air humidity is relatively low and the water film adsorbed between the coating and the friction pair is destroyed, which leads to severe wear of the coating. The wear mechanism is mainly adhesive wear and fatigue fracture. The friction coefficient of TiAlN coating is higher (> 1 ~ (-1), fluctuating, the wear rate is 0.21 脳 10 ~ (-3) mm ~ (-3) / N ~ (-1) and 0.17 脳 10 ~ (-3) mm ~ (-3) / N ~ (-1) TiAlN-Ag coating has also been worn through or nearly worn through the environment of .600oC and 600oC-300oC, the surface of the coating has mostly produced oxide. The friction coefficient of TiAlN-Ag coating is higher at room temperature, and the wear resistance of TiAlN-Ag coating is lower than that of TiAlN coating. The wear mechanism of TiAlN-Ag coating is mainly adhesive wear. The modulation period of TiC/TiAlN-Ag and TiC/TiAlN-Ag/TiAlSiN multilayers. TiC- / TiAlN-Ag multilayers is about 0.46 渭 m TiCU TiAlN-Ag thickness ratio is 3: 2 Ti C/TiAlN-Ag/Ti AlSiN multilayer films, the modulation period is about 0.45 渭 m TiCU TiAlN-AgN TiAlSiN thickness ratio is about 3: 2: 2. The surface quality of the coating is better than that of TiC coating. The main structures of the two films are TiC phase and TiAlN phase. The hardness values of 1141.5Hv0.05 and 2194.7Hv0.05.TiC/TiAlN-Ag composite films are 1141.5Hv0.05 and 2194.7Hv0.05.TiC/TiAlN-Ag, respectively. Under the condition of 600oC, more serious oxidation occurs, which leads to the decrease of mechanical properties, the serious plastic displacement of the coating, and the higher wear rate. Under 300oC and RT-600oC conditions, the oxidation resistance of TiAlN-Ag- TiAlSiN multilayer composite film was enhanced under 600oC condition, and Ag transfer film was formed on the surface of Al2O3 ball wear mark. The friction coefficient was about 1.1 and the wear rate was 0.06 脳 10 ~ (-3) mm ~ (-3) mm ~ (-1). Under the conditions of 300oC and RT-600oC, the tribological properties of the films are much improved, the friction coefficient is about 0.8. The wear mechanism is mainly abrasive wear, with wear rates of 0.15 脳 10 ~ (-3) mm ~ (-3) Nm) and 0.13 脳 10 ~ (-3) mm ~ (-3) N _ (m), respectively. The reason is that the multilayer structure prevents the longitudinal growth of fatigue cracks. However, the wear resistance of the coating is poor at room temperature, which may be due to the large residual stress inside the coating.
【學位授予單位】：南昌航空大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TG174.4

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